FR2319242A1 - Procede et systeme de controle de l'usinage, par un faisceau de particules chargees d'un substrat piezo-electrique - Google Patents
Procede et systeme de controle de l'usinage, par un faisceau de particules chargees d'un substrat piezo-electriqueInfo
- Publication number
- FR2319242A1 FR2319242A1 FR7523337A FR7523337A FR2319242A1 FR 2319242 A1 FR2319242 A1 FR 2319242A1 FR 7523337 A FR7523337 A FR 7523337A FR 7523337 A FR7523337 A FR 7523337A FR 2319242 A1 FR2319242 A1 FR 2319242A1
- Authority
- FR
- France
- Prior art keywords
- substrate
- control
- machining
- resonant frequency
- charged particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title abstract 8
- 238000003754 machining Methods 0.000 title abstract 3
- 239000002245 particle Substances 0.000 title 1
- 238000000034 method Methods 0.000 abstract 2
- 238000001514 detection method Methods 0.000 abstract 1
- 238000010884 ion-beam technique Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7523337A FR2319242A1 (fr) | 1975-07-25 | 1975-07-25 | Procede et systeme de controle de l'usinage, par un faisceau de particules chargees d'un substrat piezo-electrique |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7523337A FR2319242A1 (fr) | 1975-07-25 | 1975-07-25 | Procede et systeme de controle de l'usinage, par un faisceau de particules chargees d'un substrat piezo-electrique |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2319242A1 true FR2319242A1 (fr) | 1977-02-18 |
FR2319242B1 FR2319242B1 (fr) | 1977-12-09 |
Family
ID=9158387
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7523337A Granted FR2319242A1 (fr) | 1975-07-25 | 1975-07-25 | Procede et systeme de controle de l'usinage, par un faisceau de particules chargees d'un substrat piezo-electrique |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2319242A1 (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2709368A1 (de) * | 1976-03-05 | 1977-09-08 | Thomson Csf | Verfahren zur kontrolle der bearbeitung eines piezoelektrischen plaettchens durch ionenbeschuss |
FR2554289A1 (fr) * | 1983-10-28 | 1985-05-03 | Cepe | Procede et dispositif d'usinage d'une lame de resonateur et lame ainsi obtenue |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB900206A (en) * | 1957-10-03 | 1962-07-04 | United Indsulator Company Ltd | Improvements in electromechanical transducers |
US3808752A (en) * | 1972-07-10 | 1974-05-07 | Comtec Economation | Method of automatically adjusting the frequency of crystal resonators |
FR2226257A1 (fr) * | 1973-04-19 | 1974-11-15 | Lasag Sa |
-
1975
- 1975-07-25 FR FR7523337A patent/FR2319242A1/fr active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB900206A (en) * | 1957-10-03 | 1962-07-04 | United Indsulator Company Ltd | Improvements in electromechanical transducers |
US3808752A (en) * | 1972-07-10 | 1974-05-07 | Comtec Economation | Method of automatically adjusting the frequency of crystal resonators |
FR2226257A1 (fr) * | 1973-04-19 | 1974-11-15 | Lasag Sa |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2709368A1 (de) * | 1976-03-05 | 1977-09-08 | Thomson Csf | Verfahren zur kontrolle der bearbeitung eines piezoelektrischen plaettchens durch ionenbeschuss |
FR2554289A1 (fr) * | 1983-10-28 | 1985-05-03 | Cepe | Procede et dispositif d'usinage d'une lame de resonateur et lame ainsi obtenue |
EP0143686A1 (fr) * | 1983-10-28 | 1985-06-05 | Compagnie D'electronique Et De Piezo-Electricite - C.E.P.E. | Procédé et dispositif d'usinage d'une lame de résonateur et lame ainsi obtenue |
Also Published As
Publication number | Publication date |
---|---|
FR2319242B1 (fr) | 1977-12-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |