FR1600776A - - Google Patents

Info

Publication number
FR1600776A
FR1600776A FR1600776DA FR1600776A FR 1600776 A FR1600776 A FR 1600776A FR 1600776D A FR1600776D A FR 1600776DA FR 1600776 A FR1600776 A FR 1600776A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1600776A publication Critical patent/FR1600776A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6302—Non-deposition formation processes
    • H10P14/6304—Formation by oxidation, e.g. oxidation of the substrate
    • H10P14/6306—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials
    • H10P14/6308—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials of Group IV semiconductors
    • H10P14/6309—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials of Group IV semiconductors of silicon in uncombined form, i.e. pure silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6302—Non-deposition formation processes
    • H10P14/6322—Formation by thermal treatments
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
FR1600776D 1968-03-01 1968-12-30 Expired FR1600776A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH313068A CH476398A (de) 1968-03-01 1968-03-01 Verfahren zur Herstellung feiner geätzter Muster

Publications (1)

Publication Number Publication Date
FR1600776A true FR1600776A (de) 1970-07-27

Family

ID=4249256

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1600776D Expired FR1600776A (de) 1968-03-01 1968-12-30

Country Status (4)

Country Link
CH (1) CH476398A (de)
DE (1) DE1908901C3 (de)
FR (1) FR1600776A (de)
GB (1) GB1255039A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH506188A (de) * 1970-09-02 1971-04-15 Ibm Feldeffekt-Transistor
NL7412383A (nl) * 1974-09-19 1976-03-23 Philips Nv Werkwijze voor het vervaardigen van een in- richting met een geleiderpatroon.
DE2824026A1 (de) * 1978-06-01 1979-12-20 Licentia Gmbh Verfahren zum herstellen eines sperrschicht-feldeffekttransistors
GB2127751B (en) * 1982-10-06 1986-04-23 Plessey Co Plc Producing narrow features in electrical devices
DE3915650A1 (de) * 1989-05-12 1990-11-15 Siemens Ag Verfahren zur strukturierung einer auf einem halbleiterschichtaufbau angeordneten schicht

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL143070B (nl) * 1964-04-21 1974-08-15 Philips Nv Werkwijze voor het aanbrengen van naast elkaar gelegen, door een tussenruimte van elkaar gescheiden metaaldelen op een ondergrond en voorwerp, in het bijzonder halfgeleiderinrichting, vervaardigd met toepassing van deze werkwijze.

Also Published As

Publication number Publication date
DE1908901B2 (de) 1976-12-09
DE1908901A1 (de) 1969-09-25
GB1255039A (en) 1971-11-24
CH476398A (de) 1969-07-31
DE1908901C3 (de) 1981-09-24

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Legal Events

Date Code Title Description
ST Notification of lapse