FR2238953A1 - - Google Patents
Info
- Publication number
- FR2238953A1 FR2238953A1 FR7425452A FR7425452A FR2238953A1 FR 2238953 A1 FR2238953 A1 FR 2238953A1 FR 7425452 A FR7425452 A FR 7425452A FR 7425452 A FR7425452 A FR 7425452A FR 2238953 A1 FR2238953 A1 FR 2238953A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/008—Azides
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/695—Compositions containing azides as the photosensitive substances
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Graft Or Block Polymers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8284973A JPS5140452B2 (ja) | 1973-07-23 | 1973-07-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2238953A1 true FR2238953A1 (ja) | 1975-02-21 |
FR2238953B1 FR2238953B1 (ja) | 1977-10-21 |
Family
ID=13785815
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7425452A Expired FR2238953B1 (ja) | 1973-07-23 | 1974-07-23 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS5140452B2 (ja) |
DE (1) | DE2435390A1 (ja) |
FR (1) | FR2238953B1 (ja) |
GB (1) | GB1475599A (ja) |
IT (1) | IT1016966B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0001597A1 (de) * | 1977-10-14 | 1979-05-02 | Ciba-Geigy Ag | Unter der Einwirkung von Licht härtbare, Bis-Azidophthalimidyl-Derivate enthaltende Stoffgemische |
FR2486259A1 (fr) * | 1980-07-03 | 1982-01-08 | Rca Corp | Procede pour la realisation de configurations en relief de surface, en vue d'applications micro-lithographiques |
EP0189271A2 (en) * | 1985-01-18 | 1986-07-30 | Hitachi Chemical Co., Ltd. | Photosensitive composition |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5294632A (en) * | 1976-02-04 | 1977-08-09 | Mitsui Constr | Transfer method in compressed air of material lock and its device |
US4556625A (en) * | 1982-07-09 | 1985-12-03 | Armstrong World Industries, Inc. | Development of a colored image on a cellulosic material with monosulfonyl azides |
EP2562599B1 (en) | 2009-01-29 | 2014-12-10 | Digiflex Ltd. | Process for producing a photomask on a photopolymeric surface |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1572068C3 (de) * | 1966-03-12 | 1976-01-08 | Hoechst Ag, 6000 Frankfurt | Lichtempfindliche Schicht zur Herstellung von Druckformen |
DE1294191B (de) * | 1967-07-06 | 1969-07-31 | Kalle Ag | Lichtempfindliches Kopiermaterial mit einer lichtvernetzbaren Schicht |
DE1597614B2 (de) * | 1967-07-07 | 1977-06-23 | Hoechst Ag, 6000 Frankfurt | Lichtempfindliche kopiermasse |
-
1973
- 1973-07-23 JP JP8284973A patent/JPS5140452B2/ja not_active Expired
-
1974
- 1974-07-23 IT IT52241/74A patent/IT1016966B/it active
- 1974-07-23 GB GB3258174A patent/GB1475599A/en not_active Expired
- 1974-07-23 FR FR7425452A patent/FR2238953B1/fr not_active Expired
- 1974-07-23 DE DE2435390A patent/DE2435390A1/de not_active Withdrawn
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0001597A1 (de) * | 1977-10-14 | 1979-05-02 | Ciba-Geigy Ag | Unter der Einwirkung von Licht härtbare, Bis-Azidophthalimidyl-Derivate enthaltende Stoffgemische |
FR2486259A1 (fr) * | 1980-07-03 | 1982-01-08 | Rca Corp | Procede pour la realisation de configurations en relief de surface, en vue d'applications micro-lithographiques |
EP0189271A2 (en) * | 1985-01-18 | 1986-07-30 | Hitachi Chemical Co., Ltd. | Photosensitive composition |
EP0189271A3 (en) * | 1985-01-18 | 1988-03-30 | Hitachi Chemical Co., Ltd. | Photosensitive composition |
Also Published As
Publication number | Publication date |
---|---|
DE2435390A1 (de) | 1975-02-13 |
GB1475599A (en) | 1977-06-01 |
JPS5140452B2 (ja) | 1976-11-04 |
FR2238953B1 (ja) | 1977-10-21 |
IT1016966B (it) | 1977-06-20 |
JPS5032924A (ja) | 1975-03-29 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |