GB1489005A - Drawing machines - Google Patents

Drawing machines

Info

Publication number
GB1489005A
GB1489005A GB1867575A GB1867575A GB1489005A GB 1489005 A GB1489005 A GB 1489005A GB 1867575 A GB1867575 A GB 1867575A GB 1867575 A GB1867575 A GB 1867575A GB 1489005 A GB1489005 A GB 1489005A
Authority
GB
United Kingdom
Prior art keywords
drawing machines
machines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1867575A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETUDE ET LA FAB DE CIRCUITS IN
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
ETUDE ET LA FAB DE CIRCUITS IN
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ETUDE ET LA FAB DE CIRCUITS IN, Commissariat a lEnergie Atomique CEA filed Critical ETUDE ET LA FAB DE CIRCUITS IN
Publication of GB1489005A publication Critical patent/GB1489005A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
GB1867575A 1974-05-10 1975-05-05 Drawing machines Expired GB1489005A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7416288A FR2270616B1 (en) 1974-05-10 1974-05-10

Publications (1)

Publication Number Publication Date
GB1489005A true GB1489005A (en) 1977-10-19

Family

ID=9138697

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1867575A Expired GB1489005A (en) 1974-05-10 1975-05-05 Drawing machines

Country Status (7)

Country Link
JP (1) JPS50159677A (en)
BE (1) BE828336A (en)
DE (1) DE2520809A1 (en)
FR (1) FR2270616B1 (en)
GB (1) GB1489005A (en)
IT (1) IT1032842B (en)
NL (1) NL7505454A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2124397A (en) * 1981-12-23 1984-02-15 Canon Kk Optical projection
DE4133037A1 (en) * 1990-10-05 1992-04-09 Canon Kk EXPOSURE DEVICE

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60173550A (en) * 1984-02-20 1985-09-06 Canon Inc Semiconductor printing device
JPH07105337B2 (en) * 1994-04-22 1995-11-13 株式会社日立製作所 Pattern engraving device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2124397A (en) * 1981-12-23 1984-02-15 Canon Kk Optical projection
DE4133037A1 (en) * 1990-10-05 1992-04-09 Canon Kk EXPOSURE DEVICE
GB2249189A (en) * 1990-10-05 1992-04-29 Canon Kk Exposure apparatus
US5187519A (en) * 1990-10-05 1993-02-16 Canon Kabushiki Kaisha Exposure apparatus having mount means to suppress vibrations
GB2249189B (en) * 1990-10-05 1994-07-27 Canon Kk Exposure apparatus
DE4133037C2 (en) * 1990-10-05 1999-07-22 Canon Kk Exposure device

Also Published As

Publication number Publication date
IT1032842B (en) 1979-06-20
FR2270616A1 (en) 1975-12-05
NL7505454A (en) 1975-11-12
DE2520809A1 (en) 1975-11-20
JPS50159677A (en) 1975-12-24
BE828336A (en) 1975-08-18
FR2270616B1 (en) 1978-06-02

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee