FR1464357A - Perfectionnements aux pompes à vide électroniques - Google Patents

Perfectionnements aux pompes à vide électroniques

Info

Publication number
FR1464357A
FR1464357A FR45911A FR45911A FR1464357A FR 1464357 A FR1464357 A FR 1464357A FR 45911 A FR45911 A FR 45911A FR 45911 A FR45911 A FR 45911A FR 1464357 A FR1464357 A FR 1464357A
Authority
FR
France
Prior art keywords
vacuum pumps
electronic vacuum
electronic
pumps
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR45911A
Other languages
English (en)
Inventor
Lewis Dana Hall
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1464357A publication Critical patent/FR1464357A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
    • H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/186—Getter supports
FR45911A 1965-01-25 1966-01-14 Perfectionnements aux pompes à vide électroniques Expired FR1464357A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US427833A US3391303A (en) 1965-01-25 1965-01-25 Electronic vacuum pump including a sputter electrode

Publications (1)

Publication Number Publication Date
FR1464357A true FR1464357A (fr) 1966-12-30

Family

ID=23696479

Family Applications (1)

Application Number Title Priority Date Filing Date
FR45911A Expired FR1464357A (fr) 1965-01-25 1966-01-14 Perfectionnements aux pompes à vide électroniques

Country Status (4)

Country Link
US (1) US3391303A (fr)
DE (1) DE1539130A1 (fr)
FR (1) FR1464357A (fr)
GB (3) GB1134233A (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3591827A (en) * 1967-11-29 1971-07-06 Andar Iti Inc Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor
GB1386251A (en) * 1971-03-24 1975-03-05 British Oxygen Co Ltd Source of sublimable material
US4167370A (en) * 1976-11-01 1979-09-11 Massachusetts Institute Of Technology Method of an apparatus for self-sustaining high vacuum in a high voltage environment
US5646488A (en) * 1995-10-11 1997-07-08 Warburton; William K. Differential pumping stage with line of sight pumping mechanism
AU2003207957A1 (en) * 2002-01-14 2003-07-24 Varco Ltd. Arc vacuum pump
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US10629417B1 (en) * 2016-12-01 2020-04-21 ColdQuanta, Inc. Sputter ion pump with penning-trap current sensor
GB2576968B (en) * 2019-05-24 2021-12-08 Edwards Ltd A vacuum pumping system having multiple pumps

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2006081A (en) * 1934-03-02 1935-06-25 Hanovia Chemical & Mfg Co Electrode for vapor electric devices
US2477279A (en) * 1946-09-11 1949-07-26 Hanovia Chemical & Mfg Co Electrical discharge device
US2845567A (en) * 1954-02-04 1958-07-29 Itt Indirectly heated thermionic cathode
NL239135A (fr) * 1958-06-06
NL251846A (fr) * 1959-05-25
US3152752A (en) * 1962-04-30 1964-10-13 Gen Electric Apparatus and method of removing organic vapors from low pressure vacuum systems
US3176906A (en) * 1962-08-23 1965-04-06 Ca Nat Research Council Ion pump
US3235170A (en) * 1963-01-31 1966-02-15 Cons Vacuum Corp Getter supply
US3244990A (en) * 1963-02-26 1966-04-05 Wisconsin Alumni Res Found Electron vacuum tube employing orbiting electrons

Also Published As

Publication number Publication date
GB1134233A (en) 1968-11-20
GB1134232A (en) 1968-11-20
GB1134231A (en) 1968-11-20
DE1539130A1 (de) 1970-11-12
US3391303A (en) 1968-07-02

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