FR2235401A1 - - Google Patents
Info
- Publication number
- FR2235401A1 FR2235401A1 FR7422500A FR7422500A FR2235401A1 FR 2235401 A1 FR2235401 A1 FR 2235401A1 FR 7422500 A FR7422500 A FR 7422500A FR 7422500 A FR7422500 A FR 7422500A FR 2235401 A1 FR2235401 A1 FR 2235401A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
- G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
- G03G5/08207—Selenium-based
Landscapes
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Physical Vapour Deposition (AREA)
- Photoreceptors In Electrophotography (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP48072263A JPS5022639A (de) | 1973-06-28 | 1973-06-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2235401A1 true FR2235401A1 (de) | 1975-01-24 |
FR2235401B1 FR2235401B1 (de) | 1981-09-25 |
Family
ID=13484214
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7422500A Expired FR2235401B1 (de) | 1973-06-28 | 1974-06-27 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS5022639A (de) |
DE (1) | DE2430653C3 (de) |
FR (1) | FR2235401B1 (de) |
GB (1) | GB1473535A (de) |
NL (1) | NL7407524A (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0997552A1 (de) * | 1997-07-14 | 2000-05-03 | Matsushita Electric Industrial Co., Ltd. | Verfahren und vorrichtung zur herstellung von dünnen funktionsfilmen |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4593008B2 (ja) * | 2001-05-23 | 2010-12-08 | キヤノンアネルバ株式会社 | 蒸着源並びにそれを用いた薄膜形成方法及び形成装置 |
US7431807B2 (en) * | 2005-01-07 | 2008-10-07 | Universal Display Corporation | Evaporation method using infrared guiding heater |
DE102021006249A1 (de) | 2021-12-17 | 2023-06-22 | Singulus Technologies Aktiengesellschaft | Beschichtungsquelle, Beschichtungsanlage und Verfahren zur Beschichtung von Substraten |
DE102021006288A1 (de) | 2021-12-21 | 2023-06-22 | Singulus Technologies Aktiengesellschaft | Beschichtungsquelle mit Nachfüllvorrichtung |
-
1973
- 1973-06-28 JP JP48072263A patent/JPS5022639A/ja active Pending
-
1974
- 1974-06-04 NL NL7407524A patent/NL7407524A/xx not_active Application Discontinuation
- 1974-06-14 GB GB2660374A patent/GB1473535A/en not_active Expired
- 1974-06-26 DE DE19742430653 patent/DE2430653C3/de not_active Expired
- 1974-06-27 FR FR7422500A patent/FR2235401B1/fr not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0997552A1 (de) * | 1997-07-14 | 2000-05-03 | Matsushita Electric Industrial Co., Ltd. | Verfahren und vorrichtung zur herstellung von dünnen funktionsfilmen |
EP0997552A4 (de) * | 1997-07-14 | 2001-05-02 | Matsushita Electric Ind Co Ltd | Verfahren und vorrichtung zur herstellung von dünnen funktionsfilmen |
US6337105B1 (en) | 1997-07-14 | 2002-01-08 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus for forming thin functional film |
Also Published As
Publication number | Publication date |
---|---|
DE2430653A1 (de) | 1975-01-23 |
DE2430653C3 (de) | 1980-03-20 |
FR2235401B1 (de) | 1981-09-25 |
NL7407524A (de) | 1974-12-31 |
DE2430653B2 (de) | 1979-07-12 |
JPS5022639A (de) | 1975-03-11 |
GB1473535A (en) | 1977-05-11 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |