FR2280095A1 - Dispositif d'obtention d'un signal lumineux, a partir du faisceau lumineux d'un dispositif de positionnement et d'exposition - Google Patents

Dispositif d'obtention d'un signal lumineux, a partir du faisceau lumineux d'un dispositif de positionnement et d'exposition

Info

Publication number
FR2280095A1
FR2280095A1 FR7522885A FR7522885A FR2280095A1 FR 2280095 A1 FR2280095 A1 FR 2280095A1 FR 7522885 A FR7522885 A FR 7522885A FR 7522885 A FR7522885 A FR 7522885A FR 2280095 A1 FR2280095 A1 FR 2280095A1
Authority
FR
France
Prior art keywords
positioning
obtaining
light beam
light
light signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7522885A
Other languages
English (en)
French (fr)
Other versions
FR2280095B3 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektromat VEB
Original Assignee
Elektromat VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat VEB filed Critical Elektromat VEB
Publication of FR2280095A1 publication Critical patent/FR2280095A1/fr
Application granted granted Critical
Publication of FR2280095B3 publication Critical patent/FR2280095B3/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
FR7522885A 1974-07-23 1975-07-22 Dispositif d'obtention d'un signal lumineux, a partir du faisceau lumineux d'un dispositif de positionnement et d'exposition Granted FR2280095A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18006174A DD114726A1 (enrdf_load_stackoverflow) 1974-07-23 1974-07-23

Publications (2)

Publication Number Publication Date
FR2280095A1 true FR2280095A1 (fr) 1976-02-20
FR2280095B3 FR2280095B3 (enrdf_load_stackoverflow) 1979-04-27

Family

ID=5496668

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7522885A Granted FR2280095A1 (fr) 1974-07-23 1975-07-22 Dispositif d'obtention d'un signal lumineux, a partir du faisceau lumineux d'un dispositif de positionnement et d'exposition

Country Status (5)

Country Link
CS (1) CS184959B1 (enrdf_load_stackoverflow)
DD (1) DD114726A1 (enrdf_load_stackoverflow)
DE (1) DE2527938A1 (enrdf_load_stackoverflow)
FR (1) FR2280095A1 (enrdf_load_stackoverflow)
GB (1) GB1513433A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928337A (ja) * 1982-08-09 1984-02-15 Hitachi Ltd プロジエクシヨンアライナ

Also Published As

Publication number Publication date
DE2527938A1 (de) 1976-02-12
GB1513433A (en) 1978-06-07
CS184959B1 (en) 1978-09-15
DD114726A1 (enrdf_load_stackoverflow) 1975-08-12
FR2280095B3 (enrdf_load_stackoverflow) 1979-04-27

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Legal Events

Date Code Title Description
ST Notification of lapse