JPS5068775A - - Google Patents
Info
- Publication number
- JPS5068775A JPS5068775A JP7878474A JP7878474A JPS5068775A JP S5068775 A JPS5068775 A JP S5068775A JP 7878474 A JP7878474 A JP 7878474A JP 7878474 A JP7878474 A JP 7878474A JP S5068775 A JPS5068775 A JP S5068775A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/14—Substrate holders or susceptors
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/12—Substrate holders or susceptors
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE7337643 | 1973-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5068775A true JPS5068775A (en) | 1975-06-09 |
Family
ID=6641009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7878474A Pending JPS5068775A (en) | 1973-10-19 | 1974-07-11 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5068775A (en) |
| CH (1) | CH570700A5 (en) |
| FR (1) | FR2248764A7 (en) |
| GB (1) | GB1436503A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5737826A (en) * | 1980-08-16 | 1982-03-02 | Heraeus Schott Quarzschmelze | Carrier enclosure for semiconductor disc |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4256053A (en) * | 1979-08-17 | 1981-03-17 | Dozier Alfred R | Chemical vapor reaction system |
| US4256229A (en) * | 1979-09-17 | 1981-03-17 | Rockwell International Corporation | Boat for wafer processing |
| US4287851A (en) * | 1980-01-16 | 1981-09-08 | Dozier Alfred R | Mounting and excitation system for reaction in the plasma state |
| US4355974A (en) * | 1980-11-24 | 1982-10-26 | Asq Boats, Inc. | Wafer boat |
| EP0077408A1 (en) * | 1981-10-16 | 1983-04-27 | Helmut Seier GmbH | A method and apparatus for the heat treatment of semiconductor articles |
| EP0100539A3 (en) * | 1982-07-30 | 1985-05-22 | Tecnisco Ltd. | Assembled device for supporting semiconductor wafers or the like |
| US4515104A (en) * | 1983-05-13 | 1985-05-07 | Asq Boats, Inc. | Contiguous wafer boat |
| USRE33341E (en) * | 1983-05-23 | 1990-09-18 | ASQ Technology, Inc. | Wafer transfer apparatus |
| US4653636A (en) * | 1985-05-14 | 1987-03-31 | Microglass, Inc. | Wafer carrier and method |
| DE3612375A1 (en) * | 1986-04-12 | 1987-10-15 | Heraeus Schott Quarzschmelze | Loading apparatus for accommodating substrate wafers to be treated in an oven |
| DE3829159A1 (en) * | 1988-08-27 | 1990-03-08 | Westdeutsche Quarzschmelze Gmb | Device for holding semiconductor wafers |
| FR2846785B1 (en) * | 2002-11-04 | 2005-02-04 | Soitec Silicon On Insulator | SEMI-CONDUCTOR WAFER HANDLING NACELLE |
| RU2485623C1 (en) * | 2012-03-06 | 2013-06-20 | Ольга Борисовна Пименова | Cassette for group transportation of semiconductor plates |
| RU2485622C1 (en) * | 2012-03-06 | 2013-06-20 | Ольга Борисовна Пименова | Cassette for group transportation of semiconductor plates |
| RU2555209C1 (en) * | 2013-12-30 | 2015-07-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Самарский государственный аэрокосмический университет имени академика С.П. Королева (национальный исследовательский университет)" (СГАУ) | Cassette for fusing elements of power semiconductor diodes |
| CN111892419A (en) * | 2020-08-03 | 2020-11-06 | 福赛特(唐山)新材料有限公司 | High-shock-resistance silicon carbide boat and preparation method thereof |
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1974
- 1974-07-11 JP JP7878474A patent/JPS5068775A/ja active Pending
- 1974-09-20 FR FR7431878A patent/FR2248764A7/fr not_active Expired
- 1974-10-10 GB GB4398774A patent/GB1436503A/en not_active Expired
- 1974-10-17 CH CH1392874A patent/CH570700A5/xx not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5737826A (en) * | 1980-08-16 | 1982-03-02 | Heraeus Schott Quarzschmelze | Carrier enclosure for semiconductor disc |
| JPS6141128B2 (en) * | 1980-08-16 | 1986-09-12 | Hereusu Kuarutsushumerutsue Gmbh |
Also Published As
| Publication number | Publication date |
|---|---|
| CH570700A5 (en) | 1975-12-15 |
| GB1436503A (en) | 1976-05-19 |
| FR2248764A7 (en) | 1975-05-16 |