FR2098563A5 - - Google Patents

Info

Publication number
FR2098563A5
FR2098563A5 FR7026730A FR7026730A FR2098563A5 FR 2098563 A5 FR2098563 A5 FR 2098563A5 FR 7026730 A FR7026730 A FR 7026730A FR 7026730 A FR7026730 A FR 7026730A FR 2098563 A5 FR2098563 A5 FR 2098563A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7026730A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Progil SARL
Original Assignee
Progil SARL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Progil SARL filed Critical Progil SARL
Priority to FR7026730A priority Critical patent/FR2098563A5/fr
Priority to SE07187/71A priority patent/SE366778B/xx
Priority to SU1659441A priority patent/SU405215A3/ru
Priority to US00153217A priority patent/US3779885A/en
Priority to CH998071A priority patent/CH538551A/fr
Priority to GB3214771A priority patent/GB1333617A/en
Priority to BE769722A priority patent/BE769722A/xx
Priority to NL7109534A priority patent/NL7109534A/xx
Priority to DE2134377A priority patent/DE2134377C3/de
Priority to CA117,900A priority patent/CA994708A/fr
Priority to AT601371A priority patent/AT304220B/de
Priority to ES393087A priority patent/ES393087A1/es
Priority to CA131,340A priority patent/CA981622A/en
Application granted granted Critical
Publication of FR2098563A5 publication Critical patent/FR2098563A5/fr
Priority to JP1975075200U priority patent/JPS5520747Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/88—Processes of manufacture
    • H01M4/8825—Methods for deposition of the catalytic active composition
    • H01M4/8867—Vapour deposition
    • H01M4/8871—Sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
FR7026730A 1970-07-10 1970-07-10 Expired FR2098563A5 (sv)

Priority Applications (14)

Application Number Priority Date Filing Date Title
FR7026730A FR2098563A5 (sv) 1970-07-10 1970-07-10
SE07187/71A SE366778B (sv) 1970-07-10 1971-06-03
SU1659441A SU405215A3 (sv) 1970-07-10 1971-06-04
US00153217A US3779885A (en) 1970-07-10 1971-06-15 Apparatus and method for cathode sputtering on the two sides of a metallic support having large dimensions
CH998071A CH538551A (fr) 1970-07-10 1971-07-07 Appareil pour le dépôt de couches minces par pulvérisation cathodique sur un support conducteur
BE769722A BE769722A (fr) 1970-07-10 1971-07-08 Nouvel appareil pour pulverisation cathodique sur les deux faces d'un support metallique de grandes dimensions
GB3214771A GB1333617A (en) 1970-07-10 1971-07-08 Cathode sputtering apparatus
NL7109534A NL7109534A (sv) 1970-07-10 1971-07-09
DE2134377A DE2134377C3 (de) 1970-07-10 1971-07-09 Verfahren zum Abscheiden dünner Schichten auf metallische Werkstücke mittels Kathodenzerstäubung
CA117,900A CA994708A (fr) 1970-07-10 1971-07-09 Appareil pour pulverisation cathodique sur les deux faces d'un support metallique de grande dimensions
AT601371A AT304220B (de) 1970-07-10 1971-07-09 Vorrichtung zur Ablagerung dünner Schichten durch Kathodenzerstäubung auf beiden Seiten eines oder mehrerer Metallträger
ES393087A ES393087A1 (es) 1970-07-10 1971-07-09 Perfeccionamientos en un aparato para la pulverizacion ca- todica.
CA131,340A CA981622A (en) 1970-07-10 1971-12-29 Cellule d'electrolyse
JP1975075200U JPS5520747Y2 (sv) 1970-07-10 1975-06-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7026730A FR2098563A5 (sv) 1970-07-10 1970-07-10

Publications (1)

Publication Number Publication Date
FR2098563A5 true FR2098563A5 (sv) 1972-03-10

Family

ID=9058937

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7026730A Expired FR2098563A5 (sv) 1970-07-10 1970-07-10

Country Status (13)

