FR2164474A1 - - Google Patents

Info

Publication number
FR2164474A1
FR2164474A1 FR7146010A FR7146010A FR2164474A1 FR 2164474 A1 FR2164474 A1 FR 2164474A1 FR 7146010 A FR7146010 A FR 7146010A FR 7146010 A FR7146010 A FR 7146010A FR 2164474 A1 FR2164474 A1 FR 2164474A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7146010A
Other versions
FR2164474B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to BE792552D priority Critical patent/BE792552A/fr
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to FR7146010A priority patent/FR2164474B1/fr
Priority to DE19722261535 priority patent/DE2261535A1/de
Priority to NL7217316A priority patent/NL7217316A/xx
Priority to GB5860272A priority patent/GB1366750A/en
Priority to IT7233194A priority patent/IT972585B/it
Priority to US00317307A priority patent/US3763821A/en
Publication of FR2164474A1 publication Critical patent/FR2164474A1/fr
Application granted granted Critical
Publication of FR2164474B1 publication Critical patent/FR2164474B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7146010A 1971-12-21 1971-12-21 Expired FR2164474B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
BE792552D BE792552A (fr) 1971-12-21 Enceinte pour depot de couches minces sous vide
FR7146010A FR2164474B1 (fr) 1971-12-21 1971-12-21
DE19722261535 DE2261535A1 (de) 1971-12-21 1972-12-15 Behaelter zur aufbringung von duennen schichten im vakuum
NL7217316A NL7217316A (fr) 1971-12-21 1972-12-19
GB5860272A GB1366750A (en) 1971-12-21 1972-12-19 Thin layer vacuum deposition apparatus
IT7233194A IT972585B (it) 1971-12-21 1972-12-20 Imvolucro per deposito di strati sottili sotto vuoto
US00317307A US3763821A (en) 1971-12-21 1972-12-21 Vacuum deposition apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7146010A FR2164474B1 (fr) 1971-12-21 1971-12-21

Publications (2)

Publication Number Publication Date
FR2164474A1 true FR2164474A1 (fr) 1973-08-03
FR2164474B1 FR2164474B1 (fr) 1974-08-23

Family

ID=9087817

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7146010A Expired FR2164474B1 (fr) 1971-12-21 1971-12-21

Country Status (7)

Country Link
US (1) US3763821A (fr)
BE (1) BE792552A (fr)
DE (1) DE2261535A1 (fr)
FR (1) FR2164474B1 (fr)
GB (1) GB1366750A (fr)
IT (1) IT972585B (fr)
NL (1) NL7217316A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11200017A (ja) * 1998-01-20 1999-07-27 Nikon Corp 光学薄膜成膜装置およびこの光学薄膜成膜装置により成膜された光学素子
DE102004041854B4 (de) * 2004-04-27 2008-11-13 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur thermischen Vakuumbeschichtung
US20070125303A1 (en) 2005-12-02 2007-06-07 Ward Ruby High-throughput deposition system for oxide thin film growth by reactive coevaportation
JP5707554B1 (ja) * 2014-03-11 2015-04-30 ナルックス株式会社 蒸着装置及びトレイ保持具
CN110878409A (zh) * 2018-09-05 2020-03-13 杭州纤纳光电科技有限公司 制备太阳能电池背电极的磁控溅射镀膜生产线及其方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH311812A (de) * 1951-11-05 1955-12-15 Zeiss Carl Fa Aufdampfeinrichtung.
US3309221A (en) * 1963-03-25 1967-03-14 Minnesota Mining & Mfg Surface activation of passive polymers and articles produced thereby
US3694894A (en) * 1970-01-14 1972-10-03 Parker Hannifin Corp Method of inserting a seal in a face-cut groove

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Also Published As

Publication number Publication date
IT972585B (it) 1974-05-31
FR2164474B1 (fr) 1974-08-23
BE792552A (fr) 1973-06-12
NL7217316A (fr) 1973-06-25
US3763821A (en) 1973-10-09
GB1366750A (en) 1974-09-11
DE2261535A1 (de) 1973-06-28

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Legal Events

Date Code Title Description
ST Notification of lapse