FR2295567A1 - Procedes et dispositifs pour traiter des objets, tels que par exemple des pastilles faites avec une matiere semi-conductrice - Google Patents
Procedes et dispositifs pour traiter des objets, tels que par exemple des pastilles faites avec une matiere semi-conductriceInfo
- Publication number
- FR2295567A1 FR2295567A1 FR7538309A FR7538309A FR2295567A1 FR 2295567 A1 FR2295567 A1 FR 2295567A1 FR 7538309 A FR7538309 A FR 7538309A FR 7538309 A FR7538309 A FR 7538309A FR 2295567 A1 FR2295567 A1 FR 2295567A1
- Authority
- FR
- France
- Prior art keywords
- methods
- devices
- semiconductor material
- processing objects
- pellets made
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S134/00—Cleaning and liquid contact with solids
- Y10S134/902—Semiconductor wafer
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Weting (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Non-Mechanical Conveyors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/534,918 US3977926A (en) | 1974-12-20 | 1974-12-20 | Methods for treating articles |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2295567A1 true FR2295567A1 (fr) | 1976-07-16 |
FR2295567B1 FR2295567B1 (fr) | 1979-04-27 |
Family
ID=24132067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7538309A Granted FR2295567A1 (fr) | 1974-12-20 | 1975-12-15 | Procedes et dispositifs pour traiter des objets, tels que par exemple des pastilles faites avec une matiere semi-conductrice |
Country Status (6)
Country | Link |
---|---|
US (2) | US3977926A (fr) |
JP (1) | JPS5186367A (fr) |
CA (1) | CA1038503A (fr) |
DE (1) | DE2557367A1 (fr) |
FR (1) | FR2295567A1 (fr) |
GB (1) | GB1486709A (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2597368A1 (fr) * | 1986-04-17 | 1987-10-23 | Guilbaud Jean Pierre | Dispositif pour le traitement de produits divers par immersion dans des liquides puis essorage. |
EP0497104A1 (fr) * | 1991-02-01 | 1992-08-05 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH | Magasin pour contenir des pièces en forme de disques, en particulier des disques semi-conducteurs, dans un traitement de surface chimique en bains liquides |
FR2698639A1 (fr) * | 1992-12-01 | 1994-06-03 | Sgs Thomson Microelectronics | Machine de gravure chimique de silicium. |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4251317A (en) * | 1979-04-30 | 1981-02-17 | Fairchild Camera And Instrument Corporation | Method of preventing etch masking during wafer etching |
US4300581A (en) * | 1980-03-06 | 1981-11-17 | Thompson Raymon F | Centrifugal wafer processor |
CA1158109A (fr) * | 1981-01-14 | 1983-12-06 | George M. Jenkins | Methode et dispositif d'enduction de puces a semiconducteurs |
US4458704A (en) * | 1982-10-29 | 1984-07-10 | Xertronix, Inc. | Apparatus for processing semiconductor wafers |
FR2544879B1 (fr) * | 1983-04-21 | 1987-06-12 | Prat Jacques | Dispositif pour le nettoyage et la sterilisation thermique de lentilles de contact souples hydrophiles |
US4738272A (en) * | 1984-05-21 | 1988-04-19 | Mcconnell Christopher F | Vessel and system for treating wafers with fluids |
US4577650A (en) * | 1984-05-21 | 1986-03-25 | Mcconnell Christopher F | Vessel and system for treating wafers with fluids |
US4633893A (en) * | 1984-05-21 | 1987-01-06 | Cfm Technologies Limited Partnership | Apparatus for treating semiconductor wafers |
US4740249A (en) * | 1984-05-21 | 1988-04-26 | Christopher F. McConnell | Method of treating wafers with fluid |
US4856544A (en) * | 1984-05-21 | 1989-08-15 | Cfm Technologies, Inc. | Vessel and system for treating wafers with fluids |
US4984597B1 (en) * | 1984-05-21 | 1999-10-26 | Cfmt Inc | Apparatus for rinsing and drying surfaces |
US4778532A (en) * | 1985-06-24 | 1988-10-18 | Cfm Technologies Limited Partnership | Process and apparatus for treating wafers with process fluids |
US4911761A (en) * | 1984-05-21 | 1990-03-27 | Cfm Technologies Research Associates | Process and apparatus for drying surfaces |
US4675067A (en) * | 1984-06-13 | 1987-06-23 | The United States Of America As Represented By The Secretary Of The Air Force | Solar cell coverslide extraction apparatus |
US5090432A (en) * | 1990-10-16 | 1992-02-25 | Verteq, Inc. | Single wafer megasonic semiconductor wafer processing system |
JPH07122132B2 (ja) * | 1990-11-01 | 1995-12-25 | 松下電器産業株式会社 | 薄膜形成方法および薄膜形成装置 |
US5103847A (en) * | 1990-11-13 | 1992-04-14 | Westinghouse Electric Corp. | Device for supporting tube bundles for cleaning |
JPH04299828A (ja) * | 1991-03-28 | 1992-10-23 | Shin Etsu Handotai Co Ltd | 半導体基板処理装置 |
ATE258084T1 (de) * | 1991-10-04 | 2004-02-15 | Cfmt Inc | Superreinigung von komplizierten mikroteilchen |
