FR2334199B1 - - Google Patents
Info
- Publication number
- FR2334199B1 FR2334199B1 FR7635519A FR7635519A FR2334199B1 FR 2334199 B1 FR2334199 B1 FR 2334199B1 FR 7635519 A FR7635519 A FR 7635519A FR 7635519 A FR7635519 A FR 7635519A FR 2334199 B1 FR2334199 B1 FR 2334199B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P70/273—
-
- H10P50/268—
-
- H10P50/283—
-
- H10P50/667—
-
- H10W20/082—
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19752554638 DE2554638A1 (de) | 1975-12-04 | 1975-12-04 | Verfahren zur erzeugung definierter boeschungswinkel bei einer aetzkante |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2334199A1 FR2334199A1 (fr) | 1977-07-01 |
| FR2334199B1 true FR2334199B1 (show.php) | 1979-04-06 |
Family
ID=5963486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7635519A Granted FR2334199A1 (fr) | 1975-12-04 | 1976-11-25 | Procede pour realiser des angles de talus determines pour des bords de structures, realisees par attaque chimique |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5269576A (show.php) |
| BE (1) | BE849065A (show.php) |
| DE (1) | DE2554638A1 (show.php) |
| FR (1) | FR2334199A1 (show.php) |
| GB (1) | GB1551290A (show.php) |
| IT (1) | IT1065165B (show.php) |
| NL (1) | NL7613275A (show.php) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD136670A1 (de) * | 1976-02-04 | 1979-07-18 | Rudolf Sacher | Verfahren und vorrichtung zur herstellung von halbleiterstrukturen |
| DE2754549A1 (de) * | 1977-12-07 | 1979-06-13 | Siemens Ag | Optoelektronischer sensor nach dem prinzip der ladungsinjektion |
| DE2837485A1 (de) * | 1978-08-28 | 1980-04-17 | Siemens Ag | Verfahren zur herstellung einer ladungsgekoppelten anordnung fuer sensoren und speicher |
| JPS55157234A (en) * | 1979-05-25 | 1980-12-06 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacture of semiconductor device |
| JPS60128622A (ja) * | 1983-12-16 | 1985-07-09 | Hitachi Ltd | エツチング法 |
| GB2165692B (en) * | 1984-08-25 | 1989-05-04 | Ricoh Kk | Manufacture of interconnection patterns |
| DE68925774T2 (de) * | 1988-10-02 | 1996-08-08 | Canon Kk | Feinbearbeitungsmethode für kristallines Material |
| DE4140330C1 (show.php) * | 1991-12-06 | 1993-03-18 | Texas Instruments Deutschland Gmbh, 8050 Freising, De | |
| DE19837395C2 (de) * | 1998-08-18 | 2001-07-19 | Infineon Technologies Ag | Verfahren zur Herstellung eines eine strukturierte Isolationsschicht enthaltenden Halbleiterbauelements |
| US6352934B1 (en) * | 1999-08-26 | 2002-03-05 | Infineon Technologies Ag | Sidewall oxide process for improved shallow junction formation in support region |
| US20060175670A1 (en) * | 2005-02-10 | 2006-08-10 | Nec Compound Semiconductor Device, Ltd. | Field effect transistor and method of manufacturing a field effect transistor |
| JP2011243657A (ja) * | 2010-05-14 | 2011-12-01 | Mitsumi Electric Co Ltd | 半導体装置の製造方法 |
-
1975
- 1975-12-04 DE DE19752554638 patent/DE2554638A1/de active Pending
-
1976
- 1976-11-24 GB GB44340/76A patent/GB1551290A/en not_active Expired
- 1976-11-25 FR FR7635519A patent/FR2334199A1/fr active Granted
- 1976-11-29 NL NL7613275A patent/NL7613275A/xx unknown
- 1976-12-03 JP JP51145509A patent/JPS5269576A/ja active Pending
- 1976-12-03 IT IT30064/76A patent/IT1065165B/it active
- 1976-12-03 BE BE172972A patent/BE849065A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| GB1551290A (en) | 1979-08-30 |
| IT1065165B (it) | 1985-02-25 |
| BE849065A (fr) | 1977-04-01 |
| DE2554638A1 (de) | 1977-06-16 |
| NL7613275A (nl) | 1977-06-07 |
| FR2334199A1 (fr) | 1977-07-01 |
| JPS5269576A (en) | 1977-06-09 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |