SE409906B - Sett och anordning for analys med fotoelektronspektroskopi - Google Patents

Sett och anordning for analys med fotoelektronspektroskopi

Info

Publication number
SE409906B
SE409906B SE7614161A SE7614161A SE409906B SE 409906 B SE409906 B SE 409906B SE 7614161 A SE7614161 A SE 7614161A SE 7614161 A SE7614161 A SE 7614161A SE 409906 B SE409906 B SE 409906B
Authority
SE
Sweden
Prior art keywords
analysis
photoelectron spectroscopy
photoelectron
spectroscopy
Prior art date
Application number
SE7614161A
Other languages
English (en)
Other versions
SE7614161L (sv
Inventor
L Feve
R Fontaine
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Publication of SE7614161L publication Critical patent/SE7614161L/sv
Publication of SE409906B publication Critical patent/SE409906B/sv

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
SE7614161A 1975-12-19 1976-12-16 Sett och anordning for analys med fotoelektronspektroskopi SE409906B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7539096A FR2335839A1 (fr) 1975-12-19 1975-12-19 Procede d'analyse d'echantillons en matiere isolante par spectrometrie photo-electronique et porte-echantillon pour la mise en oeuvre dudit procede

Publications (2)

Publication Number Publication Date
SE7614161L SE7614161L (sv) 1977-06-20
SE409906B true SE409906B (sv) 1979-09-10

Family

ID=9163968

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7614161A SE409906B (sv) 1975-12-19 1976-12-16 Sett och anordning for analys med fotoelektronspektroskopi

Country Status (8)

Country Link
US (1) US4097738A (sv)
JP (1) JPS5277792A (sv)
BE (1) BE849129A (sv)
DE (1) DE2657439A1 (sv)
ES (1) ES454412A1 (sv)
FR (1) FR2335839A1 (sv)
GB (1) GB1556075A (sv)
SE (1) SE409906B (sv)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3128814A1 (de) * 1981-07-21 1983-02-10 Siemens AG, 1000 Berlin und 8000 München Elektrisch leitende probenhalterung fuer die analysentechnik der sekundaerionen-massenspektrometrie
JPH0711495B2 (ja) * 1982-05-07 1995-02-08 株式会社日立製作所 光電子測定方法
JPS60121652A (ja) * 1983-12-02 1985-06-29 Hitachi Ltd 質量分析用試料ホルダ−
JPS60135846A (ja) * 1983-12-26 1985-07-19 Anelva Corp 二次イオン質量分析方法
US4590376A (en) * 1984-05-30 1986-05-20 Photo Acoustic Technology, Inc. Apparatus and technique for monitoring photoelectron emission from surfaces
EP0178431B1 (de) * 1984-09-18 1990-02-28 ICT Integrated Circuit Testing Gesellschaft für HalbleiterprÀ¼ftechnik mbH Gegenfeld-Spektrometer für die Elektronenstrahl-Messtechnik
US6146135A (en) 1991-08-19 2000-11-14 Tadahiro Ohmi Oxide film forming method
EP0661385A1 (en) * 1991-08-19 1995-07-05 OHMI, Tadahiro Method for forming oxide film
US8307665B2 (en) * 2006-04-06 2012-11-13 National Institute Of Advanced Industrial Science And Technology Sample cooling apparatus
CN114047215B (zh) * 2021-10-20 2023-08-15 北京科技大学顺德研究生院 一种用于消除被测样品表面不均匀荷电的装置及方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1282498A (en) * 1969-11-17 1972-07-19 Ass Elect Ind Improvements in or relating to apparatus for use in electron spectroscopy
US3749926A (en) * 1971-08-03 1973-07-31 Du Pont Charged particle energy analysis
US3822383A (en) * 1973-04-13 1974-07-02 Weston Instruments Inc Profile gauging system

Also Published As

Publication number Publication date
SE7614161L (sv) 1977-06-20
JPS5277792A (en) 1977-06-30
FR2335839B1 (sv) 1980-01-25
BE849129A (fr) 1977-04-01
FR2335839A1 (fr) 1977-07-15
DE2657439A1 (de) 1977-07-07
ES454412A1 (es) 1977-12-01
US4097738A (en) 1978-06-27
GB1556075A (en) 1979-11-21

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