GB8334369D0 - Sputter deposition of alloys & c - Google Patents

Sputter deposition of alloys & c

Info

Publication number
GB8334369D0
GB8334369D0 GB838334369A GB8334369A GB8334369D0 GB 8334369 D0 GB8334369 D0 GB 8334369D0 GB 838334369 A GB838334369 A GB 838334369A GB 8334369 A GB8334369 A GB 8334369A GB 8334369 D0 GB8334369 D0 GB 8334369D0
Authority
GB
United Kingdom
Prior art keywords
alloys
sputter deposition
sputter
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB838334369A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ion Tech Ltd
Original Assignee
Ion Tech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ion Tech Ltd filed Critical Ion Tech Ltd
Priority to GB838334369A priority Critical patent/GB8334369D0/en
Publication of GB8334369D0 publication Critical patent/GB8334369D0/en
Priority to PCT/GB1984/000452 priority patent/WO1985002866A1/en
Priority to EP19850900490 priority patent/EP0197936A1/en
Pending legal-status Critical Current

Links

GB838334369A 1983-12-23 1983-12-23 Sputter deposition of alloys & c Pending GB8334369D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB838334369A GB8334369D0 (en) 1983-12-23 1983-12-23 Sputter deposition of alloys & c
PCT/GB1984/000452 WO1985002866A1 (en) 1983-12-23 1984-12-27 Sputter deposition
EP19850900490 EP0197936A1 (en) 1983-12-23 1984-12-27 Sputter deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB838334369A GB8334369D0 (en) 1983-12-23 1983-12-23 Sputter deposition of alloys & c

Publications (1)

Publication Number Publication Date
GB8334369D0 true GB8334369D0 (en) 1984-02-01

Family

ID=10553776

Family Applications (1)

Application Number Title Priority Date Filing Date
GB838334369A Pending GB8334369D0 (en) 1983-12-23 1983-12-23 Sputter deposition of alloys & c

Country Status (3)

Country Link
EP (1) EP0197936A1 (en)
GB (1) GB8334369D0 (en)
WO (1) WO1985002866A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62158863A (en) * 1985-12-30 1987-07-14 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Film forming apparatus
GB2208390B (en) * 1987-08-06 1991-03-27 Plessey Co Plc Thin film deposition process

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE744768C (en) * 1938-07-17 1944-01-25 Fernseh Gmbh Process for the vapor deposition of metals on several photo and / or secondary emission electrodes to be treated differently located in the same vessel and arrangement for its implementation
FR1459893A (en) * 1964-08-22 1966-06-17 Balzers Hochvakuum Process for the production of thin films by deposition using spraying
NL6906041A (en) * 1968-04-22 1969-10-24
US3669871A (en) * 1969-09-10 1972-06-13 Ibm Sputtering apparatus having a concave source cathode
CH649578A5 (en) * 1981-03-27 1985-05-31 Ulvac Corp HIGH-SPEED CATHODE SPRAYING DEVICE.
JPS59123768A (en) * 1982-12-28 1984-07-17 Toyota Central Res & Dev Lab Inc Method and device for simultaneous multi-element sputtering

Also Published As

Publication number Publication date
EP0197936A1 (en) 1986-10-22
WO1985002866A1 (en) 1985-07-04

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