FR2335839A1 - Procede d'analyse d'echantillons en matiere isolante par spectrometrie photo-electronique et porte-echantillon pour la mise en oeuvre dudit procede - Google Patents

Procede d'analyse d'echantillons en matiere isolante par spectrometrie photo-electronique et porte-echantillon pour la mise en oeuvre dudit procede

Info

Publication number
FR2335839A1
FR2335839A1 FR7539096A FR7539096A FR2335839A1 FR 2335839 A1 FR2335839 A1 FR 2335839A1 FR 7539096 A FR7539096 A FR 7539096A FR 7539096 A FR7539096 A FR 7539096A FR 2335839 A1 FR2335839 A1 FR 2335839A1
Authority
FR
France
Prior art keywords
photo
samples
implementation
analysis
insulating material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7539096A
Other languages
English (en)
Other versions
FR2335839B1 (fr
Inventor
Lucette Feve
Remy Fontaine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7539096A priority Critical patent/FR2335839A1/fr
Priority to BE173020A priority patent/BE849129A/fr
Priority to GB52346/76A priority patent/GB1556075A/en
Priority to SE7614161A priority patent/SE409906B/xx
Priority to US05/751,374 priority patent/US4097738A/en
Priority to DE19762657439 priority patent/DE2657439A1/de
Priority to ES454412A priority patent/ES454412A1/es
Priority to JP51153289A priority patent/JPS5277792A/ja
Publication of FR2335839A1 publication Critical patent/FR2335839A1/fr
Application granted granted Critical
Publication of FR2335839B1 publication Critical patent/FR2335839B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7539096A 1975-12-19 1975-12-19 Procede d'analyse d'echantillons en matiere isolante par spectrometrie photo-electronique et porte-echantillon pour la mise en oeuvre dudit procede Granted FR2335839A1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR7539096A FR2335839A1 (fr) 1975-12-19 1975-12-19 Procede d'analyse d'echantillons en matiere isolante par spectrometrie photo-electronique et porte-echantillon pour la mise en oeuvre dudit procede
BE173020A BE849129A (fr) 1975-12-19 1976-12-07 Procede d'analyse d'echantillons en matiere isolante par spectrometrie photo-electronique et porte echantillon pour la mise en oeuvre dudit procede
GB52346/76A GB1556075A (en) 1975-12-19 1976-12-15 Method of analysis of a sample of insulating materials
SE7614161A SE409906B (sv) 1975-12-19 1976-12-16 Sett och anordning for analys med fotoelektronspektroskopi
US05/751,374 US4097738A (en) 1975-12-19 1976-12-17 Method of analysis of a sample of insulating material by photoelectronic spectrometry
DE19762657439 DE2657439A1 (de) 1975-12-19 1976-12-17 Verfahren zum analysieren einer materialprobe aus einem isoliermaterial durch photoelektronische spektrometrie und probenhalter zur durchfuehrung des verfahrens
ES454412A ES454412A1 (es) 1975-12-19 1976-12-18 Dispositivo de analisis por espectrometria fotoelectronica de una muestra de material aislante.
JP51153289A JPS5277792A (en) 1975-12-19 1976-12-20 Method of analyzing nonconductive specimen by photoelectron polarizing method and plate for holding specimen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7539096A FR2335839A1 (fr) 1975-12-19 1975-12-19 Procede d'analyse d'echantillons en matiere isolante par spectrometrie photo-electronique et porte-echantillon pour la mise en oeuvre dudit procede

Publications (2)

Publication Number Publication Date
FR2335839A1 true FR2335839A1 (fr) 1977-07-15
FR2335839B1 FR2335839B1 (fr) 1980-01-25

Family

ID=9163968

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7539096A Granted FR2335839A1 (fr) 1975-12-19 1975-12-19 Procede d'analyse d'echantillons en matiere isolante par spectrometrie photo-electronique et porte-echantillon pour la mise en oeuvre dudit procede

Country Status (8)

Country Link
US (1) US4097738A (fr)
JP (1) JPS5277792A (fr)
BE (1) BE849129A (fr)
DE (1) DE2657439A1 (fr)
ES (1) ES454412A1 (fr)
FR (1) FR2335839A1 (fr)
GB (1) GB1556075A (fr)
SE (1) SE409906B (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3128814A1 (de) * 1981-07-21 1983-02-10 Siemens AG, 1000 Berlin und 8000 München Elektrisch leitende probenhalterung fuer die analysentechnik der sekundaerionen-massenspektrometrie
JPH0711495B2 (ja) * 1982-05-07 1995-02-08 株式会社日立製作所 光電子測定方法
JPS60121652A (ja) * 1983-12-02 1985-06-29 Hitachi Ltd 質量分析用試料ホルダ−
JPS60135846A (ja) * 1983-12-26 1985-07-19 Anelva Corp 二次イオン質量分析方法
US4590376A (en) * 1984-05-30 1986-05-20 Photo Acoustic Technology, Inc. Apparatus and technique for monitoring photoelectron emission from surfaces
DE3576213D1 (de) * 1984-09-18 1990-04-05 Integrated Circuit Testing Gegenfeld-spektrometer fuer die elektronenstrahl-messtechnik.
WO1993004210A1 (fr) * 1991-08-19 1993-03-04 Tadahiro Ohmi Procede de formation d'un film d'oxyde
US6146135A (en) 1991-08-19 2000-11-14 Tadahiro Ohmi Oxide film forming method
US8307665B2 (en) * 2006-04-06 2012-11-13 National Institute Of Advanced Industrial Science And Technology Sample cooling apparatus
CN114047215B (zh) * 2021-10-20 2023-08-15 北京科技大学顺德研究生院 一种用于消除被测样品表面不均匀荷电的装置及方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1282498A (en) * 1969-11-17 1972-07-19 Ass Elect Ind Improvements in or relating to apparatus for use in electron spectroscopy
US3749926A (en) * 1971-08-03 1973-07-31 Du Pont Charged particle energy analysis
US3822383A (en) * 1973-04-13 1974-07-02 Weston Instruments Inc Profile gauging system

Also Published As

Publication number Publication date
DE2657439A1 (de) 1977-07-07
SE409906B (sv) 1979-09-10
US4097738A (en) 1978-06-27
BE849129A (fr) 1977-04-01
SE7614161L (sv) 1977-06-20
FR2335839B1 (fr) 1980-01-25
JPS5277792A (en) 1977-06-30
GB1556075A (en) 1979-11-21
ES454412A1 (es) 1977-12-01

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Legal Events

Date Code Title Description
DL Decision of the director general to leave to make available licences of right
ST Notification of lapse