FR2160812A1 - Thin substrate thermometry - for cathodic sputtering plant by radiation pyrometry of reverse side of substrate - Google Patents

Thin substrate thermometry - for cathodic sputtering plant by radiation pyrometry of reverse side of substrate

Info

Publication number
FR2160812A1
FR2160812A1 FR7234433A FR7234433A FR2160812A1 FR 2160812 A1 FR2160812 A1 FR 2160812A1 FR 7234433 A FR7234433 A FR 7234433A FR 7234433 A FR7234433 A FR 7234433A FR 2160812 A1 FR2160812 A1 FR 2160812A1
Authority
FR
France
Prior art keywords
substrate
thermometry
reverse side
cathodic sputtering
radiation pyrometry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7234433A
Other languages
French (fr)
Other versions
FR2160812B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektromat VEB
Original Assignee
Elektromat VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat VEB filed Critical Elektromat VEB
Publication of FR2160812A1 publication Critical patent/FR2160812A1/en
Application granted granted Critical
Publication of FR2160812B1 publication Critical patent/FR2160812B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0815—Light concentrators, collectors or condensers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0818—Waveguides

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Vapour Deposition (AREA)
  • Measurement Of Radiation (AREA)

Abstract

The substrate holder has a hole within which a short length of light guide is fitted with its inner end close to the rear face of the substrate i.e. on the opposite side to the cathode and target unit. The outer end of the light guide lies on or close to the input window of a conventional radiation pyrometry detector.
FR7234433A 1971-11-22 1972-09-28 Thin substrate thermometry - for cathodic sputtering plant by radiation pyrometry of reverse side of substrate Granted FR2160812A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD159068A DD95127A1 (en) 1971-11-22 1971-11-22

Publications (2)

Publication Number Publication Date
FR2160812A1 true FR2160812A1 (en) 1973-07-06
FR2160812B1 FR2160812B1 (en) 1975-01-03

Family

ID=5484644

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7234433A Granted FR2160812A1 (en) 1971-11-22 1972-09-28 Thin substrate thermometry - for cathodic sputtering plant by radiation pyrometry of reverse side of substrate

Country Status (5)

Country Link
CH (1) CH556021A (en)
CS (1) CS179487B1 (en)
DD (1) DD95127A1 (en)
DE (1) DE2231405A1 (en)
FR (1) FR2160812A1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3051038A (en) * 1958-10-21 1962-08-28 Honeywell Regulator Co Temperature measuring apparatus
US3432416A (en) * 1966-10-03 1969-03-11 Gen Electric High purity niobium films formed by glow discharge cathode sputtering

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3051038A (en) * 1958-10-21 1962-08-28 Honeywell Regulator Co Temperature measuring apparatus
US3432416A (en) * 1966-10-03 1969-03-11 Gen Electric High purity niobium films formed by glow discharge cathode sputtering

Also Published As

Publication number Publication date
FR2160812B1 (en) 1975-01-03
CS179487B1 (en) 1977-11-30
DE2231405A1 (en) 1973-05-30
DD95127A1 (en) 1973-01-12
CH556021A (en) 1974-11-15

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Legal Events

Date Code Title Description
ST Notification of lapse