FI883565A - Anordning foer kontroll av egenskaper hos en film pao ett substrat. - Google Patents

Anordning foer kontroll av egenskaper hos en film pao ett substrat. Download PDF

Info

Publication number
FI883565A
FI883565A FI883565A FI883565A FI883565A FI 883565 A FI883565 A FI 883565A FI 883565 A FI883565 A FI 883565A FI 883565 A FI883565 A FI 883565A FI 883565 A FI883565 A FI 883565A
Authority
FI
Finland
Prior art keywords
film
anordning foer
egenskaper
hos
substrat
Prior art date
Application number
FI883565A
Other languages
English (en)
Other versions
FI883565A0 (fi
Inventor
Walter D Mccomb
Richard D Schave
Gregory S Lee
Andrew W Rudolph
Original Assignee
Libbey Owens Ford Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Libbey Owens Ford Co filed Critical Libbey Owens Ford Co
Publication of FI883565A0 publication Critical patent/FI883565A0/fi
Publication of FI883565A publication Critical patent/FI883565A/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Textile Engineering (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
FI883565A 1986-12-04 1988-07-29 Anordning foer kontroll av egenskaper hos en film pao ett substrat. FI883565A (fi)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/937,741 US4785336A (en) 1986-12-04 1986-12-04 Device for monitoring characteristics of a film on a substrate
PCT/US1987/003156 WO1988004402A1 (en) 1986-12-04 1987-12-01 Device for monitoring characteristics of a film on a substrate

Publications (2)

Publication Number Publication Date
FI883565A0 FI883565A0 (fi) 1988-07-29
FI883565A true FI883565A (fi) 1988-07-29

Family

ID=25470339

Family Applications (1)

Application Number Title Priority Date Filing Date
FI883565A FI883565A (fi) 1986-12-04 1988-07-29 Anordning foer kontroll av egenskaper hos en film pao ett substrat.

Country Status (11)

Country Link
US (1) US4785336A (fi)
EP (1) EP0293446A4 (fi)
JP (1) JPH01501505A (fi)
KR (1) KR960015050B1 (fi)
CN (1) CN87107260A (fi)
AU (1) AU598626B2 (fi)
BR (1) BR8707575A (fi)
ES (1) ES2005961A6 (fi)
FI (1) FI883565A (fi)
WO (1) WO1988004402A1 (fi)
ZA (1) ZA879016B (fi)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0781840B2 (ja) * 1988-06-29 1995-09-06 富士写真フイルム株式会社 光学式膜厚測定装置
US5068739A (en) * 1989-02-10 1991-11-26 Optum Corporation Method to image transparent media utilizing integrated scanning
DE4004088A1 (de) * 1990-02-10 1991-08-14 Basf Ag Verfahren zur untersuchung physikalischer eigenschaften duenner schichten
US5148041A (en) * 1991-02-07 1992-09-15 Brain Power, Inc. Reflectometer
US5181080A (en) * 1991-12-23 1993-01-19 Therma-Wave, Inc. Method and apparatus for evaluating the thickness of thin films
DE4201274C2 (de) † 1992-01-18 1995-02-23 Ver Glaswerke Gmbh Vorrichtung zum Messen der Reflexionseigenschaften einer mit einer teilreflektierenden Schicht versehenen Glasscheibe
US5264905A (en) * 1992-04-27 1993-11-23 Grumman Aerospace Corporation Electro-optic automated test equipment
GB9219450D0 (en) * 1992-09-15 1992-10-28 Glaverbel Thin film thickness monitoring and control
US5332904A (en) * 1992-10-28 1994-07-26 The United States Of America As Represented By The Department Of Energy Broadband radiometer
US6630947B1 (en) * 1996-04-10 2003-10-07 The United States Of America As Represented By The Secretary Of The Navy Method for examining subsurface environments
US6762838B2 (en) * 2001-07-02 2004-07-13 Tevet Process Control Technologies Ltd. Method and apparatus for production line screening
US6657714B2 (en) * 2001-09-24 2003-12-02 Applied Materials, Inc. Defect detection with enhanced dynamic range
JP2007515640A (ja) * 2003-12-19 2007-06-14 データカラー ホールディング アーゲー デジタルカメラを有する分光光度計
CN100494991C (zh) * 2004-12-23 2009-06-03 北京源德生物医学工程有限公司 用于单光子计数仪的标准光源
US8982362B2 (en) * 2011-10-04 2015-03-17 First Solar, Inc. System and method for measuring layer thickness and depositing semiconductor layers
US9157729B1 (en) * 2013-01-10 2015-10-13 DST Output West, LLC Light sensor facilitated insert thickness detection system
CN104807495B (zh) * 2014-01-24 2017-12-01 北京智朗芯光科技有限公司 一种监测晶片生长薄膜特性的装置及其用途
US10274307B2 (en) * 2015-03-17 2019-04-30 Toray Engineering Co., Ltd. Film thickness measurement device using interference of light and film thickness measurement method using interference of light
CN104949771A (zh) * 2015-07-13 2015-09-30 天津津航技术物理研究所 一种tdlas气体测温检测方法
CN105043589A (zh) * 2015-07-13 2015-11-11 天津津航技术物理研究所 基于扩束聚焦系统的tdlas气体测温检测方法
CN104949770A (zh) * 2015-07-13 2015-09-30 天津津航技术物理研究所 一种tdlas气体测温检测装置
CN106353282B (zh) * 2016-08-31 2020-04-28 电子科技大学 微区反射率测试系统及其测试方法
CN106441126A (zh) * 2016-10-26 2017-02-22 电子科技大学 一种基于反射率光谱测量光学薄膜厚度的方法及系统
CN107421909A (zh) * 2017-05-17 2017-12-01 上海理工大学 非透射固体表面尿素水溶液液膜多参数的测量装置及方法
CN109084693B (zh) * 2018-07-20 2020-03-31 东莞富亚电子有限公司 彩色图像测膜厚法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2655073A (en) * 1950-09-23 1953-10-13 Celanese Corp Optical thickness gauge
FI45797C (fi) * 1970-04-20 1972-09-11 Nokia Oy Ab Materiaalirainojen säteilymittauslaite.
US3737237A (en) * 1971-11-18 1973-06-05 Nasa Monitoring deposition of films
US3892490A (en) * 1974-03-06 1975-07-01 Minolta Camera Kk Monitoring system for coating a substrate
US3936189A (en) * 1974-03-13 1976-02-03 Sentrol Systems Ltd. On-line system for monitoring the color, opacity and brightness of a moving web
AU8181375A (en) * 1974-06-07 1976-12-09 Decca Ltd Determination of thickness of uniform films
US4012144A (en) * 1975-08-07 1977-03-15 Varian Associates Spectrosorptance measuring system and method
US4003660A (en) * 1975-12-03 1977-01-18 Hunter Associates Laboratory, Inc. Sensing head assembly for multi-color printing press on-line densitometer
US4395126A (en) * 1981-03-12 1983-07-26 Miles Laboratories, Inc. Apparatus for reflectance measurement of fluorescent radiation and composite useful therein
US4479718A (en) * 1982-06-17 1984-10-30 E. I. Du Pont De Nemours And Company Three direction measurements for characterization of a surface containing metallic particles
JPS6052706A (ja) * 1983-08-31 1985-03-26 Nippon Kokan Kk <Nkk> 膜厚測定装置
US4654794A (en) * 1984-02-18 1987-03-31 Colorgen, Inc. Methods for determining the proper coloring for a tooth replica

