FI934268A0 - Sähköisesti ilmaistu impedanssianturi fysikaalisten suureiden, etenkin lämpötilan tai kosteuden, mittaamiseksi sekä menetelmä kyseisten anturien valmistamiseksi - Google Patents

Sähköisesti ilmaistu impedanssianturi fysikaalisten suureiden, etenkin lämpötilan tai kosteuden, mittaamiseksi sekä menetelmä kyseisten anturien valmistamiseksi

Info

Publication number
FI934268A0
FI934268A0 FI934268A FI934268A FI934268A0 FI 934268 A0 FI934268 A0 FI 934268A0 FI 934268 A FI934268 A FI 934268A FI 934268 A FI934268 A FI 934268A FI 934268 A0 FI934268 A0 FI 934268A0
Authority
FI
Finland
Prior art keywords
humidity
sensors
manufacturing
physical quantities
particular temperature
Prior art date
Application number
FI934268A
Other languages
English (en)
Swedish (sv)
Other versions
FI92439C (fi
FI92439B (fi
Inventor
Ingmar Stuns
Simo Tammela
Heikki Turtiainen
Jorma Ponkala
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Priority to FI934268A priority Critical patent/FI92439C/fi
Publication of FI934268A0 publication Critical patent/FI934268A0/fi
Application granted granted Critical
Publication of FI92439B publication Critical patent/FI92439B/fi
Priority to EP94850152A priority patent/EP0645606B1/en
Priority to DE69414958T priority patent/DE69414958T2/de
Priority to US08/312,886 priority patent/US5631418A/en
Priority to JP25944594A priority patent/JP3625874B2/ja
Publication of FI92439C publication Critical patent/FI92439C/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/34—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements
    • G01K7/343—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements the dielectric constant of which is temperature dependant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/2405—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by varying dielectric
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
FI934268A 1993-09-29 1993-09-29 Sähköisesti ilmaistu impedanssianturi fysikaalisten suureiden, etenkin lämpötilan tai kosteuden, mittaamiseksi sekä menetelmä kyseisten anturien valmistamiseksi FI92439C (fi)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FI934268A FI92439C (fi) 1993-09-29 1993-09-29 Sähköisesti ilmaistu impedanssianturi fysikaalisten suureiden, etenkin lämpötilan tai kosteuden, mittaamiseksi sekä menetelmä kyseisten anturien valmistamiseksi
EP94850152A EP0645606B1 (en) 1993-09-29 1994-09-05 Electrically detected impedance detector for the measurement of physical quantities, in particular of temperature or humidity, and process for the manufacture of said detectors
DE69414958T DE69414958T2 (de) 1993-09-29 1994-09-05 Elektrischer Impedanzdetektor zum Messen physikalischer Grössen, insbesondere Temperatur oder Feuchtigkeit, und dessen Fabrikation
US08/312,886 US5631418A (en) 1993-09-29 1994-09-27 Electrically detected impedance detector for the measurement of physical quantities, in particular of temperature or humidity, and process for the manufacture of said detectors
JP25944594A JP3625874B2 (ja) 1993-09-29 1994-09-29 温度または湿度などの物理量を測定する電気インピーダンス検知器と、その製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI934268A FI92439C (fi) 1993-09-29 1993-09-29 Sähköisesti ilmaistu impedanssianturi fysikaalisten suureiden, etenkin lämpötilan tai kosteuden, mittaamiseksi sekä menetelmä kyseisten anturien valmistamiseksi
FI934268 1993-09-29

Publications (3)

Publication Number Publication Date
FI934268A0 true FI934268A0 (fi) 1993-09-29
FI92439B FI92439B (fi) 1994-07-29
FI92439C FI92439C (fi) 1994-11-10

Family

ID=8538688

Family Applications (1)

Application Number Title Priority Date Filing Date
FI934268A FI92439C (fi) 1993-09-29 1993-09-29 Sähköisesti ilmaistu impedanssianturi fysikaalisten suureiden, etenkin lämpötilan tai kosteuden, mittaamiseksi sekä menetelmä kyseisten anturien valmistamiseksi

Country Status (5)

Country Link
US (1) US5631418A (fi)
EP (1) EP0645606B1 (fi)
JP (1) JP3625874B2 (fi)
DE (1) DE69414958T2 (fi)
FI (1) FI92439C (fi)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI98568C (fi) * 1994-12-28 1997-07-10 Vaisala Oy Sähköisesti ilmaistu impedanssianturi fysikaalisten suureiden, etenkin lämpötilan tai kosteuden, mittaamiseksi sekä menetelmä kyseisten anturien valmistamiseksi
US6014029A (en) * 1997-11-12 2000-01-11 Climonics Ltda Sensor for sensing changes in the permittivity of a medium in which it is disposed
DE10331124B3 (de) * 2003-07-09 2005-02-17 Heraeus Electro-Nite International N.V. Verfahren und Vorrichtung zum Messen der Abkühlkurve von Schmelzenproben und/oder der Aufheizkurve von Schmelzenproben sowie deren Verwendung
US7794663B2 (en) * 2004-02-19 2010-09-14 Axcelis Technologies, Inc. Method and system for detection of solid materials in a plasma using an electromagnetic circuit
US20060157099A1 (en) * 2005-01-19 2006-07-20 Park Peter C Adjustable strap for assembling canopy
KR100776914B1 (ko) * 2005-06-14 2007-11-15 주식회사 엘지화학 온도 측정 장치
US20140070827A1 (en) * 2012-09-13 2014-03-13 Alliance For Sustainable Energy, Llc Systems and methods for compensated barrier permeability testing
CN115803613A (zh) 2020-02-12 2023-03-14 古洛尼有限责任公司 适用于针对瞬态条件在高温下运行具有受控冷凝效应的环境控制系统

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2106744A (en) * 1934-03-19 1938-02-01 Corning Glass Works Treated borosilicate glass
US2315329A (en) * 1938-11-04 1943-03-30 Corning Glass Works Method of making composite glass articles
US2295570A (en) * 1938-12-22 1942-09-15 Francis W Dunmore Humidity measuring
US2285421A (en) * 1940-06-08 1942-06-09 Francis W Dunmore Humidity variable resistance
US2381299A (en) * 1943-03-13 1945-08-07 Westinghouse Electric Corp Hygrometer
US2510018A (en) * 1947-06-13 1950-05-30 Sears Roebuck & Co Electrolytic humidostat
GB872042A (en) * 1956-10-01 1961-07-05 Sperry Rand Corp Temperature responsive apparatus
US3168829A (en) * 1961-10-05 1965-02-09 Honeywell Inc Control apparatus
US3295088A (en) * 1964-10-14 1966-12-27 Johnson Service Co Electrical humidity sensing element
US3299387A (en) * 1964-12-23 1967-01-17 Gen Electric Humidity-sensitive resistor
US3350941A (en) * 1965-05-20 1967-11-07 Johnson Service Co Humidity sensing element
US3443293A (en) * 1965-09-03 1969-05-13 Sho Masujima Method of manufacturing capacitors
DE1598446A1 (de) * 1966-05-03 1969-06-26 Hoechst Ag Feuchtigkeitsmessfuehler
US3458845A (en) * 1967-11-08 1969-07-29 Johnson Service Co Crosslinked electrical resistance humidity sensing element
US3683243A (en) * 1970-10-21 1972-08-08 Moisture Control And Measureme Electrical hygrometers
US3935742A (en) * 1973-06-13 1976-02-03 Boris Rybak Low-inertia hygrometer
CH600331A5 (fi) * 1975-10-15 1978-06-15 Howag Ag
US4347550A (en) * 1977-12-22 1982-08-31 Peter Rockliff Sensor detector element for an electrical hygrometer
US4319485A (en) * 1978-12-28 1982-03-16 Matsushita Electric Industrial Co., Ltd. Temperature·humidity detecting apparatus
DE3225921C2 (de) * 1982-07-10 1985-10-24 Barlian, Reinhold, Dipl.-Ing.(FH), 6990 Bad Mergentheim Überwachungseinrichtung
JPS5873852A (ja) * 1981-10-28 1983-05-04 Hitachi Ltd 結露センサ
JPS59133452A (ja) * 1983-01-20 1984-07-31 Tatsuta Electric Wire & Cable Co Ltd 湿度検知線
EP0311939A3 (en) * 1987-10-12 1990-10-17 Nihon Parkerizing Co., Ltd. Humidity sensor
US4858063A (en) * 1987-12-31 1989-08-15 California Institute Of Technology Spiral configuration of electrodes and dielectric material for sensing an environmental property
FI84862C (fi) * 1989-08-11 1992-01-27 Vaisala Oy Kapacitiv fuktighetsgivarkonstruktion och foerfarande foer framstaellning daerav.
FI92441C (fi) * 1992-04-01 1994-11-10 Vaisala Oy Sähköinen impedanssianturi fysikaalisten suureiden, etenkin lämpötilan mittaamiseksi ja menetelmä kyseisen anturin valmistamiseksi

Also Published As

Publication number Publication date
DE69414958D1 (de) 1999-01-14
JP3625874B2 (ja) 2005-03-02
EP0645606B1 (en) 1998-12-02
JPH07190972A (ja) 1995-07-28
EP0645606A1 (en) 1995-03-29
US5631418A (en) 1997-05-20
FI92439C (fi) 1994-11-10
FI92439B (fi) 1994-07-29
DE69414958T2 (de) 1999-05-12

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