GB1513433A - Photoprinting apparatus including a light sensing arrangement - Google Patents

Photoprinting apparatus including a light sensing arrangement

Info

Publication number
GB1513433A
GB1513433A GB3052675A GB3052675A GB1513433A GB 1513433 A GB1513433 A GB 1513433A GB 3052675 A GB3052675 A GB 3052675A GB 3052675 A GB3052675 A GB 3052675A GB 1513433 A GB1513433 A GB 1513433A
Authority
GB
United Kingdom
Prior art keywords
light
photo
slice
intensity
july
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3052675A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektromat VEB
Original Assignee
Elektromat VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat VEB filed Critical Elektromat VEB
Publication of GB1513433A publication Critical patent/GB1513433A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
GB3052675A 1974-07-23 1975-07-22 Photoprinting apparatus including a light sensing arrangement Expired GB1513433A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18006174A DD114726A1 (enrdf_load_stackoverflow) 1974-07-23 1974-07-23

Publications (1)

Publication Number Publication Date
GB1513433A true GB1513433A (en) 1978-06-07

Family

ID=5496668

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3052675A Expired GB1513433A (en) 1974-07-23 1975-07-22 Photoprinting apparatus including a light sensing arrangement

Country Status (5)

Country Link
CS (1) CS184959B1 (enrdf_load_stackoverflow)
DD (1) DD114726A1 (enrdf_load_stackoverflow)
DE (1) DE2527938A1 (enrdf_load_stackoverflow)
FR (1) FR2280095A1 (enrdf_load_stackoverflow)
GB (1) GB1513433A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2126740A (en) * 1982-08-09 1984-03-28 Hitachi Ltd Projection imaging

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2126740A (en) * 1982-08-09 1984-03-28 Hitachi Ltd Projection imaging
FR2536547A1 (fr) * 1982-08-09 1984-05-25 Hitachi Ltd Dispositif d'alignement pour projection, notamment pour la fabrication de dispositifs a semi-conducteurs
US4598197A (en) * 1982-08-09 1986-07-01 Hitachi, Ltd. Projection aligner
US4701608A (en) * 1982-08-09 1987-10-20 Hitachi, Ltd. Projection aligner with a sensor for monitoring light quantity

Also Published As

Publication number Publication date
DE2527938A1 (de) 1976-02-12
FR2280095A1 (fr) 1976-02-20
CS184959B1 (en) 1978-09-15
DD114726A1 (enrdf_load_stackoverflow) 1975-08-12
FR2280095B3 (enrdf_load_stackoverflow) 1979-04-27

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee