FR2027429A1 - - Google Patents
Info
- Publication number
- FR2027429A1 FR2027429A1 FR6944145A FR6944145A FR2027429A1 FR 2027429 A1 FR2027429 A1 FR 2027429A1 FR 6944145 A FR6944145 A FR 6944145A FR 6944145 A FR6944145 A FR 6944145A FR 2027429 A1 FR2027429 A1 FR 2027429A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/69—Etching of wafers, substrates or parts of devices using masks for semiconductor materials
- H10P50/691—Etching of wafers, substrates or parts of devices using masks for semiconductor materials for Group V materials or Group III-V materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/60—Wet etching
- H10P50/64—Wet etching of semiconductor materials
- H10P50/642—Chemical etching
- H10P50/644—Anisotropic liquid etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US78817768A | 1968-12-31 | 1968-12-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2027429A1 true FR2027429A1 (https=) | 1970-09-25 |
| FR2027429B1 FR2027429B1 (https=) | 1973-08-10 |
Family
ID=25143680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR696944145A Expired FR2027429B1 (https=) | 1968-12-31 | 1969-12-19 |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE1965408C3 (https=) |
| FR (1) | FR2027429B1 (https=) |
| GB (1) | GB1288278A (https=) |
| NL (1) | NL6918388A (https=) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0317445A3 (en) * | 1987-11-20 | 1990-01-10 | Fujitsu Limited | Method for fabricating a silicon carbide substrate |
| EP0485719A3 (en) * | 1990-11-16 | 1995-12-27 | Shinetsu Handotai Kk | Dielectrically isolated substrate and a process for producing the same |
| EP0485720A3 (en) * | 1990-11-16 | 1995-12-27 | Shinetsu Handotai Kk | Dielectrically isolated substrate and a process for producing the same |
| LT5166B (lt) | 2002-12-19 | 2004-10-25 | Akcionernoje obščestvo zakrytogo tipa "LITEKS" | Gaminių žymėjimo būdas ženklų rinkiniu ir žymėjimo ženklas |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3579057A (en) * | 1969-08-18 | 1971-05-18 | Rca Corp | Method of making a semiconductor article and the article produced thereby |
| GB1439351A (en) * | 1972-06-02 | 1976-06-16 | Texas Instruments Inc | Capacitor |
| US4238275A (en) * | 1978-12-29 | 1980-12-09 | International Business Machines Corporation | Pyrocatechol-amine-water solution for the determination of defects |
| US4253280A (en) | 1979-03-26 | 1981-03-03 | Western Electric Company, Inc. | Method of labelling directional characteristics of an article having two opposite major surfaces |
| US4235014A (en) | 1979-03-26 | 1980-11-25 | Western Electric Company, Inc. | Apparatus for assembling a plurality of articles |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1498752A (fr) * | 1965-10-24 | 1967-10-20 | Texas Instruments Inc | Procédé de fabrication de dépôts épitaxiaux |
| FR1548079A (https=) * | 1966-12-20 | 1968-11-29 |
-
1969
- 1969-11-20 GB GB5686169A patent/GB1288278A/en not_active Expired
- 1969-12-08 NL NL6918388A patent/NL6918388A/xx unknown
- 1969-12-19 FR FR696944145A patent/FR2027429B1/fr not_active Expired
- 1969-12-30 DE DE1965408A patent/DE1965408C3/de not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1498752A (fr) * | 1965-10-24 | 1967-10-20 | Texas Instruments Inc | Procédé de fabrication de dépôts épitaxiaux |
| FR1548079A (https=) * | 1966-12-20 | 1968-11-29 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0317445A3 (en) * | 1987-11-20 | 1990-01-10 | Fujitsu Limited | Method for fabricating a silicon carbide substrate |
| US4983538A (en) * | 1987-11-20 | 1991-01-08 | Fujitsu Limited | Method for fabricating a silicon carbide substrate |
| EP0485719A3 (en) * | 1990-11-16 | 1995-12-27 | Shinetsu Handotai Kk | Dielectrically isolated substrate and a process for producing the same |
| EP0485720A3 (en) * | 1990-11-16 | 1995-12-27 | Shinetsu Handotai Kk | Dielectrically isolated substrate and a process for producing the same |
| LT5166B (lt) | 2002-12-19 | 2004-10-25 | Akcionernoje obščestvo zakrytogo tipa "LITEKS" | Gaminių žymėjimo būdas ženklų rinkiniu ir žymėjimo ženklas |
Also Published As
| Publication number | Publication date |
|---|---|
| DE1965408A1 (de) | 1970-07-16 |
| DE1965408C3 (de) | 1979-01-25 |
| GB1288278A (https=) | 1972-09-06 |
| NL6918388A (https=) | 1970-07-02 |
| DE1965408B2 (de) | 1978-02-16 |
| FR2027429B1 (https=) | 1973-08-10 |