FR2316721A1 - Procede et appareil de deflexion electrostatique de faisceaux ioniques a courant eleve intervenant dans un appareil de balayage - Google Patents

Procede et appareil de deflexion electrostatique de faisceaux ioniques a courant eleve intervenant dans un appareil de balayage

Info

Publication number
FR2316721A1
FR2316721A1 FR7615568A FR7615568A FR2316721A1 FR 2316721 A1 FR2316721 A1 FR 2316721A1 FR 7615568 A FR7615568 A FR 7615568A FR 7615568 A FR7615568 A FR 7615568A FR 2316721 A1 FR2316721 A1 FR 2316721A1
Authority
FR
France
Prior art keywords
high current
electrostatic deflection
beams acting
current ionic
scanning apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7615568A
Other languages
English (en)
French (fr)
Other versions
FR2316721B1 (enExample
Inventor
Dennis K Coultas
John H Keller
James R Winnard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2316721A1 publication Critical patent/FR2316721A1/fr
Application granted granted Critical
Publication of FR2316721B1 publication Critical patent/FR2316721B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/087—Deviation, concentration or focusing of the beam by electric or magnetic means by electrical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1477—Scanning means electrostatic

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Physical Vapour Deposition (AREA)
  • Particle Accelerators (AREA)
FR7615568A 1975-06-30 1976-05-17 Procede et appareil de deflexion electrostatique de faisceaux ioniques a courant eleve intervenant dans un appareil de balayage Granted FR2316721A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/592,013 US3997846A (en) 1975-06-30 1975-06-30 Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus

Publications (2)

Publication Number Publication Date
FR2316721A1 true FR2316721A1 (fr) 1977-01-28
FR2316721B1 FR2316721B1 (enExample) 1978-11-17

Family

ID=24368912

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7615568A Granted FR2316721A1 (fr) 1975-06-30 1976-05-17 Procede et appareil de deflexion electrostatique de faisceaux ioniques a courant eleve intervenant dans un appareil de balayage

Country Status (7)

Country Link
US (1) US3997846A (enExample)
JP (1) JPS524998A (enExample)
CA (1) CA1054726A (enExample)
DE (1) DE2623207C2 (enExample)
FR (1) FR2316721A1 (enExample)
GB (1) GB1491839A (enExample)
IT (1) IT1064202B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0002990A1 (fr) * 1977-12-23 1979-07-11 ANVAR Agence Nationale de Valorisation de la Recherche Implanteur d'ions à fort courant comprenant des plaques de déflexion électrostatique et des moyens de refocalisation magnétique
EP0185944A3 (en) * 1984-12-24 1987-10-07 American Cyanamid Company Fourier transform ion cyclothon resonance mass spectrometer with spatially separated sources and detector

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2389998B1 (enExample) * 1977-05-05 1981-11-20 Ibm
US4434371A (en) 1982-03-04 1984-02-28 Hughes Aircraft Company Electron beam blanking apparatus and method
US4556823A (en) * 1983-07-28 1985-12-03 International Business Machines Corporation Multi-function charged particle apparatus
JPS6345744A (ja) * 1986-08-11 1988-02-26 Fujitsu Ltd 荷電ビ−ムの偏向法
JP4716399B2 (ja) * 2004-05-21 2011-07-06 株式会社アルバック イオン注入装置の静電偏向器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA652815A (en) * 1962-11-27 Gabor Dennis Ion source
FR2058139A5 (enExample) * 1969-08-18 1971-05-21 Minnesota Mining & Mfg
DE2242987A1 (de) * 1972-09-01 1974-03-28 Strahlen Umweltforsch Gmbh Vorrichtung zur trennung von neutralen und schnellen geladenen teilchen von langsamen geladenen teilchen
FR2286501A1 (fr) * 1974-09-30 1976-04-23 Balzers Patent Beteilig Ag Installation de detection d'ions par spectrometrie de masse

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2237671A (en) * 1939-02-15 1941-04-08 Emi Ltd Electron discharge device
US2957141A (en) * 1958-03-19 1960-10-18 Gen Electric Interval stretcher
US3040205A (en) * 1960-05-31 1962-06-19 Harold R Walker Electrostatic vidicon
US3313969A (en) * 1966-03-25 1967-04-11 Boeing Co Charged particle deflecting apparatus having hemispherical electrodes
US3535880A (en) * 1966-06-14 1970-10-27 Hughes Aircraft Co Ion beam deflection system
NL157452B (nl) * 1968-11-09 1978-07-17 Philips Nv Inrichting met een kathodestraalbuis.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA652815A (en) * 1962-11-27 Gabor Dennis Ion source
FR2058139A5 (enExample) * 1969-08-18 1971-05-21 Minnesota Mining & Mfg
DE2242987A1 (de) * 1972-09-01 1974-03-28 Strahlen Umweltforsch Gmbh Vorrichtung zur trennung von neutralen und schnellen geladenen teilchen von langsamen geladenen teilchen
FR2286501A1 (fr) * 1974-09-30 1976-04-23 Balzers Patent Beteilig Ag Installation de detection d'ions par spectrometrie de masse

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0002990A1 (fr) * 1977-12-23 1979-07-11 ANVAR Agence Nationale de Valorisation de la Recherche Implanteur d'ions à fort courant comprenant des plaques de déflexion électrostatique et des moyens de refocalisation magnétique
FR2412939A1 (fr) * 1977-12-23 1979-07-20 Anvar Implanteur d'ions a fort courant
EP0185944A3 (en) * 1984-12-24 1987-10-07 American Cyanamid Company Fourier transform ion cyclothon resonance mass spectrometer with spatially separated sources and detector

Also Published As

Publication number Publication date
GB1491839A (en) 1977-11-16
DE2623207A1 (de) 1977-01-27
JPS5332039B2 (enExample) 1978-09-06
CA1054726A (en) 1979-05-15
JPS524998A (en) 1977-01-14
DE2623207C2 (de) 1983-05-05
US3997846A (en) 1976-12-14
FR2316721B1 (enExample) 1978-11-17
IT1064202B (it) 1985-02-18

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Legal Events

Date Code Title Description
ST Notification of lapse