Country Link
US (1) US3779885A (sv)
JP (1) JPS5520747Y2 (sv)
AT (1) AT304220B (sv)
BE (1) BE769722A (sv)
CA (2) CA994708A (sv)
CH (1) CH538551A (sv)
DE (1) DE2134377C3 (sv)
ES (1) ES393087A1 (sv)
FR (1) FR2098563A5 (sv)
GB (1) GB1333617A (sv)
NL (1) NL7109534A (sv)
SE (1) SE366778B (sv)
SU (1) SU405215A3 (sv)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2461023A1 (fr) * 1979-07-02 1981-01-30 Olin Corp Procede de preparation de substrats conducteurs et d'electrodes pour l'electrolyse d'une saumure, et l'electrode a faible surtension ainsi obtenue

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3107914A1 (de) * 1981-03-02 1982-09-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zum beschichten von formteilen durch katodenzerstaeubung
US4451344A (en) * 1982-03-26 1984-05-29 International Business Machines Corp. Method of making edge protected ferrite core
US4812217A (en) * 1987-04-27 1989-03-14 American Telephone And Telegraph Company, At&T Bell Laboratories Method and apparatus for feeding and coating articles in a controlled atmosphere
US5279724A (en) * 1991-12-26 1994-01-18 Xerox Corporation Dual sputtering source
US5322606A (en) * 1991-12-26 1994-06-21 Xerox Corporation Use of rotary solenoid as a shutter actuator on a rotating arm
CA2137471A1 (en) 1992-06-26 1994-01-06 Tugrul Yasar Transport system for wafer processing line
KR20230008774A (ko) * 2020-06-23 2023-01-16 미쿠니 일렉트론 코포레이션 유도결합플라즈마에 의해 스퍼터링 성막을 수행하는 성막장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1758531A (en) * 1926-10-22 1930-05-13 Elektrodenzerstaubung M B H Ge Vacuum dispersion coating process
US3294670A (en) * 1963-10-07 1966-12-27 Western Electric Co Apparatus for processing materials in a controlled atmosphere
LU45647A1 (sv) * 1964-03-12 1965-09-13
LU52106A1 (sv) * 1966-10-05 1968-05-07
US3594301A (en) * 1968-11-22 1971-07-20 Gen Electric Sputter coating apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2461023A1 (fr) * 1979-07-02 1981-01-30 Olin Corp Procede de preparation de substrats conducteurs et d'electrodes pour l'electrolyse d'une saumure, et l'electrode a faible surtension ainsi obtenue

Also Published As

Publication number Publication date
DE2134377B2 (de) 1974-04-25
ES393087A1 (es) 1973-10-01
DE2134377A1 (de) 1972-01-13
DE2134377C3 (de) 1974-11-28
JPS5149723U (sv) 1976-04-15
SE366778B (sv) 1974-05-06
GB1333617A (en) 1973-10-10
AT304220B (de) 1972-12-27
CA981622A (en) 1976-01-13
CH538551A (fr) 1973-06-30
US3779885A (en) 1973-12-18
CA994708A (fr) 1976-08-10
SU405215A3 (sv) 1973-10-22
BE769722A (fr) 1971-11-16
JPS5520747Y2 (sv) 1980-05-19
NL7109534A (sv) 1972-01-12

Similar Documents

Publication Publication Date Title
AR204384A1 (sv)
SU405215A3 (sv)
ATA96471A (sv)
AU1146470A (sv)
AU2044470A (sv)
AU1473870A (sv)
AU1326870A (sv)
AU2130570A (sv)
AU1336970A (sv)
AU2017870A (sv)
AU1833270A (sv)
AU1716970A (sv)
AU1517670A (sv)
AU1591370A (sv)
AU1872870A (sv)
AU2144270A (sv)
AU1328670A (sv)
AU1277070A (sv)
AU1343870A (sv)
AU1247570A (sv)
AU2131570A (sv)
AU2130770A (sv)
AU1235770A (sv)
AU1581370A (sv)
AU1189670A (sv)

Legal Events

Date Code Title Description
ST Notification of lapse