FR2270616B1 - - Google Patents

Info

Publication number
FR2270616B1
FR2270616B1 FR7416288A FR7416288A FR2270616B1 FR 2270616 B1 FR2270616 B1 FR 2270616B1 FR 7416288 A FR7416288 A FR 7416288A FR 7416288 A FR7416288 A FR 7416288A FR 2270616 B1 FR2270616 B1 FR 2270616B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7416288A
Other languages
French (fr)
Other versions
FR2270616A1 (de
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7416288A priority Critical patent/FR2270616B1/fr
Priority to BE155727A priority patent/BE828336A/xx
Priority to GB1867575A priority patent/GB1489005A/en
Priority to JP50055365A priority patent/JPS50159677A/ja
Priority to NL7505454A priority patent/NL7505454A/xx
Priority to IT6818675A priority patent/IT1032842B/it
Priority to DE19752520809 priority patent/DE2520809A1/de
Publication of FR2270616A1 publication Critical patent/FR2270616A1/fr
Priority to US05/803,883 priority patent/US4110762A/en
Application granted granted Critical
Publication of FR2270616B1 publication Critical patent/FR2270616B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
FR7416288A 1974-05-10 1974-05-10 Expired FR2270616B1 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR7416288A FR2270616B1 (de) 1974-05-10 1974-05-10
BE155727A BE828336A (fr) 1974-05-10 1975-04-24 Machines a dessiner notamment pour masques de circuits integres
GB1867575A GB1489005A (en) 1974-05-10 1975-05-05 Drawing machines
JP50055365A JPS50159677A (de) 1974-05-10 1975-05-08
NL7505454A NL7505454A (nl) 1974-05-10 1975-05-09 Toestel voor het aanbrengen van patronen op een fotogevoelige laag.
IT6818675A IT1032842B (it) 1974-05-10 1975-05-09 Macchina da disegno particolarmente per maschere per circuiti integrati
DE19752520809 DE2520809A1 (de) 1974-05-10 1975-05-09 Zeichengeraet
US05/803,883 US4110762A (en) 1974-05-10 1977-06-06 Drawing machines especially for integrated circuit masks

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7416288A FR2270616B1 (de) 1974-05-10 1974-05-10

Publications (2)

Publication Number Publication Date
FR2270616A1 FR2270616A1 (de) 1975-12-05
FR2270616B1 true FR2270616B1 (de) 1978-06-02

Family

ID=9138697

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7416288A Expired FR2270616B1 (de) 1974-05-10 1974-05-10

Country Status (7)

Country Link
JP (1) JPS50159677A (de)
BE (1) BE828336A (de)
DE (1) DE2520809A1 (de)
FR (1) FR2270616B1 (de)
GB (1) GB1489005A (de)
IT (1) IT1032842B (de)
NL (1) NL7505454A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58108745A (ja) * 1981-12-23 1983-06-28 Canon Inc 転写装置
JPS60173550A (ja) * 1984-02-20 1985-09-06 Canon Inc 半導体焼付装置
DE4133037C2 (de) * 1990-10-05 1999-07-22 Canon Kk Belichtungsvorrichtung
JPH07105337B2 (ja) * 1994-04-22 1995-11-13 株式会社日立製作所 パターン刻印装置

Also Published As

Publication number Publication date
BE828336A (fr) 1975-08-18
JPS50159677A (de) 1975-12-24
FR2270616A1 (de) 1975-12-05
NL7505454A (nl) 1975-11-12
GB1489005A (en) 1977-10-19
DE2520809A1 (de) 1975-11-20
IT1032842B (it) 1979-06-20

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Legal Events

Date Code Title Description
ST Notification of lapse