GB1436503A - Carrier rack made of transparent fused silica - Google Patents

Carrier rack made of transparent fused silica

Info

Publication number
GB1436503A
GB1436503A GB4398774A GB4398774A GB1436503A GB 1436503 A GB1436503 A GB 1436503A GB 4398774 A GB4398774 A GB 4398774A GB 4398774 A GB4398774 A GB 4398774A GB 1436503 A GB1436503 A GB 1436503A
Authority
GB
United Kingdom
Prior art keywords
rods
fused silica
carrier rack
transparent fused
oct
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4398774A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzschmelze GmbH
Original Assignee
Heraeus Quarzschmelze GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Quarzschmelze GmbH filed Critical Heraeus Quarzschmelze GmbH
Publication of GB1436503A publication Critical patent/GB1436503A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/12—Substrate holders or susceptors

Abstract

1436503 Carrier rack for semi-conductor processirig HERAEUS QUARZSCHMELZE GmbH 10 Oct 1974 [19 Oct 1973] 43987/74 Heading H1K A transparent fused silica rack for supporting a plurality of semi-conductor wafers 3 during processing such as diffusion or epitaxial growth comprises at least three, and preferably four, rods 1 having wafer support slots 2. The rods 1 may be held at their ends by trapezoidal tube sections 4 either fused directly to the rods 1 or fused at 8 to a member 7 located in slots 9 in the rods 1. At one end a pair of the rods 1 are preferably joined together to form a handle 6
GB4398774A 1973-10-19 1974-10-10 Carrier rack made of transparent fused silica Expired GB1436503A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE7337643 1973-10-19

Publications (1)

Publication Number Publication Date
GB1436503A true GB1436503A (en) 1976-05-19

Family

ID=6641009

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4398774A Expired GB1436503A (en) 1973-10-19 1974-10-10 Carrier rack made of transparent fused silica

Country Status (4)

Country Link
JP (1) JPS5068775A (en)
CH (1) CH570700A5 (en)
FR (1) FR2248764A7 (en)
GB (1) GB1436503A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4256229A (en) * 1979-09-17 1981-03-17 Rockwell International Corporation Boat for wafer processing
US4355974A (en) * 1980-11-24 1982-10-26 Asq Boats, Inc. Wafer boat
EP0077408A1 (en) * 1981-10-16 1983-04-27 Helmut Seier GmbH A method and apparatus for the heat treatment of semiconductor articles
US4515104A (en) * 1983-05-13 1985-05-07 Asq Boats, Inc. Contiguous wafer boat
USRE33341E (en) * 1983-05-23 1990-09-18 ASQ Technology, Inc. Wafer transfer apparatus
FR2846785A1 (en) * 2002-11-04 2004-05-07 Soitec Silicon On Insulator Container for handling semiconductor wafers, comprises three longitudinal bars with matches and the fourth bar with flat part
RU2485623C1 (en) * 2012-03-06 2013-06-20 Ольга Борисовна Пименова Cassette for group transportation of semiconductor plates
RU2485622C1 (en) * 2012-03-06 2013-06-20 Ольга Борисовна Пименова Cassette for group transportation of semiconductor plates
RU2555209C1 (en) * 2013-12-30 2015-07-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Самарский государственный аэрокосмический университет имени академика С.П. Королева (национальный исследовательский университет)" (СГАУ) Cassette for fusing elements of power semiconductor diodes
CN111892419A (en) * 2020-08-03 2020-11-06 福赛特(唐山)新材料有限公司 High-shock-resistance silicon carbide boat and preparation method thereof

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4256053A (en) * 1979-08-17 1981-03-17 Dozier Alfred R Chemical vapor reaction system
US4287851A (en) * 1980-01-16 1981-09-08 Dozier Alfred R Mounting and excitation system for reaction in the plasma state
DE8021868U1 (en) * 1980-08-16 1981-01-29 Heraeus Quarzschmelze Gmbh, 6450 Hanau CARRIER HORDE FOR SEMICONDUCTOR DISCS
EP0100539A3 (en) * 1982-07-30 1985-05-22 Tecnisco Ltd. Assembled device for supporting semiconductor wafers or the like
US4653636A (en) * 1985-05-14 1987-03-31 Microglass, Inc. Wafer carrier and method
DE3612375A1 (en) * 1986-04-12 1987-10-15 Heraeus Schott Quarzschmelze Loading apparatus for accommodating substrate wafers to be treated in an oven
DE3829159A1 (en) * 1988-08-27 1990-03-08 Westdeutsche Quarzschmelze Gmb Device for holding semiconductor wafers

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4256229A (en) * 1979-09-17 1981-03-17 Rockwell International Corporation Boat for wafer processing
WO1981000681A1 (en) * 1979-09-17 1981-03-19 Rockwell International Corp Boat for wafer processing
US4355974A (en) * 1980-11-24 1982-10-26 Asq Boats, Inc. Wafer boat
EP0077408A1 (en) * 1981-10-16 1983-04-27 Helmut Seier GmbH A method and apparatus for the heat treatment of semiconductor articles
US4515104A (en) * 1983-05-13 1985-05-07 Asq Boats, Inc. Contiguous wafer boat
USRE33341E (en) * 1983-05-23 1990-09-18 ASQ Technology, Inc. Wafer transfer apparatus
FR2846785A1 (en) * 2002-11-04 2004-05-07 Soitec Silicon On Insulator Container for handling semiconductor wafers, comprises three longitudinal bars with matches and the fourth bar with flat part
RU2485623C1 (en) * 2012-03-06 2013-06-20 Ольга Борисовна Пименова Cassette for group transportation of semiconductor plates
RU2485622C1 (en) * 2012-03-06 2013-06-20 Ольга Борисовна Пименова Cassette for group transportation of semiconductor plates
RU2555209C1 (en) * 2013-12-30 2015-07-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Самарский государственный аэрокосмический университет имени академика С.П. Королева (национальный исследовательский университет)" (СГАУ) Cassette for fusing elements of power semiconductor diodes
CN111892419A (en) * 2020-08-03 2020-11-06 福赛特(唐山)新材料有限公司 High-shock-resistance silicon carbide boat and preparation method thereof

Also Published As

Publication number Publication date
FR2248764A7 (en) 1975-05-16
JPS5068775A (en) 1975-06-09
CH570700A5 (en) 1975-12-15

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee