FI921449A - Sähköinen impedanssianturi fysikaalisten suureiden, etenkin lämpötilan mittaamiseksi ja menetelmä kyseisen anturin valmistamiseksi - Google Patents

Sähköinen impedanssianturi fysikaalisten suureiden, etenkin lämpötilan mittaamiseksi ja menetelmä kyseisen anturin valmistamiseksi Download PDF

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Publication number
FI921449A
FI921449A FI921449A FI921449A FI921449A FI 921449 A FI921449 A FI 921449A FI 921449 A FI921449 A FI 921449A FI 921449 A FI921449 A FI 921449A FI 921449 A FI921449 A FI 921449A
Authority
FI
Finland
Prior art keywords
sensor
question
manufacture
physical quantity
measuring physical
Prior art date
Application number
FI921449A
Other languages
English (en)
Swedish (sv)
Other versions
FI921449A0 (fi
FI92441C (fi
FI92441B (fi
Inventor
Heikki Turtiainen
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of FI921449A0 publication Critical patent/FI921449A0/fi
Priority to FI921449A priority Critical patent/FI92441C/fi
Priority to AU34096/93A priority patent/AU662041B2/en
Priority to ZA931727A priority patent/ZA931727B/xx
Priority to CA002092609A priority patent/CA2092609C/en
Priority to EP93850046A priority patent/EP0564428B1/en
Priority to DE69318881T priority patent/DE69318881T2/de
Priority to US08/040,129 priority patent/US5483414A/en
Priority to BR9301390A priority patent/BR9301390A/pt
Priority to RU93004648A priority patent/RU2123174C1/ru
Priority to CN93103892A priority patent/CN1043927C/zh
Priority to JP5075840A priority patent/JPH087103B2/ja
Publication of FI921449A publication Critical patent/FI921449A/fi
Application granted granted Critical
Publication of FI92441B publication Critical patent/FI92441B/fi
Publication of FI92441C publication Critical patent/FI92441C/fi

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/34Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
FI921449A 1992-04-01 1992-04-01 Sähköinen impedanssianturi fysikaalisten suureiden, etenkin lämpötilan mittaamiseksi ja menetelmä kyseisen anturin valmistamiseksi FI92441C (fi)

Priority Applications (11)

Application Number Priority Date Filing Date Title
FI921449A FI92441C (fi) 1992-04-01 1992-04-01 Sähköinen impedanssianturi fysikaalisten suureiden, etenkin lämpötilan mittaamiseksi ja menetelmä kyseisen anturin valmistamiseksi
AU34096/93A AU662041B2 (en) 1992-04-01 1993-03-09 Electrical detector process of manufacture
ZA931727A ZA931727B (en) 1992-04-01 1993-03-10 Electrical impedance detector for measurement of physical quantities, in particular of temperature, and process for manufacture of said detector.
CA002092609A CA2092609C (en) 1992-04-01 1993-03-12 Electrical impedance detector for measurement of physical quantities
EP93850046A EP0564428B1 (en) 1992-04-01 1993-03-15 Electrical capacitive detector for measurement of physical quantities, in particular of temperature, and process for manufacture of the said detector
DE69318881T DE69318881T2 (de) 1992-04-01 1993-03-15 Elektrischer Kapazitivdetektor zum Messen physikalischer Grössen, insbesondere der Temperatur und dessen Fabrikation
US08/040,129 US5483414A (en) 1992-04-01 1993-03-30 Electrical impedance detector for measurement of physical quantities, in particular of temperature
BR9301390A BR9301390A (pt) 1992-04-01 1993-03-31 Detector de impedancia eletrica para a medicao de quantidades fisicas,em particular de temperatura,e processo para a fabricacao de detectores
RU93004648A RU2123174C1 (ru) 1992-04-01 1993-03-31 Емкостный датчик для измерения физических величин, в частности температуры, и способ его изготовления
CN93103892A CN1043927C (zh) 1992-04-01 1993-04-01 用于测量物理量特别是温度的电阻抗探测元件及其制造方法
JP5075840A JPH087103B2 (ja) 1992-04-01 1993-04-01 物理量特に温度測定用電気インピーダンス検出器及び該検出器の製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI921449A FI92441C (fi) 1992-04-01 1992-04-01 Sähköinen impedanssianturi fysikaalisten suureiden, etenkin lämpötilan mittaamiseksi ja menetelmä kyseisen anturin valmistamiseksi
FI921449 1992-04-01

Publications (4)

Publication Number Publication Date
FI921449A0 FI921449A0 (fi) 1992-04-01
FI921449A true FI921449A (fi) 1993-10-02
FI92441B FI92441B (fi) 1994-07-29
FI92441C FI92441C (fi) 1994-11-10

Family

ID=8535028

Family Applications (1)

Application Number Title Priority Date Filing Date
FI921449A FI92441C (fi) 1992-04-01 1992-04-01 Sähköinen impedanssianturi fysikaalisten suureiden, etenkin lämpötilan mittaamiseksi ja menetelmä kyseisen anturin valmistamiseksi

Country Status (11)

Country Link
US (1) US5483414A (fi)
EP (1) EP0564428B1 (fi)
JP (1) JPH087103B2 (fi)
CN (1) CN1043927C (fi)
AU (1) AU662041B2 (fi)
BR (1) BR9301390A (fi)
CA (1) CA2092609C (fi)
DE (1) DE69318881T2 (fi)
FI (1) FI92441C (fi)
RU (1) RU2123174C1 (fi)
ZA (1) ZA931727B (fi)

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FI92439C (fi) * 1993-09-29 1994-11-10 Vaisala Oy Sähköisesti ilmaistu impedanssianturi fysikaalisten suureiden, etenkin lämpötilan tai kosteuden, mittaamiseksi sekä menetelmä kyseisten anturien valmistamiseksi
FI98568C (fi) * 1994-12-28 1997-07-10 Vaisala Oy Sähköisesti ilmaistu impedanssianturi fysikaalisten suureiden, etenkin lämpötilan tai kosteuden, mittaamiseksi sekä menetelmä kyseisten anturien valmistamiseksi
FI100135B (fi) * 1996-01-05 1997-09-30 Vaisala Oy Menetelmä ja lämpötila-anturirakenne säteilyvirheen eliminoimiseksi
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JO3141B1 (ar) 2011-10-07 2017-09-20 Shell Int Research الوصلات المتكاملة للموصلات المعزولة
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CN103438936B (zh) * 2013-09-02 2016-06-15 东南大学 基于soi片器件层硅阳极键合的电容式温度、湿度和气压传感器集成制造方法
CN105891547A (zh) * 2014-09-18 2016-08-24 扬州思必得仪器设备有限公司 一种隧穿纤维
WO2018088082A1 (ja) * 2016-11-08 2018-05-17 日本電気硝子株式会社 ガラスセラミック複合繊維およびその製造方法
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Also Published As

Publication number Publication date
CA2092609A1 (en) 1993-10-02
AU662041B2 (en) 1995-08-17
FI921449A0 (fi) 1992-04-01
US5483414A (en) 1996-01-09
CN1043927C (zh) 1999-06-30
CA2092609C (en) 2004-05-25
CN1077023A (zh) 1993-10-06
DE69318881D1 (de) 1998-07-09
BR9301390A (pt) 1993-10-13
JPH06160201A (ja) 1994-06-07
EP0564428A1 (en) 1993-10-06
FI92441C (fi) 1994-11-10
JPH087103B2 (ja) 1996-01-29
RU2123174C1 (ru) 1998-12-10
EP0564428B1 (en) 1998-06-03
DE69318881T2 (de) 1998-10-01
AU3409693A (en) 1993-10-07
ZA931727B (en) 1993-09-27
FI92441B (fi) 1994-07-29

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