IT972585B - Imvolucro per deposito di strati sottili sotto vuoto - Google Patents
Imvolucro per deposito di strati sottili sotto vuotoInfo
- Publication number
- IT972585B IT972585B IT7233194A IT3319472A IT972585B IT 972585 B IT972585 B IT 972585B IT 7233194 A IT7233194 A IT 7233194A IT 3319472 A IT3319472 A IT 3319472A IT 972585 B IT972585 B IT 972585B
- Authority
- IT
- Italy
- Prior art keywords
- packaging
- storage
- under vacuum
- thin layers
- layers under
- Prior art date
Links
- 238000004806 packaging method and process Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7146010A FR2164474B1 (it) | 1971-12-21 | 1971-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IT972585B true IT972585B (it) | 1974-05-31 |
Family
ID=9087817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT7233194A IT972585B (it) | 1971-12-21 | 1972-12-20 | Imvolucro per deposito di strati sottili sotto vuoto |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3763821A (it) |
| BE (1) | BE792552A (it) |
| DE (1) | DE2261535A1 (it) |
| FR (1) | FR2164474B1 (it) |
| GB (1) | GB1366750A (it) |
| IT (1) | IT972585B (it) |
| NL (1) | NL7217316A (it) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11200017A (ja) * | 1998-01-20 | 1999-07-27 | Nikon Corp | 光学薄膜成膜装置およびこの光学薄膜成膜装置により成膜された光学素子 |
| DE102004041854B4 (de) * | 2004-04-27 | 2008-11-13 | Von Ardenne Anlagentechnik Gmbh | Verfahren und Vorrichtung zur thermischen Vakuumbeschichtung |
| US20070125303A1 (en) | 2005-12-02 | 2007-06-07 | Ward Ruby | High-throughput deposition system for oxide thin film growth by reactive coevaportation |
| JP5707554B1 (ja) * | 2014-03-11 | 2015-04-30 | ナルックス株式会社 | 蒸着装置及びトレイ保持具 |
| CN110878409A (zh) * | 2018-09-05 | 2020-03-13 | 杭州纤纳光电科技有限公司 | 制备太阳能电池背电极的磁控溅射镀膜生产线及其方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH311812A (de) * | 1951-11-05 | 1955-12-15 | Zeiss Carl Fa | Aufdampfeinrichtung. |
| US3309221A (en) * | 1963-03-25 | 1967-03-14 | Minnesota Mining & Mfg | Surface activation of passive polymers and articles produced thereby |
| US3694894A (en) * | 1970-01-14 | 1972-10-03 | Parker Hannifin Corp | Method of inserting a seal in a face-cut groove |
-
0
- BE BE792552D patent/BE792552A/xx unknown
-
1971
- 1971-12-21 FR FR7146010A patent/FR2164474B1/fr not_active Expired
-
1972
- 1972-12-15 DE DE19722261535 patent/DE2261535A1/de active Pending
- 1972-12-19 GB GB5860272A patent/GB1366750A/en not_active Expired
- 1972-12-19 NL NL7217316A patent/NL7217316A/xx unknown
- 1972-12-20 IT IT7233194A patent/IT972585B/it active
- 1972-12-21 US US00317307A patent/US3763821A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE2261535A1 (de) | 1973-06-28 |
| BE792552A (fr) | 1973-06-12 |
| GB1366750A (en) | 1974-09-11 |
| FR2164474A1 (it) | 1973-08-03 |
| US3763821A (en) | 1973-10-09 |
| NL7217316A (it) | 1973-06-25 |
| FR2164474B1 (it) | 1974-08-23 |
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