FR2153247A1 - - Google Patents

Info

Publication number
FR2153247A1
FR2153247A1 FR7231094A FR7231094A FR2153247A1 FR 2153247 A1 FR2153247 A1 FR 2153247A1 FR 7231094 A FR7231094 A FR 7231094A FR 7231094 A FR7231094 A FR 7231094A FR 2153247 A1 FR2153247 A1 FR 2153247A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7231094A
Other languages
French (fr)
Other versions
FR2153247B3 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arthur D Little Inc
Original Assignee
Arthur D Little Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arthur D Little Inc filed Critical Arthur D Little Inc
Publication of FR2153247A1 publication Critical patent/FR2153247A1/fr
Application granted granted Critical
Publication of FR2153247B3 publication Critical patent/FR2153247B3/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
FR7231094A 1971-09-23 1972-09-01 Expired FR2153247B3 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US183169A US3865554A (en) 1971-09-23 1971-09-23 Pressure-and temperature-controlled apparatus for large-scale production of crystals by the czochralski technique

Publications (2)

Publication Number Publication Date
FR2153247A1 true FR2153247A1 (enrdf_load_stackoverflow) 1973-05-04
FR2153247B3 FR2153247B3 (enrdf_load_stackoverflow) 1976-07-23

Family

ID=22671728

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7231094A Expired FR2153247B3 (enrdf_load_stackoverflow) 1971-09-23 1972-09-01

Country Status (5)

Country Link
US (1) US3865554A (enrdf_load_stackoverflow)
JP (1) JPS4839377A (enrdf_load_stackoverflow)
DE (1) DE2240788A1 (enrdf_load_stackoverflow)
FR (1) FR2153247B3 (enrdf_load_stackoverflow)
GB (1) GB1392749A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2484468A1 (fr) * 1980-06-14 1981-12-18 Leybold Heraeus Gmbh & Co Kg Dispositif de tirage d'un monocristal hors du creuset, permettant une variation de vitesse sans a-coups sur une tres large plage de vitesse
FR2522694A1 (fr) * 1982-03-05 1983-09-09 Inst Monokristallov Installation pour l'elaboration d'un monocristal par tirage a partir d'un bain de fusion et procede de dechargement dudit monocristal de ladite installation
EP0233950A4 (de) * 1985-08-09 1988-11-23 Inst Fiz Tverdogo Tela Akademi Anordnung zur zucht von monokristallen feuerfester metalloxyde aus der schmelze.

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2349736A1 (de) * 1973-10-03 1975-04-24 Siemens Ag Ueberwachungseinrichtung fuer eine vorrichtung zum ziehen von kristallen aus der schmelze
US4049384A (en) * 1975-04-14 1977-09-20 Arthur D. Little, Inc. Cold crucible system
US4080172A (en) * 1975-12-29 1978-03-21 Monsanto Company Zone refiner automatic control
DE2759050C3 (de) * 1977-12-30 1982-05-06 Vsesojuznyj naučno-issledovatel'skij institut monokristallov, Charkov Vorrichtung zum Ziehen von Einkristallen aus der Schmelze
US4190630A (en) * 1978-01-03 1980-02-26 Vsesojuzny Nauchno-Isslekovatelsky Institut Monokristallov Stsintillyatsionnykh Materialov I Osobo Chistykh Khimicheskikh Veschestv Apparatus for pulling single crystals from melt
US4235848A (en) * 1978-06-15 1980-11-25 Apilat Vitaly Y Apparatus for pulling single crystal from melt on a seed
US4277441A (en) 1979-01-15 1981-07-07 Mobil Tyco Solar Energy Corporation Apparatus for monitoring crystal growth
CA1169336A (en) * 1980-01-07 1984-06-19 Emanuel M. Sachs String stabilized ribbon growth method and apparatus
DE3116916C2 (de) * 1980-06-14 1984-08-23 Leybold-Heraeus GmbH, 5000 Köln Vorrichtung zum Ziehen eines Einkristalls aus einem Tiegel mittels eines aufwickelbaren Zugorgans
WO1982004074A1 (en) * 1981-05-19 1982-11-25 Helgeland Walter Apparatus for and method of handling crystals from crystal-growing furnaces
US4485072A (en) * 1982-02-24 1984-11-27 Apilat Vitaly Y Apparatus and method of growing and discharging single crystals
US4931624A (en) * 1987-07-10 1990-06-05 Mellen Sr Robert H Thermal distortion free viewing of a heated cavity
US5900060A (en) * 1996-07-03 1999-05-04 Cermet, Inc. Pressurized skull crucible apparatus for crystal growth and related system and methods
US5863326A (en) * 1996-07-03 1999-01-26 Cermet, Inc. Pressurized skull crucible for crystal growth using the Czochralski technique
US5885347A (en) * 1997-01-29 1999-03-23 Komatsu, Ltd. Apparatus and method for lifting single crystals
US6602345B1 (en) 1999-06-29 2003-08-05 American Crystal Technologies, Inc., Heater arrangement for crystal growth furnace
US6537372B1 (en) * 1999-06-29 2003-03-25 American Crystal Technologies, Inc. Heater arrangement for crystal growth furnace
US7001457B2 (en) * 2001-05-01 2006-02-21 Ricoh Company, Ltd. Crystal growth method, crystal growth apparatus, group-III nitride crystal and group-III nitride semiconductor device
TW200936824A (en) * 2008-02-27 2009-09-01 Green Energy Technology Inc Crystal-growing furnace with emergency decompression arrangement
RU2404297C1 (ru) * 2009-02-24 2010-11-20 Валерий Юрьевич Буряк Установка для выращивания монокристаллов, например, сапфиров
FR3055563B1 (fr) * 2016-09-08 2018-09-14 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de tri de plaquettes en silicium en fonction de leur duree de vie volumique
US12398955B2 (en) * 2021-09-29 2025-08-26 The Florida State University Research Foundation, Inc. High pressure furnace and methods of use
CN115044961B (zh) * 2022-06-09 2024-02-02 福建晶翔光电科技有限公司 一种氟化钡光学晶体制备装置及其制备方法
CN115896922B (zh) * 2023-02-16 2023-05-16 杭州天桴光电技术有限公司 一种大尺寸氟化钙单晶生长与在位退火的装置
CN117867641B (zh) * 2023-12-28 2024-08-02 蒙城繁枫真空科技有限公司 一种晶体生长设备晶杆快速调整垂直度的设计和方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3002320A (en) * 1951-11-16 1961-10-03 Bell Telephone Labor Inc Preparation of silicon material
US3372003A (en) * 1963-07-19 1968-03-05 Shin Nippon Chisso Hiryo Kabus Apparatus and method for producing silicon single crystals for semiconductor
US3353914A (en) * 1964-12-30 1967-11-21 Martin Marietta Corp Method of seed-pulling beta silicon carbide crystals from a melt containing silver and the product thereof
US3337303A (en) * 1965-03-01 1967-08-22 Elmat Corp Crystal growing apparatus
US3493770A (en) * 1966-03-01 1970-02-03 Ibm Radiation sensitive control system for crystal growing apparatus
DE1544292C3 (de) * 1966-06-13 1976-01-08 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen stabförmiger Siliciumeinkristalle mit über die gesamte Stablänge homogener Antimondotierung
US3552931A (en) * 1967-07-14 1971-01-05 Little Inc A Apparatus for imparting translational and rotational motion
US3650701A (en) * 1970-07-22 1972-03-21 Commissariat Energie Atomique Apparatus for growing crystalline bodies

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2484468A1 (fr) * 1980-06-14 1981-12-18 Leybold Heraeus Gmbh & Co Kg Dispositif de tirage d'un monocristal hors du creuset, permettant une variation de vitesse sans a-coups sur une tres large plage de vitesse
FR2522694A1 (fr) * 1982-03-05 1983-09-09 Inst Monokristallov Installation pour l'elaboration d'un monocristal par tirage a partir d'un bain de fusion et procede de dechargement dudit monocristal de ladite installation
EP0233950A4 (de) * 1985-08-09 1988-11-23 Inst Fiz Tverdogo Tela Akademi Anordnung zur zucht von monokristallen feuerfester metalloxyde aus der schmelze.

Also Published As

Publication number Publication date
JPS4839377A (enrdf_load_stackoverflow) 1973-06-09
GB1392749A (en) 1975-04-30
DE2240788A1 (de) 1973-03-29
FR2153247B3 (enrdf_load_stackoverflow) 1976-07-23
US3865554A (en) 1975-02-11

Similar Documents

Publication Publication Date Title
FR2153247A1 (enrdf_load_stackoverflow)
AU2658571A (enrdf_load_stackoverflow)
AU2691671A (enrdf_load_stackoverflow)
AU3005371A (enrdf_load_stackoverflow)
AU2564071A (enrdf_load_stackoverflow)
AU2684071A (enrdf_load_stackoverflow)
AU2726271A (enrdf_load_stackoverflow)
AU2742671A (enrdf_load_stackoverflow)
AU2894671A (enrdf_load_stackoverflow)
AU2952271A (enrdf_load_stackoverflow)
AU2941471A (enrdf_load_stackoverflow)
AU2930871A (enrdf_load_stackoverflow)
AU2854371A (enrdf_load_stackoverflow)
AU2503871A (enrdf_load_stackoverflow)
AU2577671A (enrdf_load_stackoverflow)
AU2588771A (enrdf_load_stackoverflow)
AU3038671A (enrdf_load_stackoverflow)
AU3025871A (enrdf_load_stackoverflow)
AU2654071A (enrdf_load_stackoverflow)
AU2963771A (enrdf_load_stackoverflow)
AU2415871A (enrdf_load_stackoverflow)
AU2940971A (enrdf_load_stackoverflow)
AU2938071A (enrdf_load_stackoverflow)
AU2669471A (enrdf_load_stackoverflow)
AU2927871A (enrdf_load_stackoverflow)

Legal Events

Date Code Title Description
ST Notification of lapse