FR2027429B1 - - Google Patents
Info
- Publication number
- FR2027429B1 FR2027429B1 FR696944145A FR6944145A FR2027429B1 FR 2027429 B1 FR2027429 B1 FR 2027429B1 FR 696944145 A FR696944145 A FR 696944145A FR 6944145 A FR6944145 A FR 6944145A FR 2027429 B1 FR2027429 B1 FR 2027429B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/69—Etching of wafers, substrates or parts of devices using masks for semiconductor materials
- H10P50/691—Etching of wafers, substrates or parts of devices using masks for semiconductor materials for Group V materials or Group III-V materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/60—Wet etching
- H10P50/64—Wet etching of semiconductor materials
- H10P50/642—Chemical etching
- H10P50/644—Anisotropic liquid etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US78817768A | 1968-12-31 | 1968-12-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2027429A1 FR2027429A1 (https=) | 1970-09-25 |
| FR2027429B1 true FR2027429B1 (https=) | 1973-08-10 |
Family
ID=25143680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR696944145A Expired FR2027429B1 (https=) | 1968-12-31 | 1969-12-19 |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE1965408C3 (https=) |
| FR (1) | FR2027429B1 (https=) |
| GB (1) | GB1288278A (https=) |
| NL (1) | NL6918388A (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3579057A (en) * | 1969-08-18 | 1971-05-18 | Rca Corp | Method of making a semiconductor article and the article produced thereby |
| GB1439351A (en) * | 1972-06-02 | 1976-06-16 | Texas Instruments Inc | Capacitor |
| US4238275A (en) * | 1978-12-29 | 1980-12-09 | International Business Machines Corporation | Pyrocatechol-amine-water solution for the determination of defects |
| US4253280A (en) | 1979-03-26 | 1981-03-03 | Western Electric Company, Inc. | Method of labelling directional characteristics of an article having two opposite major surfaces |
| US4235014A (en) | 1979-03-26 | 1980-11-25 | Western Electric Company, Inc. | Apparatus for assembling a plurality of articles |
| JPH067594B2 (ja) * | 1987-11-20 | 1994-01-26 | 富士通株式会社 | 半導体基板の製造方法 |
| JPH0775244B2 (ja) * | 1990-11-16 | 1995-08-09 | 信越半導体株式会社 | 誘電体分離基板及びその製造方法 |
| JPH0775245B2 (ja) * | 1990-11-16 | 1995-08-09 | 信越半導体株式会社 | 誘電体分離基板及びその製造方法 |
| RU2220449C1 (ru) | 2002-12-19 | 2003-12-27 | Акционерное общество закрытого типа "ЛИТЭКС" | Способ маркирования изделий с помощью набора меток и метка для маркирования |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3425879A (en) * | 1965-10-24 | 1969-02-04 | Texas Instruments Inc | Method of making shaped epitaxial deposits |
| NL144778B (nl) * | 1966-12-20 | 1975-01-15 | Western Electric Co | Werkwijze voor het vervaardigen van een halfgeleiderinrichting door anisotroop etsen alsmede aldus vervaardigde inrichting. |
-
1969
- 1969-11-20 GB GB5686169A patent/GB1288278A/en not_active Expired
- 1969-12-08 NL NL6918388A patent/NL6918388A/xx unknown
- 1969-12-19 FR FR696944145A patent/FR2027429B1/fr not_active Expired
- 1969-12-30 DE DE1965408A patent/DE1965408C3/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1965408A1 (de) | 1970-07-16 |
| DE1965408C3 (de) | 1979-01-25 |
| FR2027429A1 (https=) | 1970-09-25 |
| GB1288278A (https=) | 1972-09-06 |
| NL6918388A (https=) | 1970-07-02 |
| DE1965408B2 (de) | 1978-02-16 |