JPS50159677A - - Google Patents
Info
- Publication number
- JPS50159677A JPS50159677A JP50055365A JP5536575A JPS50159677A JP S50159677 A JPS50159677 A JP S50159677A JP 50055365 A JP50055365 A JP 50055365A JP 5536575 A JP5536575 A JP 5536575A JP S50159677 A JPS50159677 A JP S50159677A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7416288A FR2270616B1 (ja) | 1974-05-10 | 1974-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50159677A true JPS50159677A (ja) | 1975-12-24 |
Family
ID=9138697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50055365A Pending JPS50159677A (ja) | 1974-05-10 | 1975-05-08 |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS50159677A (ja) |
| BE (1) | BE828336A (ja) |
| DE (1) | DE2520809A1 (ja) |
| FR (1) | FR2270616B1 (ja) |
| GB (1) | GB1489005A (ja) |
| IT (1) | IT1032842B (ja) |
| NL (1) | NL7505454A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60173550A (ja) * | 1984-02-20 | 1985-09-06 | Canon Inc | 半導体焼付装置 |
| JPH06302488A (ja) * | 1994-04-22 | 1994-10-28 | Hitachi Ltd | パターン形成装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58108745A (ja) * | 1981-12-23 | 1983-06-28 | Canon Inc | 転写装置 |
| DE4133037C2 (de) * | 1990-10-05 | 1999-07-22 | Canon Kk | Belichtungsvorrichtung |
-
1974
- 1974-05-10 FR FR7416288A patent/FR2270616B1/fr not_active Expired
-
1975
- 1975-04-24 BE BE155727A patent/BE828336A/xx not_active IP Right Cessation
- 1975-05-05 GB GB1867575A patent/GB1489005A/en not_active Expired
- 1975-05-08 JP JP50055365A patent/JPS50159677A/ja active Pending
- 1975-05-09 DE DE19752520809 patent/DE2520809A1/de not_active Withdrawn
- 1975-05-09 IT IT6818675A patent/IT1032842B/it active
- 1975-05-09 NL NL7505454A patent/NL7505454A/xx not_active Application Discontinuation
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60173550A (ja) * | 1984-02-20 | 1985-09-06 | Canon Inc | 半導体焼付装置 |
| JPH0544816B2 (ja) * | 1984-02-20 | 1993-07-07 | Canon Kk | |
| JPH06302488A (ja) * | 1994-04-22 | 1994-10-28 | Hitachi Ltd | パターン形成装置 |
| JPH07105337B2 (ja) * | 1994-04-22 | 1995-11-13 | 株式会社日立製作所 | パターン刻印装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2270616B1 (ja) | 1978-06-02 |
| DE2520809A1 (de) | 1975-11-20 |
| GB1489005A (en) | 1977-10-19 |
| NL7505454A (nl) | 1975-11-12 |
| FR2270616A1 (ja) | 1975-12-05 |
| BE828336A (fr) | 1975-08-18 |
| IT1032842B (it) | 1979-06-20 |