Also Published As

Publication number Publication date
JPH01501505A (ja) 1989-05-25
KR890700220A (ko) 1989-03-10
ZA879016B (en) 1988-05-27
BR8707575A (pt) 1989-03-14
WO1988004402A1 (en) 1988-06-16
CN87107260A (zh) 1988-08-10
EP0293446A1 (en) 1988-12-07
US4785336A (en) 1988-11-15
EP0293446A4 (en) 1990-04-10
ES2005961A6 (es) 1989-04-01
FI883565A0 (fi) 1988-07-29
AU598626B2 (en) 1990-06-28
AU1053088A (en) 1988-06-30
KR960015050B1 (ko) 1996-10-24

Similar Documents

Publication Publication Date Title
FI883565A (fi) Anordning foer kontroll av egenskaper hos en film pao ett substrat.
FI895212A0 (fi) Handverktyg foer oeverfoering av en film fraon ett baerarband till ett substrat.
FI881164A0 (fi) Stabilisering av reaktiviteten hos polyuretanskumkomponenter baserade pao polyesterpolyoler.
FI873357A0 (fi) Foerfarande foer bekaempning av loppor hos hundar och katter.
FI870222A0 (fi) Foerfarande foer foerbaettring av haollfastheten hos fanerskivor innehaollande svarvsprickor.
DE3788134T2 (de) Dünnfilmanordnung.
FI885173A0 (fi) Anordning foer elektroanalgesi av vaevnader hos patienter.
FI860648A (fi) Foerfarande och anordning foer bestaemning av vattenhalten hos oljebaserade och liknande vaetskor.
FI904496A0 (fi) Foerfarande foer kontinuerlig bestaemning av tjockleken hos vaetskeformigt slagg pao ytan av ett metallurgiskt kaerl.
FI882232A (fi) Anordning och foerfarande foer bestaemmande av hastigheten hos fordon.
FI871367A0 (fi) Foerfarande foer oevervakning av funktionen hos en foerbraenningsmotor.
FI871638A (fi) Foerfarande foer foerbaettrande av jaemngaongen hos en slagkolvfoerbraenningsmotormaskin och slagkolvfoerbraenningsmotormaskin foer utoevande av foerfarandet.
FI853232A0 (fi) Foerfarande och anordning foer utfaellning av ett tunnt skikt av en foerening innehaollande minst en katjonisk komponent och minst en anjonisk komponent pao ett substrat.
FI870278A0 (fi) Anordning foer utveckling av skjutskickligheten hos en ishockeyspelare.
FI884688A0 (fi) Foerfarande foer foerbaettrande av saekerheten hos fungicida kompositioner.
FI863526A0 (fi) Saett att foerhindra uppkomsten av statisk elektricitet hos laminerade golvkorkplattor jaemte plattor haertill.
FI843173A (fi) Anordning foer automatisk och kontaktloes maetning av volym hos ett pao substrat lagt skikt.
FI864131A0 (fi) Foerfarande och anordning foer reglering av tvaerprofilen hos en pao ett transportband lagd spaonmatta.
FI894003A0 (fi) Anvaendning av kalciumsulfat foer foerbaettrande av fermenteringen hos organiskt avfall.
FI861296A (fi) Foerfarande foer behandling av ett flexibelt substrat.
FI915934A (fi) Ett substrat av mineralull foer vattenodling.
FI883201A0 (fi) Foerfarande och anordning foer odling av vaexter pao ett substrat av mineralull foersett med sugtrycksreglering.
FI860102A0 (fi) Tillsatsaemnesblandningar avsedda i synnerhet foer foerbaettring av kallfiltrerbarhetsegenskaperna hos mellandestillat av raoolja.
FI914389A0 (fi) Foerfarande foer enzymatisk behandling av substrat.
FI860202A0 (fi) Foerfarande foer visning av film.

Legal Events

Date Code Title Description
MM Patent lapsed

Owner name: LIBBEY-OWENS FORD CO.