BE792552A - Enceinte pour depot de couches minces sous vide - Google Patents

Enceinte pour depot de couches minces sous vide

Info

Publication number
BE792552A
BE792552A BE792552DA BE792552A BE 792552 A BE792552 A BE 792552A BE 792552D A BE792552D A BE 792552DA BE 792552 A BE792552 A BE 792552A
Authority
BE
Belgium
Prior art keywords
thin layer
vacuum thin
layer deposit
deposit container
container
Prior art date
Application number
Other languages
English (en)
Original Assignee
Cit Alcatel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Publication of BE792552A publication Critical patent/BE792552A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
BE792552D 1971-12-21 Enceinte pour depot de couches minces sous vide BE792552A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7146010A FR2164474B1 (fr) 1971-12-21 1971-12-21

Publications (1)

Publication Number Publication Date
BE792552A true BE792552A (fr) 1973-06-12

Family

ID=9087817

Family Applications (1)

Application Number Title Priority Date Filing Date
BE792552D BE792552A (fr) 1971-12-21 Enceinte pour depot de couches minces sous vide

Country Status (7)

Country Link
US (1) US3763821A (fr)
BE (1) BE792552A (fr)
DE (1) DE2261535A1 (fr)
FR (1) FR2164474B1 (fr)
GB (1) GB1366750A (fr)
IT (1) IT972585B (fr)
NL (1) NL7217316A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11200017A (ja) * 1998-01-20 1999-07-27 Nikon Corp 光学薄膜成膜装置およびこの光学薄膜成膜装置により成膜された光学素子
DE102004041854B4 (de) * 2004-04-27 2008-11-13 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur thermischen Vakuumbeschichtung
US20070125303A1 (en) 2005-12-02 2007-06-07 Ward Ruby High-throughput deposition system for oxide thin film growth by reactive coevaportation
JP5707554B1 (ja) * 2014-03-11 2015-04-30 ナルックス株式会社 蒸着装置及びトレイ保持具
CN110878409A (zh) * 2018-09-05 2020-03-13 杭州纤纳光电科技有限公司 制备太阳能电池背电极的磁控溅射镀膜生产线及其方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH311812A (de) * 1951-11-05 1955-12-15 Zeiss Carl Fa Aufdampfeinrichtung.
US3309221A (en) * 1963-03-25 1967-03-14 Minnesota Mining & Mfg Surface activation of passive polymers and articles produced thereby
US3694894A (en) * 1970-01-14 1972-10-03 Parker Hannifin Corp Method of inserting a seal in a face-cut groove

Also Published As

Publication number Publication date
IT972585B (it) 1974-05-31
FR2164474B1 (fr) 1974-08-23
NL7217316A (fr) 1973-06-25
US3763821A (en) 1973-10-09
GB1366750A (en) 1974-09-11
DE2261535A1 (de) 1973-06-28
FR2164474A1 (fr) 1973-08-03

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