FR2248764A7 - - Google Patents

Info

Publication number
FR2248764A7
FR2248764A7 FR7431878A FR7431878A FR2248764A7 FR 2248764 A7 FR2248764 A7 FR 2248764A7 FR 7431878 A FR7431878 A FR 7431878A FR 7431878 A FR7431878 A FR 7431878A FR 2248764 A7 FR2248764 A7 FR 2248764A7
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7431878A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Schott Quarzschmelze GmbH
Original Assignee
Heraeus Schott Quarzschmelze GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Schott Quarzschmelze GmbH filed Critical Heraeus Schott Quarzschmelze GmbH
Application granted granted Critical
Publication of FR2248764A7 publication Critical patent/FR2248764A7/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/12—Substrate holders or susceptors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR7431878A 1973-10-19 1974-09-20 Expired FR2248764A7 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE7337643 1973-10-19

Publications (1)

Publication Number Publication Date
FR2248764A7 true FR2248764A7 (enrdf_load_stackoverflow) 1975-05-16

Family

ID=6641009

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7431878A Expired FR2248764A7 (enrdf_load_stackoverflow) 1973-10-19 1974-09-20

Country Status (4)

Country Link
JP (1) JPS5068775A (enrdf_load_stackoverflow)
CH (1) CH570700A5 (enrdf_load_stackoverflow)
FR (1) FR2248764A7 (enrdf_load_stackoverflow)
GB (1) GB1436503A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4256053A (en) * 1979-08-17 1981-03-17 Dozier Alfred R Chemical vapor reaction system
US4287851A (en) * 1980-01-16 1981-09-08 Dozier Alfred R Mounting and excitation system for reaction in the plasma state
EP0100539A3 (en) * 1982-07-30 1985-05-22 Tecnisco Ltd. Assembled device for supporting semiconductor wafers or the like
US4653636A (en) * 1985-05-14 1987-03-31 Microglass, Inc. Wafer carrier and method

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4256229A (en) * 1979-09-17 1981-03-17 Rockwell International Corporation Boat for wafer processing
DE8021868U1 (de) * 1980-08-16 1981-01-29 Heraeus Quarzschmelze Gmbh, 6450 Hanau Traegerhorde fuer halbleiterscheiben
US4355974A (en) * 1980-11-24 1982-10-26 Asq Boats, Inc. Wafer boat
EP0077408A1 (en) * 1981-10-16 1983-04-27 Helmut Seier GmbH A method and apparatus for the heat treatment of semiconductor articles
US4515104A (en) * 1983-05-13 1985-05-07 Asq Boats, Inc. Contiguous wafer boat
USRE33341E (en) * 1983-05-23 1990-09-18 ASQ Technology, Inc. Wafer transfer apparatus
DE3612375A1 (de) * 1986-04-12 1987-10-15 Heraeus Schott Quarzschmelze Beladevorrichtung zur aufnahme von in einem ofen zu behandelnde substratscheiben
DE3829159A1 (de) * 1988-08-27 1990-03-08 Westdeutsche Quarzschmelze Gmb Vorrichtung zur aufnahme von halbleiterscheibchen
FR2846785B1 (fr) * 2002-11-04 2005-02-04 Soitec Silicon On Insulator Nacelle de manutention de tranches de materiau semiconducteur
RU2485623C1 (ru) * 2012-03-06 2013-06-20 Ольга Борисовна Пименова Кассета для групповой транспортировки полупроводниковых пластин
RU2485622C1 (ru) * 2012-03-06 2013-06-20 Ольга Борисовна Пименова Кассета для групповой транспортировки полупроводниковых пластин
RU2555209C1 (ru) * 2013-12-30 2015-07-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Самарский государственный аэрокосмический университет имени академика С.П. Королева (национальный исследовательский университет)" (СГАУ) Кассета для сплавления элементов силовых полупроводниковых диодов
CN111892419A (zh) * 2020-08-03 2020-11-06 福赛特(唐山)新材料有限公司 一种高抗震性碳化硅舟及其制备方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4256053A (en) * 1979-08-17 1981-03-17 Dozier Alfred R Chemical vapor reaction system
US4287851A (en) * 1980-01-16 1981-09-08 Dozier Alfred R Mounting and excitation system for reaction in the plasma state
EP0100539A3 (en) * 1982-07-30 1985-05-22 Tecnisco Ltd. Assembled device for supporting semiconductor wafers or the like
US4653636A (en) * 1985-05-14 1987-03-31 Microglass, Inc. Wafer carrier and method

Also Published As

Publication number Publication date
JPS5068775A (enrdf_load_stackoverflow) 1975-06-09
GB1436503A (en) 1976-05-19
CH570700A5 (enrdf_load_stackoverflow) 1975-12-15

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