FR2056965A1 - Forming si oxide regions on si semiconductor - substrate - Google Patents
Forming si oxide regions on si semiconductor - substrateInfo
- Publication number
- FR2056965A1 FR2056965A1 FR7028328A FR7028328A FR2056965A1 FR 2056965 A1 FR2056965 A1 FR 2056965A1 FR 7028328 A FR7028328 A FR 7028328A FR 7028328 A FR7028328 A FR 7028328A FR 2056965 A1 FR2056965 A1 FR 2056965A1
- Authority
- FR
- France
- Prior art keywords
- semiconductor
- substrate
- forming
- oxide regions
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 230000000873 masking effect Effects 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/32—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers using masks
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Local Oxidation Of Silicon (AREA)
- Formation Of Insulating Films (AREA)
- Element Separation (AREA)
- Weting (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US84701269A | 1969-08-04 | 1969-08-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2056965A1 true FR2056965A1 (en) | 1971-05-07 |
| FR2056965B1 FR2056965B1 (xx) | 1974-10-11 |
Family
ID=25299548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7028328A Granted FR2056965A1 (en) | 1969-08-04 | 1970-07-31 | Forming si oxide regions on si semiconductor - substrate |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JPS504511B1 (xx) |
| BE (1) | BE753245A (xx) |
| DE (1) | DE2038361A1 (xx) |
| ES (1) | ES382248A1 (xx) |
| FR (1) | FR2056965A1 (xx) |
| NL (1) | NL7011437A (xx) |
| SE (1) | SE371539B (xx) |
| ZA (1) | ZA705326B (xx) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL6704958A (xx) * | 1966-04-08 | 1967-10-09 | ||
| NL6614016A (xx) * | 1966-10-05 | 1968-04-08 |
-
1970
- 1970-07-09 BE BE753245D patent/BE753245A/xx unknown
- 1970-07-23 SE SE7010177A patent/SE371539B/xx unknown
- 1970-07-28 ES ES382248A patent/ES382248A1/es not_active Expired
- 1970-07-31 ZA ZA705326*A patent/ZA705326B/xx unknown
- 1970-07-31 FR FR7028328A patent/FR2056965A1/fr active Granted
- 1970-08-01 DE DE19702038361 patent/DE2038361A1/de active Pending
- 1970-08-03 JP JP45067961A patent/JPS504511B1/ja active Pending
- 1970-08-03 NL NL7011437A patent/NL7011437A/xx unknown
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL6704958A (xx) * | 1966-04-08 | 1967-10-09 | ||
| NL6614016A (xx) * | 1966-10-05 | 1968-04-08 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2038361A1 (de) | 1971-02-18 |
| FR2056965B1 (xx) | 1974-10-11 |
| ES382248A1 (es) | 1972-11-16 |
| JPS504511B1 (xx) | 1975-02-20 |
| BE753245A (fr) | 1970-12-16 |
| SE371539B (xx) | 1974-11-18 |
| NL7011437A (xx) | 1971-02-08 |
| ZA705326B (en) | 1971-04-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |