FR2325952A1 - Systeme optique pour usinage de couches minces par un faisceau laser - Google Patents
Systeme optique pour usinage de couches minces par un faisceau laserInfo
- Publication number
- FR2325952A1 FR2325952A1 FR7629153A FR7629153A FR2325952A1 FR 2325952 A1 FR2325952 A1 FR 2325952A1 FR 7629153 A FR7629153 A FR 7629153A FR 7629153 A FR7629153 A FR 7629153A FR 2325952 A1 FR2325952 A1 FR 2325952A1
- Authority
- FR
- France
- Prior art keywords
- optical system
- laser beam
- thin layer
- layer machining
- machining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D15/00—Component parts of recorders for measuring arrangements not specially adapted for a specific variable
- G01D15/14—Optical recording elements; Recording elements using X-or nuclear radiation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
- G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
- G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0966—Cylindrical lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4206—Optical features
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/024—Details of scanning heads ; Means for illuminating the original
- H04N1/032—Details of scanning heads ; Means for illuminating the original for picture information reproduction
- H04N1/036—Details of scanning heads ; Means for illuminating the original for picture information reproduction for optical reproduction
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Mechanical Engineering (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Semiconductor Lasers (AREA)
- Laser Beam Processing (AREA)
- Dot-Matrix Printers And Others (AREA)
- Laser Beam Printer (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Exposure Or Original Feeding In Electrophotography (AREA)
- Lenses (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/617,531 US3974507A (en) | 1975-09-29 | 1975-09-29 | Conversion of stripe-geometry junction laser emission to a spherical wavefront |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2325952A1 true FR2325952A1 (fr) | 1977-04-22 |
FR2325952B1 FR2325952B1 (fr) | 1979-01-12 |
Family
ID=24474012
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7629153A Granted FR2325952A1 (fr) | 1975-09-29 | 1976-09-28 | Systeme optique pour usinage de couches minces par un faisceau laser |
Country Status (7)
Country | Link |
---|---|
US (1) | US3974507A (fr) |
JP (1) | JPS5242741A (fr) |
CA (1) | CA1067735A (fr) |
DE (1) | DE2643364A1 (fr) |
FR (1) | FR2325952A1 (fr) |
GB (1) | GB1554201A (fr) |
NL (1) | NL7610738A (fr) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4318594A (en) * | 1977-02-15 | 1982-03-09 | Canon Kabushiki Kaisha | Beam shaping optical system |
JPS5443692A (en) * | 1977-09-13 | 1979-04-06 | Matsushita Electric Ind Co Ltd | Semiconductor laser condensing optical device |
US4235507A (en) * | 1977-09-16 | 1980-11-25 | Hitachi, Ltd. | Optical system to condense light from a semiconductor laser into a circular spot |
JPS54143661A (en) * | 1978-04-28 | 1979-11-09 | Canon Inc | Recording optical system |
JPS54143659A (en) * | 1978-04-28 | 1979-11-09 | Canon Inc | Image forming optical system for semiconductor laser |
US4257053A (en) * | 1979-02-09 | 1981-03-17 | Geosource, Inc. | High-resolution laser plotter |
JPS55130512A (en) * | 1979-03-30 | 1980-10-09 | Canon Inc | Semiconductor laser optical system |
US4333173A (en) * | 1979-06-15 | 1982-06-01 | Hitachi, Ltd. | Optical information processor with prismatic correction of laser beam shape |
JPS566038U (fr) * | 1979-06-25 | 1981-01-20 | ||
NL8200557A (nl) * | 1981-02-25 | 1982-09-16 | Benson Inc | Laseraftastinrichting. |
CA1204199A (fr) * | 1982-02-19 | 1986-05-06 | Shigeo Kubota | Appareil d'optique |
US4588269A (en) * | 1984-07-05 | 1986-05-13 | Eastman Kodak Company | Apparatus which shapes gaussian beams by spherical mirrors |
JPS6063519A (ja) * | 1984-08-13 | 1985-04-11 | Hitachi Ltd | 半導体レ−ザ装置 |
US4656641A (en) * | 1985-02-04 | 1987-04-07 | Xerox Corporation | Laser cavity optical system for stabilizing the beam from a phase locked multi-emitter broad emitter laser |
JPS61216144A (ja) * | 1985-10-04 | 1986-09-25 | Hitachi Ltd | 光情報処理装置 |
US4728965A (en) * | 1986-06-20 | 1988-03-01 | Eastman Kodak Company | Laser printer having means for correcting laser pointing errors |
JPS6290990A (ja) * | 1986-09-12 | 1987-04-25 | Hitachi Ltd | 半導体レ−ザ装置 |
US4942583A (en) * | 1988-06-17 | 1990-07-17 | Hewlett-Packard Company | Misalignment-tolerant, grating-tuned external-cavity laser |
US4956650A (en) * | 1988-08-26 | 1990-09-11 | Ateq Corporation | Pattern generation system |
GB8905289D0 (en) * | 1989-03-08 | 1989-04-19 | Crosfield Electronics Ltd | Reducing aberrations in radiation beams |
JP2980938B2 (ja) * | 1990-04-12 | 1999-11-22 | 株式会社ニデック | 半導体レーザー光を集光するためのレンズ系 |
JP2828221B2 (ja) * | 1991-06-04 | 1998-11-25 | インターナショナル・ビジネス・マシーンズ・コーポレイション | レーザー光波長変換装置 |
US5177750A (en) * | 1991-07-30 | 1993-01-05 | Hewlett-Packard Company | Misalignment-tolerant, grating-tuned external-cavity laser with enhanced longitudinal mode selectivity |
US5438187A (en) * | 1991-11-01 | 1995-08-01 | Spectra-Physics Scanning Systems, Inc. | Multiple focus optical system for data reading applications |
US5504350A (en) * | 1992-08-12 | 1996-04-02 | Spectra-Physics Scanning Systems, Inc. | Lens configuration |
JPH05257080A (ja) * | 1992-12-10 | 1993-10-08 | Canon Inc | 半導体レーザ光学装置 |
DE19623270C2 (de) * | 1996-06-11 | 1998-05-20 | Juergen Rebel | Adaptives optisches Abbildungssystem zur Abbildung eines von einem Laser emittierten Strahlenbündels |
US5900986A (en) * | 1998-06-17 | 1999-05-04 | The United States Of America As Represented By The Secretary Of The Air Force | Columnar focal lens |
US7961369B2 (en) * | 2005-09-28 | 2011-06-14 | Teledyne Licensing, Llc | Large-angle agile laser beam steering apparatus and method |
US9008474B2 (en) * | 2009-11-11 | 2015-04-14 | Sumitomo Electric Industries, Ltd. | Optical module having focused optical coupling system for single fiber |
US9135937B1 (en) * | 2014-05-09 | 2015-09-15 | Western Digital (Fremont), Llc | Current modulation on laser diode for energy assisted magnetic recording transducer |
US11435575B2 (en) | 2018-11-13 | 2022-09-06 | Yonatan Gerlitz | Optical configuration for a low level laser therapy device |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1040792A (en) * | 1964-02-24 | 1966-09-01 | Nat Res Dev | Optical systems for lasers |
US3656175A (en) * | 1969-06-16 | 1972-04-11 | Ncr Co | Semiconductor diode laser recorder |
US3736046A (en) * | 1971-04-15 | 1973-05-29 | Honeywell Inc | Optical spot size changer |
JPS5011248A (fr) * | 1973-05-31 | 1975-02-05 | ||
US3866238A (en) * | 1973-06-01 | 1975-02-11 | North Electric Co | Laser diode for use with film memory system |
-
1975
- 1975-09-29 US US05/617,531 patent/US3974507A/en not_active Expired - Lifetime
-
1976
- 1976-09-22 GB GB39400/76A patent/GB1554201A/en not_active Expired
- 1976-09-24 CA CA261,995A patent/CA1067735A/fr not_active Expired
- 1976-09-25 DE DE19762643364 patent/DE2643364A1/de not_active Withdrawn
- 1976-09-28 FR FR7629153A patent/FR2325952A1/fr active Granted
- 1976-09-28 NL NL7610738A patent/NL7610738A/xx not_active Application Discontinuation
- 1976-09-29 JP JP51116108A patent/JPS5242741A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
CA1067735A (fr) | 1979-12-11 |
FR2325952B1 (fr) | 1979-01-12 |
JPS6244246B2 (fr) | 1987-09-18 |
JPS5242741A (en) | 1977-04-02 |
US3974507A (en) | 1976-08-10 |
NL7610738A (nl) | 1977-03-31 |
DE2643364A1 (de) | 1977-04-07 |
GB1554201A (en) | 1979-10-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |