FI982824A - Balansoitu suodatinrakenne - Google Patents

Balansoitu suodatinrakenne Download PDF

Info

Publication number
FI982824A
FI982824A FI982824A FI982824A FI982824A FI 982824 A FI982824 A FI 982824A FI 982824 A FI982824 A FI 982824A FI 982824 A FI982824 A FI 982824A FI 982824 A FI982824 A FI 982824A
Authority
FI
Finland
Prior art keywords
filter structure
balanced filter
balanced
filter
Prior art date
Application number
FI982824A
Other languages
English (en)
Swedish (sv)
Other versions
FI982824A0 (fi
FI113211B (fi
Inventor
Juha Ellae
Original Assignee
Nokia Mobile Phones Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nokia Mobile Phones Ltd filed Critical Nokia Mobile Phones Ltd
Priority to FI982824A priority Critical patent/FI113211B/fi
Publication of FI982824A0 publication Critical patent/FI982824A0/fi
Priority to EP99310298A priority patent/EP1017170A3/en
Priority to EP10181555A priority patent/EP2299594A1/en
Priority to US09/473,395 priority patent/US6278342B1/en
Priority to JP11375291A priority patent/JP2000232334A/ja
Priority to CNB991275144A priority patent/CN1160853C/zh
Publication of FI982824A publication Critical patent/FI982824A/fi
Application granted granted Critical
Publication of FI113211B publication Critical patent/FI113211B/fi
Priority to JP2011004509A priority patent/JP2011072047A/ja

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/54Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/56Monolithic crystal filters
    • H03H9/566Electric coupling means therefor
    • H03H9/568Electric coupling means therefor consisting of a ladder configuration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Circuits Of Receivers In General (AREA)
FI982824A 1998-12-30 1998-12-30 Balansoitu suodatinrakenne ja matkaviestinlaite FI113211B (fi)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FI982824A FI113211B (fi) 1998-12-30 1998-12-30 Balansoitu suodatinrakenne ja matkaviestinlaite
EP99310298A EP1017170A3 (en) 1998-12-30 1999-12-21 A balanced filter structure
EP10181555A EP2299594A1 (en) 1998-12-30 1999-12-21 A balanced filter structure
US09/473,395 US6278342B1 (en) 1998-12-30 1999-12-28 Balanced filter structure utilizing bulk acoustic wave resonators having different areas
JP11375291A JP2000232334A (ja) 1998-12-30 1999-12-28 フィルタ構造
CNB991275144A CN1160853C (zh) 1998-12-30 1999-12-30 平衡滤波器结构
JP2011004509A JP2011072047A (ja) 1998-12-30 2011-01-13 フィルタ構造

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI982824 1998-12-30
FI982824A FI113211B (fi) 1998-12-30 1998-12-30 Balansoitu suodatinrakenne ja matkaviestinlaite

Publications (3)

Publication Number Publication Date
FI982824A0 FI982824A0 (fi) 1998-12-30
FI982824A true FI982824A (fi) 2000-07-01
FI113211B FI113211B (fi) 2004-03-15

Family

ID=8553216

Family Applications (1)

Application Number Title Priority Date Filing Date
FI982824A FI113211B (fi) 1998-12-30 1998-12-30 Balansoitu suodatinrakenne ja matkaviestinlaite

Country Status (5)

Country Link
US (1) US6278342B1 (fi)
EP (2) EP2299594A1 (fi)
JP (2) JP2000232334A (fi)
CN (1) CN1160853C (fi)
FI (1) FI113211B (fi)

Families Citing this family (93)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6713938B2 (en) * 1999-01-14 2004-03-30 The Regents Of The University Of Michigan Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator
US6424074B2 (en) * 1999-01-14 2002-07-23 The Regents Of The University Of Michigan Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device
FI107661B (fi) 1999-11-29 2001-09-14 Nokia Mobile Phones Ltd Menetelmä balansoidun suotimen keskitaajuuden säätämiseksi ja joukko balansoituja suotimia
EP1273099A1 (en) * 2000-04-06 2003-01-08 Koninklijke Philips Electronics N.V. Tunable filter arrangement comprising resonators.
US6659161B1 (en) 2000-10-13 2003-12-09 Chien-Min Sung Molding process for making diamond tools
US6814130B2 (en) * 2000-10-13 2004-11-09 Chien-Min Sung Methods of making diamond tools using reverse casting of chemical vapor deposition
US7132309B2 (en) * 2003-04-22 2006-11-07 Chien-Min Sung Semiconductor-on-diamond devices and methods of forming
US6674291B1 (en) * 2000-10-30 2004-01-06 Agere Systems Guardian Corp. Method and apparatus for determining and/or improving high power reliability in thin film resonator devices, and a thin film resonator device resultant therefrom
US6515558B1 (en) * 2000-11-06 2003-02-04 Nokia Mobile Phones Ltd Thin-film bulk acoustic resonator with enhanced power handling capacity
DE10058339A1 (de) * 2000-11-24 2002-06-06 Infineon Technologies Ag Bulk-Acoustic-Wave-Filter
FI113111B (fi) * 2000-11-24 2004-02-27 Nokia Corp Pietsosähköisiä resonaattoreita käsittävä suodinrakenne ja järjestely
KR100398363B1 (ko) * 2000-12-05 2003-09-19 삼성전기주식회사 Fbar 소자 및 그 제조방법
US6496085B2 (en) * 2001-01-02 2002-12-17 Nokia Mobile Phones Ltd Solidly mounted multi-resonator bulk acoustic wave filter with a patterned acoustic mirror
US6548943B2 (en) * 2001-04-12 2003-04-15 Nokia Mobile Phones Ltd. Method of producing thin-film bulk acoustic wave devices
KR100541895B1 (ko) * 2001-09-21 2006-01-16 가부시끼가이샤 도시바 고주파 필터
US7194247B2 (en) 2001-09-26 2007-03-20 Nokia Corporation Dual-channel passband filtering system using acoustic resonators in lattice topology
DE10163462A1 (de) * 2001-12-21 2003-07-03 Epcos Ag Symmetrisch arbeitendes Reaktanzfilter
JP3952464B2 (ja) * 2002-02-27 2007-08-01 Tdk株式会社 デュプレクサ
GB0208130D0 (en) * 2002-04-09 2002-05-22 Koninkl Philips Electronics Nv Improvements in or relating to wireless terminals
US7248132B2 (en) 2002-05-20 2007-07-24 Nxp B.V. Filter structure
US20040027030A1 (en) * 2002-08-08 2004-02-12 Li-Peng Wang Manufacturing film bulk acoustic resonator filters
US7275292B2 (en) * 2003-03-07 2007-10-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Method for fabricating an acoustical resonator on a substrate
DE10319554B4 (de) * 2003-04-30 2018-05-09 Snaptrack, Inc. Mit akustischen Volumenwellen arbeitendes Bauelement mit gekoppelten Resonatoren
JP2005033775A (ja) * 2003-06-18 2005-02-03 Matsushita Electric Ind Co Ltd 電子部品及びその製造方法
US6946928B2 (en) * 2003-10-30 2005-09-20 Agilent Technologies, Inc. Thin-film acoustically-coupled transformer
US7242270B2 (en) * 2003-10-30 2007-07-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Decoupled stacked bulk acoustic resonator-based band-pass filter
US7332985B2 (en) 2003-10-30 2008-02-19 Avago Technologies Wireless Ip (Singapore) Pte Ltd. Cavity-less film bulk acoustic resonator (FBAR) devices
EP1528677B1 (en) * 2003-10-30 2006-05-10 Agilent Technologies, Inc. Film acoustically-coupled transformer with two reverse c-axis piezoelectric elements
US7400217B2 (en) * 2003-10-30 2008-07-15 Avago Technologies Wireless Ip Pte Ltd Decoupled stacked bulk acoustic resonator band-pass filter with controllable pass bandwith
US7019605B2 (en) * 2003-10-30 2006-03-28 Larson Iii John D Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth
US7615833B2 (en) 2004-07-13 2009-11-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator package and method of fabricating same
US7388454B2 (en) 2004-10-01 2008-06-17 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using alternating frame structure
US7187255B2 (en) * 2004-10-26 2007-03-06 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Arrangement of lattice filter
US8981876B2 (en) 2004-11-15 2015-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters having frame elements
US7202560B2 (en) 2004-12-15 2007-04-10 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Wafer bonding of micro-electro mechanical systems to active circuitry
US7791434B2 (en) 2004-12-22 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
US7427819B2 (en) 2005-03-04 2008-09-23 Avago Wireless Ip Pte Ltd Film-bulk acoustic wave resonator with motion plate and method
US7369013B2 (en) 2005-04-06 2008-05-06 Avago Technologies Wireless Ip Pte Ltd Acoustic resonator performance enhancement using filled recessed region
US7436269B2 (en) 2005-04-18 2008-10-14 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustically coupled resonators and method of making the same
US7934884B2 (en) * 2005-04-27 2011-05-03 Lockhart Industries, Inc. Ring binder cover
JP4550658B2 (ja) * 2005-04-28 2010-09-22 富士通メディアデバイス株式会社 圧電薄膜共振器およびフィルタ
US20060273866A1 (en) * 2005-06-07 2006-12-07 Nokia Corporation Film bulk acoustic wave resonator with differential topology
US7443269B2 (en) 2005-07-27 2008-10-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Method and apparatus for selectively blocking radio frequency (RF) signals in a radio frequency (RF) switching circuit
US7868522B2 (en) 2005-09-09 2011-01-11 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Adjusted frequency temperature coefficient resonator
US7391286B2 (en) 2005-10-06 2008-06-24 Avago Wireless Ip Pte Ltd Impedance matching and parasitic capacitor resonance of FBAR resonators and coupled filters
US7737807B2 (en) 2005-10-18 2010-06-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators
US7423503B2 (en) 2005-10-18 2008-09-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating film acoustically-coupled transformer
US7425787B2 (en) 2005-10-18 2008-09-16 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating single insulated decoupled stacked bulk acoustic resonator with acoustically-resonant electrical insulator
US7675390B2 (en) 2005-10-18 2010-03-09 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator
US7525398B2 (en) 2005-10-18 2009-04-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustically communicating data signals across an electrical isolation barrier
US7463499B2 (en) 2005-10-31 2008-12-09 Avago Technologies General Ip (Singapore) Pte Ltd. AC-DC power converter
JP2007129391A (ja) * 2005-11-02 2007-05-24 Matsushita Electric Ind Co Ltd 音響共振器及びフィルタ
US7561009B2 (en) 2005-11-30 2009-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator (FBAR) devices with temperature compensation
US7612636B2 (en) 2006-01-30 2009-11-03 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Impedance transforming bulk acoustic wave baluns
JP4739068B2 (ja) * 2006-03-08 2011-08-03 日本碍子株式会社 圧電薄膜デバイス
US7746677B2 (en) 2006-03-09 2010-06-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. AC-DC converter circuit and power supply
US7479685B2 (en) 2006-03-10 2009-01-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Electronic device on substrate with cavity and mitigated parasitic leakage path
US20070228876A1 (en) * 2006-03-31 2007-10-04 Chien-Min Sung Diamond Frequency Control Devices and Associated Methods
US7629865B2 (en) 2006-05-31 2009-12-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters
US7508286B2 (en) 2006-09-28 2009-03-24 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. HBAR oscillator and method of manufacture
US7846767B1 (en) 2007-09-06 2010-12-07 Chien-Min Sung Semiconductor-on-diamond devices and associated methods
US7791435B2 (en) 2007-09-28 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single stack coupled resonators having differential output
JP5136134B2 (ja) * 2008-03-18 2013-02-06 ソニー株式会社 バンドパスフィルタ装置、その製造方法、テレビジョンチューナおよびテレビジョン受信機
US7732977B2 (en) 2008-04-30 2010-06-08 Avago Technologies Wireless Ip (Singapore) Transceiver circuit for film bulk acoustic resonator (FBAR) transducers
US7855618B2 (en) 2008-04-30 2010-12-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator electrical impedance transformers
JP5172454B2 (ja) * 2008-04-30 2013-03-27 太陽誘電株式会社 フィルタ、デュプレクサおよび通信機器
US8018304B2 (en) 2009-04-15 2011-09-13 Nortel Networks Limited Device and method for cascading filters of different materials
US8902023B2 (en) 2009-06-24 2014-12-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
US8248185B2 (en) 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
US8193877B2 (en) 2009-11-30 2012-06-05 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Duplexer with negative phase shifting circuit
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9048812B2 (en) 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9154112B2 (en) 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9083302B2 (en) 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US9136818B2 (en) 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
US8575820B2 (en) 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
US8350445B1 (en) 2011-06-16 2013-01-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising non-piezoelectric layer and bridge
US8922302B2 (en) 2011-08-24 2014-12-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator formed on a pedestal
JP5613813B2 (ja) * 2013-10-17 2014-10-29 太陽誘電株式会社 分波器
US10177736B2 (en) 2015-05-29 2019-01-08 Avago Technologies International Sales Pte. Limited Bulk acoustic wave resonator comprising multiple acoustic reflectors
JP2017060077A (ja) * 2015-09-18 2017-03-23 セイコーエプソン株式会社 振動子及びその製造方法
TWI632567B (zh) * 2015-10-21 2018-08-11 村田製作所股份有限公司 Balanced filter
US10135415B2 (en) * 2015-12-18 2018-11-20 Texas Instruments Incorporated Method to reduce frequency distribution of bulk acoustic wave resonators during manufacturing
US11736088B2 (en) 2016-11-15 2023-08-22 Global Communication Semiconductors, Llc Film bulk acoustic resonator with spurious resonance suppression
US11764750B2 (en) 2018-07-20 2023-09-19 Global Communication Semiconductors, Llc Support structure for bulk acoustic wave resonator
US11817839B2 (en) * 2019-03-28 2023-11-14 Global Communication Semiconductors, Llc Single-crystal bulk acoustic wave resonator and method of making thereof
US20210111701A1 (en) 2019-10-15 2021-04-15 Global Communication Semiconductors, Llc Bulk Resonator with Symmetrically Positioned Temperature Compensation Layers

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1969571A (en) * 1933-03-17 1934-08-07 Bell Telephone Labor Inc Transmission network
US5231327A (en) * 1990-12-14 1993-07-27 Tfr Technologies, Inc. Optimized piezoelectric resonator-based networks
JPH09289434A (ja) * 1996-04-22 1997-11-04 Matsushita Electric Ind Co Ltd 平衡型弾性表面波フィルタ
US5617065A (en) * 1995-06-29 1997-04-01 Motorola, Inc. Filter using enhanced quality factor resonator and method
US5692279A (en) * 1995-08-17 1997-12-02 Motorola Method of making a monolithic thin film resonator lattice filter
US6051907A (en) * 1996-10-10 2000-04-18 Nokia Mobile Phones Limited Method for performing on-wafer tuning of thin film bulk acoustic wave resonators (FBARS)
US5872493A (en) * 1997-03-13 1999-02-16 Nokia Mobile Phones, Ltd. Bulk acoustic wave (BAW) filter having a top portion that includes a protective acoustic mirror
US5910756A (en) * 1997-05-21 1999-06-08 Nokia Mobile Phones Limited Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators
US5942958A (en) * 1998-07-27 1999-08-24 Tfr Technologies, Inc. Symmetrical piezoelectric resonator filter

Also Published As

Publication number Publication date
CN1258960A (zh) 2000-07-05
US6278342B1 (en) 2001-08-21
EP2299594A1 (en) 2011-03-23
CN1160853C (zh) 2004-08-04
FI982824A0 (fi) 1998-12-30
JP2000232334A (ja) 2000-08-22
JP2011072047A (ja) 2011-04-07
EP1017170A2 (en) 2000-07-05
FI113211B (fi) 2004-03-15
EP1017170A3 (en) 2003-01-02

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