US5224503A (en) * | 1992-06-15 | 1993-07-06 | Semitool, Inc. | Centrifugal wafer carrier cleaning apparatus |
US5863348A (en) * | 1993-12-22 | 1999-01-26 | International Business Machines Corporation | Programmable method for cleaning semiconductor elements |
US6712577B2 (en) * | 1994-04-28 | 2004-03-30 | Semitool, Inc. | Automated semiconductor processing system |
US6833035B1 (en) * | 1994-04-28 | 2004-12-21 | Semitool, Inc. | Semiconductor processing system with wafer container docking and loading station |
US5593505A (en) * | 1995-04-19 | 1997-01-14 | Memc Electronic Materials, Inc. | Method for cleaning semiconductor wafers with sonic energy and passing through a gas-liquid-interface |
US5968849A (en) * | 1995-06-26 | 1999-10-19 | Motorola, Inc. | Method for pre-shaping a semiconductor substrate for polishing and structure |
JP3050524B2 (ja) * | 1996-05-09 | 2000-06-12 | スピードファムクリーンシステム株式会社 | ワーク搬送用キャリヤ装置 |
US6039059A (en) | 1996-09-30 | 2000-03-21 | Verteq, Inc. | Wafer cleaning system |
US5865894A (en) * | 1997-06-11 | 1999-02-02 | Reynolds Tech Fabricators, Inc. | Megasonic plating system |
US5843322A (en) * | 1996-12-23 | 1998-12-01 | Memc Electronic Materials, Inc. | Process for etching N, P, N+ and P+ type slugs and wafers |
WO1998035765A1 (fr) * | 1997-02-18 | 1998-08-20 | Scp Global Technologies | Enceinte de traitement humide a etapes multiples |
US6125863A (en) * | 1998-06-30 | 2000-10-03 | Semitool, Inc. | Offset rotor flat media processor |
US6062239A (en) * | 1998-06-30 | 2000-05-16 | Semitool, Inc. | Cross flow centrifugal processor |
US6432214B2 (en) | 1998-07-10 | 2002-08-13 | Semitool, Inc. | Cleaning apparatus |
US6328809B1 (en) | 1998-10-09 | 2001-12-11 | Scp Global Technologies, Inc. | Vapor drying system and method |
JP3316748B2 (ja) * | 1998-10-20 | 2002-08-19 | 株式会社村田製作所 | 無電解めっき用ホルダおよび無電解めっき方法 |
US6918864B1 (en) * | 1999-06-01 | 2005-07-19 | Applied Materials, Inc. | Roller that avoids substrate slippage |
US20070095366A1 (en) * | 2005-11-02 | 2007-05-03 | Applied Materials, Inc. | Stripping and cleaning of organic-containing materials from electronic device substrate surfaces |
CN103241537B (zh) * | 2013-04-24 | 2015-08-05 | 北京优纳科技有限公司 | 切片装载装置 |
CN105083143A (zh) | 2014-09-18 | 2015-11-25 | 宁波万汇窗篷用品有限公司 | 遮阳篷装置 |
CN106702496B (zh) * | 2015-07-20 | 2019-01-25 | 有研半导体材料有限公司 | 一种酸腐蚀去除硅晶圆表面损伤的装置及方法 |
US10428549B2 (en) | 2016-04-01 | 2019-10-01 | ZHUN-AN Ma | Awning apparatus |
EP3495582A1 (fr) | 2017-12-08 | 2019-06-12 | Activa Awning Inc. | Appareil d'auvent |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3428059A (en) * | 1967-04-03 | 1969-02-18 | Geoscience Instr Corp | Rotary basket processing apparatus |
DE1915714C3 (de) * | 1969-03-27 | 1975-07-10 | Robert Bosch Gmbh, 7000 Stuttgart | Vorrichtung zum Xtzen von Halbleiterscheiben mit einem mit Ätzflüssigkeit gefüllten Gefäß und einem in die Ätzflüssigkeit eingetauchten, mit waagrechter Achse rotierenden Ätzkorb |
US3841689A (en) * | 1973-06-29 | 1974-10-15 | Bell Telephone Labor Inc | Semiconductor wafer transfer fixture |
-
1974
- 1974-12-20 US US05/534,918 patent/US3977926A/en not_active Expired - Lifetime
-
1975
- 1975-07-11 CA CA231,308A patent/CA1038503A/fr not_active Expired
- 1975-12-15 FR FR7538309A patent/FR2295567A1/fr active Granted
- 1975-12-17 GB GB51595/75A patent/GB1486709A/en not_active Expired
- 1975-12-19 JP JP50150769A patent/JPS5186367A/ja active Pending
- 1975-12-19 DE DE19752557367 patent/DE2557367A1/de not_active Withdrawn
-
1976
- 1976-04-23 US US05/679,581 patent/US4077416A/en not_active Expired - Lifetime
Non-Patent Citations (1)
Title |
---|
NEANT * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2597368A1 (fr) * | 1986-04-17 | 1987-10-23 | Guilbaud Jean Pierre | Dispositif pour le traitement de produits divers par immersion dans des liquides puis essorage. |
EP0497104A1 (fr) * | 1991-02-01 | 1992-08-05 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH | Magasin pour contenir des pièces en forme de disques, en particulier des disques semi-conducteurs, dans un traitement de surface chimique en bains liquides |
FR2698639A1 (fr) * | 1992-12-01 | 1994-06-03 | Sgs Thomson Microelectronics | Machine de gravure chimique de silicium. |
Also Published As
Publication number | Publication date |
---|---|
DE2557367A1 (de) | 1976-06-24 |
FR2295567B1 (fr) | 1979-04-27 |
JPS5186367A (en) | 1976-07-28 |
US3977926A (en) | 1976-08-31 |
US4077416A (en) | 1978-03-07 |
GB1486709A (en) | 1977-09-21 |
CA1038503A (fr) | 1978-09-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |