JPS5037355A - - Google Patents
Info
- Publication number
- JPS5037355A JPS5037355A JP8756173A JP8756173A JPS5037355A JP S5037355 A JPS5037355 A JP S5037355A JP 8756173 A JP8756173 A JP 8756173A JP 8756173 A JP8756173 A JP 8756173A JP S5037355 A JPS5037355 A JP S5037355A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8756173A JPS5812730B2 (en) | 1973-08-06 | 1973-08-06 | wafer jig |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8756173A JPS5812730B2 (en) | 1973-08-06 | 1973-08-06 | wafer jig |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5037355A true JPS5037355A (en) | 1975-04-08 |
JPS5812730B2 JPS5812730B2 (en) | 1983-03-10 |
Family
ID=13918389
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8756173A Expired JPS5812730B2 (en) | 1973-08-06 | 1973-08-06 | wafer jig |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5812730B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5527976U (en) * | 1978-08-15 | 1980-02-22 | ||
JPS5599719A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Heat treatment jig of wafer |
JPS55110035A (en) * | 1979-02-16 | 1980-08-25 | Hitachi Ltd | Jig for heat treating wafer |
JPS56501225A (en) * | 1979-09-17 | 1981-08-27 | ||
JPS58138918U (en) * | 1982-03-12 | 1983-09-19 | 中興化成工業株式会社 | Support device for cleaning lenses, etc. |
-
1973
- 1973-08-06 JP JP8756173A patent/JPS5812730B2/en not_active Expired
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5527976U (en) * | 1978-08-15 | 1980-02-22 | ||
JPS5599719A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Heat treatment jig of wafer |
JPS55110035A (en) * | 1979-02-16 | 1980-08-25 | Hitachi Ltd | Jig for heat treating wafer |
JPS56501225A (en) * | 1979-09-17 | 1981-08-27 | ||
JPS58138918U (en) * | 1982-03-12 | 1983-09-19 | 中興化成工業株式会社 | Support device for cleaning lenses, etc. |
JPH0112246Y2 (en) * | 1982-03-12 | 1989-04-11 |
Also Published As
Publication number | Publication date |
---|---|
JPS5812730B2 (en) | 1983-03-10 |