CS179487B1 - Catode sputtering equipment with thin deposited layers temperature measuring device - Google Patents

Catode sputtering equipment with thin deposited layers temperature measuring device

Info

Publication number
CS179487B1
CS179487B1 CS7200007910A CS791072A CS179487B1 CS 179487 B1 CS179487 B1 CS 179487B1 CS 7200007910 A CS7200007910 A CS 7200007910A CS 791072 A CS791072 A CS 791072A CS 179487 B1 CS179487 B1 CS 179487B1
Authority
CS
Czechoslovakia
Prior art keywords
catode
measuring device
temperature measuring
deposited layers
sputtering equipment
Prior art date
Application number
CS7200007910A
Other languages
Czech (cs)
English (en)
Inventor
Ulf Weber
Original Assignee
Ulf Weber
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulf Weber filed Critical Ulf Weber
Publication of CS179487B1 publication Critical patent/CS179487B1/cs

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0815—Light concentrators, collectors or condensers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0818—Waveguides

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Physical Vapour Deposition (AREA)
CS7200007910A 1971-11-22 1972-11-21 Catode sputtering equipment with thin deposited layers temperature measuring device CS179487B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD159068A DD95127A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1971-11-22 1971-11-22

Publications (1)

Publication Number Publication Date
CS179487B1 true CS179487B1 (en) 1977-11-30

Family

ID=5484644

Family Applications (1)

Application Number Title Priority Date Filing Date
CS7200007910A CS179487B1 (en) 1971-11-22 1972-11-21 Catode sputtering equipment with thin deposited layers temperature measuring device

Country Status (5)

Country Link
CH (1) CH556021A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CS (1) CS179487B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DD (1) DD95127A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2231405A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2160812A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3051038A (en) * 1958-10-21 1962-08-28 Honeywell Regulator Co Temperature measuring apparatus
US3432416A (en) * 1966-10-03 1969-03-11 Gen Electric High purity niobium films formed by glow discharge cathode sputtering

Also Published As

Publication number Publication date
DE2231405A1 (de) 1973-05-30
DD95127A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-01-12
FR2160812B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-01-03
FR2160812A1 (en) 1973-07-06
CH556021A (de) 1974-11-15

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