FR2160812A1 - Thin substrate thermometry - for cathodic sputtering plant by radiation pyrometry of reverse side of substrate - Google Patents

Thin substrate thermometry - for cathodic sputtering plant by radiation pyrometry of reverse side of substrate

Info

Publication number
FR2160812A1
FR2160812A1 FR7234433A FR7234433A FR2160812A1 FR 2160812 A1 FR2160812 A1 FR 2160812A1 FR 7234433 A FR7234433 A FR 7234433A FR 7234433 A FR7234433 A FR 7234433A FR 2160812 A1 FR2160812 A1 FR 2160812A1
Authority
FR
France
Prior art keywords
substrate
thermometry
reverse side
cathodic sputtering
radiation pyrometry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7234433A
Other languages
English (en)
French (fr)
Other versions
FR2160812B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektromat VEB
Original Assignee
Elektromat VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat VEB filed Critical Elektromat VEB
Publication of FR2160812A1 publication Critical patent/FR2160812A1/fr
Application granted granted Critical
Publication of FR2160812B1 publication Critical patent/FR2160812B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0815—Light concentrators, collectors or condensers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0818—Waveguides

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Physical Vapour Deposition (AREA)
FR7234433A 1971-11-22 1972-09-28 Thin substrate thermometry - for cathodic sputtering plant by radiation pyrometry of reverse side of substrate Granted FR2160812A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD159068A DD95127A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1971-11-22 1971-11-22

Publications (2)

Publication Number Publication Date
FR2160812A1 true FR2160812A1 (en) 1973-07-06
FR2160812B1 FR2160812B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-01-03

Family

ID=5484644

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7234433A Granted FR2160812A1 (en) 1971-11-22 1972-09-28 Thin substrate thermometry - for cathodic sputtering plant by radiation pyrometry of reverse side of substrate

Country Status (5)

Country Link
CH (1) CH556021A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS (1) CS179487B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DD (1) DD95127A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2231405A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2160812A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3051038A (en) * 1958-10-21 1962-08-28 Honeywell Regulator Co Temperature measuring apparatus
US3432416A (en) * 1966-10-03 1969-03-11 Gen Electric High purity niobium films formed by glow discharge cathode sputtering

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3051038A (en) * 1958-10-21 1962-08-28 Honeywell Regulator Co Temperature measuring apparatus
US3432416A (en) * 1966-10-03 1969-03-11 Gen Electric High purity niobium films formed by glow discharge cathode sputtering

Also Published As

Publication number Publication date
CH556021A (de) 1974-11-15
FR2160812B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-01-03
DD95127A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-01-12
CS179487B1 (en) 1977-11-30
DE2231405A1 (de) 1973-05-30

Similar Documents

Publication Publication Date Title
GB1417869A (en) Controlled release door holder
GB1087458A (en) Tubular wave guide for the transmission of light of infra-red waves
CA978402A (en) Light conduit with double cladding
CA928170A (en) Process for hardening coatings with lasers emitting infra-red radiation
GB994879A (en) Improvements in or relating to scintillation detectors
IL36688A (en) Hand firearms with direct or indirect sighting and ammunition therefor
CA952630A (en) Scintillation camera with improved light guide
FR2160812A1 (en) Thin substrate thermometry - for cathodic sputtering plant by radiation pyrometry of reverse side of substrate
CA977064A (en) Metal-glass laser window assembly
GB1258096A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR2186516A1 (en) Thermochromatic temp. indicating compsns. - contg. org. electron donors and phenolic cpds.
FR2051774A1 (en) Mirror surface for optical purposes
GB1356774A (en) Transparent elements
GB1079345A (en) Fever thermometers protective devices
GB991906A (en) Alpha probe window
CA684673A (en) Film formation by reaction of evaporated metal with oxygen
CH610466B5 (en) Drive device for timepiece with spring and barrel
USD138734S (en) Mirror for store window displays or the like
GB1238125A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
USD206397S (en) Jlsi key blank
CA792662A (en) Supersaturated borax solution stabilized with alkali metal dichromate
AU253531B2 (en) A multiple glazed window forthe blocking of heat radiation
AU764561A (en) A multiple glazed window forthe blocking of heat radiation
GB900952A (en) Tinsel
AU436051B2 (en) Vacuum vapor deposition with control of elevation of metal melt

Legal Events

Date Code Title Description
ST Notification of lapse