JPS5068775A - - Google Patents

Info

Publication number
JPS5068775A
JPS5068775A JP7878474A JP7878474A JPS5068775A JP S5068775 A JPS5068775 A JP S5068775A JP 7878474 A JP7878474 A JP 7878474A JP 7878474 A JP7878474 A JP 7878474A JP S5068775 A JPS5068775 A JP S5068775A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7878474A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5068775A publication Critical patent/JPS5068775A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/12—Substrate holders or susceptors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP7878474A 1973-10-19 1974-07-11 Pending JPS5068775A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE7337643 1973-10-19

Publications (1)

Publication Number Publication Date
JPS5068775A true JPS5068775A (enrdf_load_stackoverflow) 1975-06-09

Family

ID=6641009

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7878474A Pending JPS5068775A (enrdf_load_stackoverflow) 1973-10-19 1974-07-11

Country Status (4)

Country Link
JP (1) JPS5068775A (enrdf_load_stackoverflow)
CH (1) CH570700A5 (enrdf_load_stackoverflow)
FR (1) FR2248764A7 (enrdf_load_stackoverflow)
GB (1) GB1436503A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737826A (en) * 1980-08-16 1982-03-02 Heraeus Schott Quarzschmelze Carrier enclosure for semiconductor disc

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4256053A (en) * 1979-08-17 1981-03-17 Dozier Alfred R Chemical vapor reaction system
US4256229A (en) * 1979-09-17 1981-03-17 Rockwell International Corporation Boat for wafer processing
US4287851A (en) * 1980-01-16 1981-09-08 Dozier Alfred R Mounting and excitation system for reaction in the plasma state
US4355974A (en) * 1980-11-24 1982-10-26 Asq Boats, Inc. Wafer boat
EP0077408A1 (en) * 1981-10-16 1983-04-27 Helmut Seier GmbH A method and apparatus for the heat treatment of semiconductor articles
EP0100539A3 (en) * 1982-07-30 1985-05-22 Tecnisco Ltd. Assembled device for supporting semiconductor wafers or the like
US4515104A (en) * 1983-05-13 1985-05-07 Asq Boats, Inc. Contiguous wafer boat
USRE33341E (en) * 1983-05-23 1990-09-18 ASQ Technology, Inc. Wafer transfer apparatus
US4653636A (en) * 1985-05-14 1987-03-31 Microglass, Inc. Wafer carrier and method
DE3612375A1 (de) * 1986-04-12 1987-10-15 Heraeus Schott Quarzschmelze Beladevorrichtung zur aufnahme von in einem ofen zu behandelnde substratscheiben
DE3829159A1 (de) * 1988-08-27 1990-03-08 Westdeutsche Quarzschmelze Gmb Vorrichtung zur aufnahme von halbleiterscheibchen
FR2846785B1 (fr) * 2002-11-04 2005-02-04 Soitec Silicon On Insulator Nacelle de manutention de tranches de materiau semiconducteur
RU2485622C1 (ru) * 2012-03-06 2013-06-20 Ольга Борисовна Пименова Кассета для групповой транспортировки полупроводниковых пластин
RU2485623C1 (ru) * 2012-03-06 2013-06-20 Ольга Борисовна Пименова Кассета для групповой транспортировки полупроводниковых пластин
RU2555209C1 (ru) * 2013-12-30 2015-07-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Самарский государственный аэрокосмический университет имени академика С.П. Королева (национальный исследовательский университет)" (СГАУ) Кассета для сплавления элементов силовых полупроводниковых диодов
CN111892419A (zh) * 2020-08-03 2020-11-06 福赛特(唐山)新材料有限公司 一种高抗震性碳化硅舟及其制备方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737826A (en) * 1980-08-16 1982-03-02 Heraeus Schott Quarzschmelze Carrier enclosure for semiconductor disc

Also Published As

Publication number Publication date
FR2248764A7 (enrdf_load_stackoverflow) 1975-05-16
GB1436503A (en) 1976-05-19
CH570700A5 (enrdf_load_stackoverflow) 1975-12-15

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