CS184959B1 - Device for receiving the light signal from the current of exposure beams of the adjusting and exposure device - Google Patents

Device for receiving the light signal from the current of exposure beams of the adjusting and exposure device

Info

Publication number
CS184959B1
CS184959B1 CS513675A CS513675A CS184959B1 CS 184959 B1 CS184959 B1 CS 184959B1 CS 513675 A CS513675 A CS 513675A CS 513675 A CS513675 A CS 513675A CS 184959 B1 CS184959 B1 CS 184959B1
Authority
CS
Czechoslovakia
Prior art keywords
exposure
adjusting
receiving
current
light signal
Prior art date
Application number
CS513675A
Other languages
Czech (cs)
Inventor
Dieter Eckold
Heinz Buehn
Manfred Heinig
Original Assignee
Dieter Eckold
Heinz Buehn
Manfred Heinig
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dieter Eckold, Heinz Buehn, Manfred Heinig filed Critical Dieter Eckold
Publication of CS184959B1 publication Critical patent/CS184959B1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CS513675A 1974-07-23 1975-07-21 Device for receiving the light signal from the current of exposure beams of the adjusting and exposure device CS184959B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18006174A DD114726A1 (en) 1974-07-23 1974-07-23

Publications (1)

Publication Number Publication Date
CS184959B1 true CS184959B1 (en) 1978-09-15

Family

ID=5496668

Family Applications (1)

Application Number Title Priority Date Filing Date
CS513675A CS184959B1 (en) 1974-07-23 1975-07-21 Device for receiving the light signal from the current of exposure beams of the adjusting and exposure device

Country Status (5)

Country Link
CS (1) CS184959B1 (en)
DD (1) DD114726A1 (en)
DE (1) DE2527938A1 (en)
FR (1) FR2280095A1 (en)
GB (1) GB1513433A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928337A (en) * 1982-08-09 1984-02-15 Hitachi Ltd Projection aligner

Also Published As

Publication number Publication date
GB1513433A (en) 1978-06-07
DD114726A1 (en) 1975-08-12
FR2280095B3 (en) 1979-04-27
DE2527938A1 (en) 1976-02-12
FR2280095A1 (en) 1976-02-20

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