FR2273408A1 - Impedance matching for RF cathodic diode atomiser - by adjusting press. of gas admitted to chamber - Google Patents
Impedance matching for RF cathodic diode atomiser - by adjusting press. of gas admitted to chamberInfo
- Publication number
- FR2273408A1 FR2273408A1 FR7418589A FR7418589A FR2273408A1 FR 2273408 A1 FR2273408 A1 FR 2273408A1 FR 7418589 A FR7418589 A FR 7418589A FR 7418589 A FR7418589 A FR 7418589A FR 2273408 A1 FR2273408 A1 FR 2273408A1
- Authority
- FR
- France
- Prior art keywords
- atomiser
- cathodic
- diode
- chamber
- impedance matching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7418589A FR2273408A1 (en) | 1974-05-29 | 1974-05-29 | Impedance matching for RF cathodic diode atomiser - by adjusting press. of gas admitted to chamber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7418589A FR2273408A1 (en) | 1974-05-29 | 1974-05-29 | Impedance matching for RF cathodic diode atomiser - by adjusting press. of gas admitted to chamber |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2273408A1 true FR2273408A1 (en) | 1975-12-26 |
FR2273408B1 FR2273408B1 (de) | 1976-12-24 |
Family
ID=9139394
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7418589A Granted FR2273408A1 (en) | 1974-05-29 | 1974-05-29 | Impedance matching for RF cathodic diode atomiser - by adjusting press. of gas admitted to chamber |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2273408A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2425480A1 (fr) * | 1978-05-13 | 1979-12-07 | Leybold Heraeus Gmbh & Co Kg | Procede et dispositif de regulation de la decharge dans un equipement de pulverisation cathodique |
-
1974
- 1974-05-29 FR FR7418589A patent/FR2273408A1/fr active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2425480A1 (fr) * | 1978-05-13 | 1979-12-07 | Leybold Heraeus Gmbh & Co Kg | Procede et dispositif de regulation de la decharge dans un equipement de pulverisation cathodique |
Also Published As
Publication number | Publication date |
---|---|
FR2273408B1 (de) | 1976-12-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |