FR2219243A1 - Refractory oxide coating - for vacuum thermal flash evaporator - Google Patents

Refractory oxide coating - for vacuum thermal flash evaporator

Info

Publication number
FR2219243A1
FR2219243A1 FR7306825A FR7306825A FR2219243A1 FR 2219243 A1 FR2219243 A1 FR 2219243A1 FR 7306825 A FR7306825 A FR 7306825A FR 7306825 A FR7306825 A FR 7306825A FR 2219243 A1 FR2219243 A1 FR 2219243A1
Authority
FR
France
Prior art keywords
refractory oxide
oxide coating
container
vacuum thermal
flash evaporator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7306825A
Other languages
French (fr)
Other versions
FR2219243B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INFORMATIQUE CIE INTERNATIONALE FR
Original Assignee
INFORMATIQUE CIE INTERNATIONALE FR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INFORMATIQUE CIE INTERNATIONALE FR filed Critical INFORMATIQUE CIE INTERNATIONALE FR
Priority to FR7306825A priority Critical patent/FR2219243A1/en
Publication of FR2219243A1 publication Critical patent/FR2219243A1/en
Application granted granted Critical
Publication of FR2219243B1 publication Critical patent/FR2219243B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Small container of refractory metal selected from Ta, W or Mo, for use in thermal vacuum evaporation of materials onto a substrate in the vacuum space, by the known technique of supplying it with a series of samples of the material while maintaining it at a temp. ensuring immediate boiling and evaporation of such material, in which the inner wall of the container is coated with a strongly adherent film of a few microns thickness, of a quasi - vitrified refractory oxide, having no chemical affinity for the metal of the container and pref. selected from Al2O3, SiO2 and TiO2.
FR7306825A 1973-02-27 1973-02-27 Refractory oxide coating - for vacuum thermal flash evaporator Granted FR2219243A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7306825A FR2219243A1 (en) 1973-02-27 1973-02-27 Refractory oxide coating - for vacuum thermal flash evaporator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7306825A FR2219243A1 (en) 1973-02-27 1973-02-27 Refractory oxide coating - for vacuum thermal flash evaporator

Publications (2)

Publication Number Publication Date
FR2219243A1 true FR2219243A1 (en) 1974-09-20
FR2219243B1 FR2219243B1 (en) 1976-11-05

Family

ID=9115437

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7306825A Granted FR2219243A1 (en) 1973-02-27 1973-02-27 Refractory oxide coating - for vacuum thermal flash evaporator

Country Status (1)

Country Link
FR (1) FR2219243A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2582319A1 (en) * 1985-05-22 1986-11-28 Barbier Benard & Turenne Plant for nickel deposition by vacuum evaporation, especially for the preparation of neutron guides

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE865696C (en) * 1951-04-11 1953-02-05 Heraeus Gmbh W C Hard, permanent protective coatings on crucibles and casting molds for metals

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE865696C (en) * 1951-04-11 1953-02-05 Heraeus Gmbh W C Hard, permanent protective coatings on crucibles and casting molds for metals

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2582319A1 (en) * 1985-05-22 1986-11-28 Barbier Benard & Turenne Plant for nickel deposition by vacuum evaporation, especially for the preparation of neutron guides

Also Published As

Publication number Publication date
FR2219243B1 (en) 1976-11-05

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Legal Events

Date Code Title Description
CD Change of name or company name
TP Transmission of property
ST Notification of lapse