FR2006697A1 - Evaporation of a thin layer of uniform thickness onto - a non-planar surface - Google Patents

Evaporation of a thin layer of uniform thickness onto - a non-planar surface

Info

Publication number
FR2006697A1
FR2006697A1 FR6912564A FR6912564A FR2006697A1 FR 2006697 A1 FR2006697 A1 FR 2006697A1 FR 6912564 A FR6912564 A FR 6912564A FR 6912564 A FR6912564 A FR 6912564A FR 2006697 A1 FR2006697 A1 FR 2006697A1
Authority
FR
France
Prior art keywords
evaporation
thin layer
planar surface
uniform thickness
thickness onto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR6912564A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of FR2006697A1 publication Critical patent/FR2006697A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

Surface and source of coating material are placed in non-reactive atmosphere and source is heated to evaporation temp. Pressure is maintained at Torr value = 1/5 (0.01.-0.50) (where s " the distance in cm. between source and surface). Uniform layer is obtained without using a number of sources, which process is only suitable for thicker layers.
FR6912564A 1968-04-22 1969-04-22 Evaporation of a thin layer of uniform thickness onto - a non-planar surface Withdrawn FR2006697A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US72327068A 1968-04-22 1968-04-22

Publications (1)

Publication Number Publication Date
FR2006697A1 true FR2006697A1 (en) 1970-01-02

Family

ID=24905554

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6912564A Withdrawn FR2006697A1 (en) 1968-04-22 1969-04-22 Evaporation of a thin layer of uniform thickness onto - a non-planar surface

Country Status (4)

Country Link
JP (1) JPS4919518B1 (en)
DE (1) DE1920148A1 (en)
FR (1) FR2006697A1 (en)
NL (1) NL6906041A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8334369D0 (en) * 1983-12-23 1984-02-01 Ion Tech Ltd Sputter deposition of alloys & c
DE9212121U1 (en) * 1992-09-09 1993-04-08 Lepel, Freifrau von, Barbara, 7101 Untergruppenbach Urinal with flush and additive

Also Published As

Publication number Publication date
NL6906041A (en) 1969-10-24
JPS4919518B1 (en) 1974-05-17
DE1920148A1 (en) 1969-11-20

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Legal Events

Date Code Title Description
ST Notification of lapse