JPS5140452B2 - - Google Patents

Info

Publication number
JPS5140452B2
JPS5140452B2 JP8284973A JP8284973A JPS5140452B2 JP S5140452 B2 JPS5140452 B2 JP S5140452B2 JP 8284973 A JP8284973 A JP 8284973A JP 8284973 A JP8284973 A JP 8284973A JP S5140452 B2 JPS5140452 B2 JP S5140452B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8284973A
Other versions
JPS5032924A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8284973A priority Critical patent/JPS5140452B2/ja
Priority to FR7425452A priority patent/FR2238953B1/fr
Priority to GB3258174A priority patent/GB1475599A/en
Priority to IT52241/74A priority patent/IT1016966B/it
Priority to DE2435390A priority patent/DE2435390A1/de
Publication of JPS5032924A publication Critical patent/JPS5032924A/ja
Publication of JPS5140452B2 publication Critical patent/JPS5140452B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/008—Azides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C1/00—Photosensitive materials
    • G03C1/695—Compositions containing azides as the photosensitive substances
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Graft Or Block Polymers (AREA)
JP8284973A 1973-07-23 1973-07-23 Expired JPS5140452B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP8284973A JPS5140452B2 (ja) 1973-07-23 1973-07-23
FR7425452A FR2238953B1 (ja) 1973-07-23 1974-07-23
GB3258174A GB1475599A (en) 1973-07-23 1974-07-23 Process for producing ultraviolet-shielding photomasks
IT52241/74A IT1016966B (it) 1973-07-23 1974-07-23 Procedimento per produrre maschere fotografiche schermanti ultra violetto
DE2435390A DE2435390A1 (de) 1973-07-23 1974-07-23 Verfahren zur herstellung von uvabschirmenden photomasken

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8284973A JPS5140452B2 (ja) 1973-07-23 1973-07-23

Publications (2)

Publication Number Publication Date
JPS5032924A JPS5032924A (ja) 1975-03-29
JPS5140452B2 true JPS5140452B2 (ja) 1976-11-04

Family

ID=13785815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8284973A Expired JPS5140452B2 (ja) 1973-07-23 1973-07-23

Country Status (5)

Country Link
JP (1) JPS5140452B2 (ja)
DE (1) DE2435390A1 (ja)
FR (1) FR2238953B1 (ja)
GB (1) GB1475599A (ja)
IT (1) IT1016966B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5294632A (en) * 1976-02-04 1977-08-09 Mitsui Constr Transfer method in compressed air of material lock and its device
US4197133A (en) * 1977-10-14 1980-04-08 Ciba-Geigy Corporation Photo-curable compositions of matter containing bis-azidophthalimidyl derivatives
IT1138814B (it) * 1980-07-03 1986-09-17 Rca Corp Metodo per la formazione di disegni superficiali in rilievo con ultravioletto lontano e composizione protettiva fotoosensibile per questo metodo
US4556625A (en) * 1982-07-09 1985-12-03 Armstrong World Industries, Inc. Development of a colored image on a cellulosic material with monosulfonyl azides
JPS61166542A (ja) * 1985-01-18 1986-07-28 Hitachi Chem Co Ltd 感光性組成物
EP2562599B1 (en) 2009-01-29 2014-12-10 Digiflex Ltd. Process for producing a photomask on a photopolymeric surface

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1179361A (en) * 1966-03-12 1970-01-28 Kalle Ag Reprographic Copying Compositions and Reprographic Copying Materials Prepared therewith
US3499759A (en) * 1967-07-06 1970-03-10 Kalle Ag Light-sensitive reproduction layer comprising an oxetane polymer
US3595656A (en) * 1967-07-07 1971-07-27 Kalle Ag Reprographic materials containing a water-insoluble azidochalcone

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1179361A (en) * 1966-03-12 1970-01-28 Kalle Ag Reprographic Copying Compositions and Reprographic Copying Materials Prepared therewith
US3499759A (en) * 1967-07-06 1970-03-10 Kalle Ag Light-sensitive reproduction layer comprising an oxetane polymer
US3595656A (en) * 1967-07-07 1971-07-27 Kalle Ag Reprographic materials containing a water-insoluble azidochalcone

Also Published As

Publication number Publication date
DE2435390A1 (de) 1975-02-13
GB1475599A (en) 1977-06-01
FR2238953A1 (ja) 1975-02-21
FR2238953B1 (ja) 1977-10-21
IT1016966B (it) 1977-06-20
JPS5032924A (ja) 1975-03-29

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