FI941079A0 - Limloest ekologiskt rent elektroadhesionsfoerfarande foer att hopfoga ochfaesta material - Google Patents
Limloest ekologiskt rent elektroadhesionsfoerfarande foer att hopfoga ochfaesta materialInfo
- Publication number
- FI941079A0 FI941079A0 FI941079A FI941079A FI941079A0 FI 941079 A0 FI941079 A0 FI 941079A0 FI 941079 A FI941079 A FI 941079A FI 941079 A FI941079 A FI 941079A FI 941079 A0 FI941079 A0 FI 941079A0
- Authority
- FI
- Finland
- Prior art keywords
- supply
- limloest
- ecological
- materials
- production
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Adhesives Or Adhesive Processes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ZA931623 | 1993-03-08 | ||
ZA936179 | 1993-08-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
FI941079A0 true FI941079A0 (fi) | 1994-03-08 |
Family
ID=27142239
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI941079A FI941079A0 (fi) | 1993-03-08 | 1994-03-08 | Limloest ekologiskt rent elektroadhesionsfoerfarande foer att hopfoga ochfaesta material |
FI954226A FI954226A (fi) | 1993-03-08 | 1995-09-08 | Liimaton ekologisesti puhdas sähköadheesiomenetelmä materiaalien liittämiseksi ja kiinnittämiseksi |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI954226A FI954226A (fi) | 1993-03-08 | 1995-09-08 | Liimaton ekologisesti puhdas sähköadheesiomenetelmä materiaalien liittämiseksi ja kiinnittämiseksi |
Country Status (8)
Country | Link |
---|---|
CN (1) | CN1105740A (fi) |
AU (1) | AU6158094A (fi) |
CA (1) | CA2157875A1 (fi) |
FI (2) | FI941079A0 (fi) |
IL (1) | IL108893A0 (fi) |
NO (1) | NO953558L (fi) |
WO (1) | WO1994020984A1 (fi) |
ZA (1) | ZA941587B (fi) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7598651B2 (en) | 2004-03-12 | 2009-10-06 | Sri International | Mechanical meta-materials |
US7551419B2 (en) | 2006-06-05 | 2009-06-23 | Sri International | Electroadhesion |
US7554787B2 (en) * | 2006-06-05 | 2009-06-30 | Sri International | Wall crawling devices |
US8515510B2 (en) | 2009-03-31 | 2013-08-20 | Covidien Lp | Electroadhesive medical devices |
US8633269B2 (en) | 2010-12-01 | 2014-01-21 | Mattel, Inc. | Play modeling dough |
US9261336B2 (en) | 2013-03-15 | 2016-02-16 | Mattel, Inc. | Toy projectile and method of making |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL56224A (en) * | 1978-01-16 | 1982-08-31 | Veeco Instr Inc | Substrate clamp for use in semiconductor fabrication |
US4384918A (en) * | 1980-09-30 | 1983-05-24 | Fujitsu Limited | Method and apparatus for dry etching and electrostatic chucking device used therein |
JPS6156843A (ja) * | 1984-08-27 | 1986-03-22 | Kokusai Electric Co Ltd | 静電吸着板 |
JP2525593Y2 (ja) * | 1988-02-05 | 1997-02-12 | 株式会社 アビサレ | 静電吸着シート |
DE69103915T2 (de) * | 1990-01-25 | 1995-05-11 | Applied Materials Inc | Elektrostatische Klemmvorrichtung und Verfahren. |
FR2661039B1 (fr) * | 1990-04-12 | 1997-04-30 | Commissariat Energie Atomique | Porte-substrat electrostatique. |
JPH04342155A (ja) * | 1991-05-20 | 1992-11-27 | Fujitsu Ltd | 半導体製造装置 |
-
1994
- 1994-03-08 AU AU61580/94A patent/AU6158094A/en not_active Abandoned
- 1994-03-08 CA CA002157875A patent/CA2157875A1/en not_active Abandoned
- 1994-03-08 CN CN94104274A patent/CN1105740A/zh active Pending
- 1994-03-08 FI FI941079A patent/FI941079A0/fi unknown
- 1994-03-08 ZA ZA941587A patent/ZA941587B/xx unknown
- 1994-03-08 WO PCT/NZ1994/000016 patent/WO1994020984A1/en active Application Filing
- 1994-03-08 IL IL10889394A patent/IL108893A0/xx unknown
-
1995
- 1995-09-08 NO NO953558A patent/NO953558L/no unknown
- 1995-09-08 FI FI954226A patent/FI954226A/fi not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
AU6158094A (en) | 1994-09-26 |
CN1105740A (zh) | 1995-07-26 |
WO1994020984A1 (en) | 1994-09-15 |
NO953558L (no) | 1995-10-25 |
NO953558D0 (no) | 1995-09-08 |
FI954226A (fi) | 1995-10-30 |
FI954226A0 (fi) | 1995-09-08 |
IL108893A0 (en) | 1994-06-24 |
CA2157875A1 (en) | 1994-09-15 |
ZA941587B (en) | 1995-03-28 |
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