FI20146151A - Peililevy optista interferometriä varten ja optinen interferometri - Google Patents

Peililevy optista interferometriä varten ja optinen interferometri

Info

Publication number
FI20146151A
FI20146151A FI20146151A FI20146151A FI20146151A FI 20146151 A FI20146151 A FI 20146151A FI 20146151 A FI20146151 A FI 20146151A FI 20146151 A FI20146151 A FI 20146151A FI 20146151 A FI20146151 A FI 20146151A
Authority
FI
Finland
Prior art keywords
optical interferometer
mirror plate
interferometer
optical
mirror
Prior art date
Application number
FI20146151A
Other languages
English (en)
Swedish (sv)
Other versions
FI126791B (fi
Inventor
Aapo Varpula
Crister Holmlund
Anna Rissanen
Original Assignee
Teknologian Tutkimuskeskus Vtt Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teknologian Tutkimuskeskus Vtt Oy filed Critical Teknologian Tutkimuskeskus Vtt Oy
Priority to FI20146151A priority Critical patent/FI126791B/fi
Priority to CN201580077176.XA priority patent/CN107250741B/zh
Priority to US15/540,074 priority patent/US10088362B2/en
Priority to JP2017544031A priority patent/JP6255543B1/ja
Priority to EP15875303.8A priority patent/EP3241002B1/en
Priority to PCT/FI2015/050909 priority patent/WO2016107973A1/en
Publication of FI20146151A publication Critical patent/FI20146151A/fi
Application granted granted Critical
Publication of FI126791B publication Critical patent/FI126791B/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00596—Mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0297—Constructional arrangements for removing other types of optical noise or for performing calibration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/142—Coating structures, e.g. thin films multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
FI20146151A 2014-12-29 2014-12-29 Peililevy optista interferometriä varten, menetelmä peililevyn valmistamiseksi ja optinen interferometri FI126791B (fi)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FI20146151A FI126791B (fi) 2014-12-29 2014-12-29 Peililevy optista interferometriä varten, menetelmä peililevyn valmistamiseksi ja optinen interferometri
CN201580077176.XA CN107250741B (zh) 2014-12-29 2015-12-18 用于光学干涉计的镜板及光学干涉计
US15/540,074 US10088362B2 (en) 2014-12-29 2015-12-18 Mirror plate for an optical interferometer and an optical interferometer
JP2017544031A JP6255543B1 (ja) 2014-12-29 2015-12-18 光学的干渉計用ミラープレート、ミラープレートの製造方法及び光学的干渉計
EP15875303.8A EP3241002B1 (en) 2014-12-29 2015-12-18 Mirror plate for an optical interferometer and an optical interferometer
PCT/FI2015/050909 WO2016107973A1 (en) 2014-12-29 2015-12-18 Mirror plate for an optical interferometer and an optical interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20146151A FI126791B (fi) 2014-12-29 2014-12-29 Peililevy optista interferometriä varten, menetelmä peililevyn valmistamiseksi ja optinen interferometri

Publications (2)

Publication Number Publication Date
FI20146151A true FI20146151A (fi) 2016-06-30
FI126791B FI126791B (fi) 2017-05-31

Family

ID=56284340

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20146151A FI126791B (fi) 2014-12-29 2014-12-29 Peililevy optista interferometriä varten, menetelmä peililevyn valmistamiseksi ja optinen interferometri

Country Status (6)

Country Link
US (1) US10088362B2 (fi)
EP (1) EP3241002B1 (fi)
JP (1) JP6255543B1 (fi)
CN (1) CN107250741B (fi)
FI (1) FI126791B (fi)
WO (1) WO2016107973A1 (fi)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10260941B2 (en) * 2016-10-04 2019-04-16 Precitec Optronik Gmbh Chromatic confocal distance sensor
US10955336B2 (en) * 2017-08-26 2021-03-23 Innovative Micro Technology Gas sensor comprising a rotatable Fabry-Perot multilayer etalon
JP7313115B2 (ja) 2017-11-24 2023-07-24 浜松ホトニクス株式会社 光検査装置及び光検査方法
JP7043885B2 (ja) * 2018-02-26 2022-03-30 セイコーエプソン株式会社 分光装置、温度特性導出装置、分光システム、分光方法、及び温度特性導出方法
WO2020130940A1 (en) * 2018-12-21 2020-06-25 Ams Sensors Singapore Pte. Ltd. Linear temperature calibration compensation for spectrometer systems
DE102019210707A1 (de) * 2019-07-19 2021-01-21 Robert Bosch Gmbh Interferometereinrichtung und Verfahren zum Betreiben einer Interferometereinrichtung
JP7215777B2 (ja) * 2019-11-19 2023-01-31 深▲せん▼市海譜納米光学科技有限公司 調整可能なファブリーペロキャビティの自己校正方法及び自己校正機能を持つスペクトル収集装置
US11788887B2 (en) * 2020-03-27 2023-10-17 Nanohmics, Inc. Tunable notch filter

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62257032A (ja) * 1986-04-30 1987-11-09 Sharp Corp 可変干渉装置
US5550373A (en) 1994-12-30 1996-08-27 Honeywell Inc. Fabry-Perot micro filter-detector
US5940579A (en) 1997-02-26 1999-08-17 White Consolidated Industries, Inc. Capacitive leakage current cancellation for heating panel
JP5085101B2 (ja) * 2006-11-17 2012-11-28 オリンパス株式会社 可変分光素子
JP2008197362A (ja) * 2007-02-13 2008-08-28 Olympus Corp 可変分光素子
JP2011027780A (ja) 2009-07-21 2011-02-10 Denso Corp ファブリペロー干渉計及びその製造方法
JP5779852B2 (ja) * 2010-08-25 2015-09-16 セイコーエプソン株式会社 波長可変干渉フィルター、光モジュール、および光分析装置
JP5909850B2 (ja) * 2011-02-15 2016-04-27 セイコーエプソン株式会社 波長可変干渉フィルター、光モジュール、及び光分析装置
JP2012173314A (ja) * 2011-02-17 2012-09-10 Seiko Epson Corp 波長可変干渉フィルター、光モジュール、および電子機器
FI125897B (fi) * 2011-06-06 2016-03-31 Teknologian Tutkimuskeskus Vtt Oy Mikromekaanisesti säädettävä Fabry-Perot-interferometri ja menetelmä sen valmistamiseksi
JP5834718B2 (ja) 2011-09-29 2015-12-24 セイコーエプソン株式会社 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
DE102013201506A1 (de) * 2012-02-17 2013-08-22 Carl Zeiss Smt Gmbh Optisches Bauelement
FI125690B (fi) * 2013-06-18 2016-01-15 Teknologian Tutkimuskeskus Vtt Oy Peili Fabry-Perot-interferometriä varten ja menetelmä sen valmistamiseksi

Also Published As

Publication number Publication date
US20170350761A1 (en) 2017-12-07
WO2016107973A1 (en) 2016-07-07
FI126791B (fi) 2017-05-31
CN107250741A (zh) 2017-10-13
JP6255543B1 (ja) 2017-12-27
US10088362B2 (en) 2018-10-02
EP3241002A4 (en) 2018-01-10
CN107250741B (zh) 2018-06-05
EP3241002A1 (en) 2017-11-08
JP2018508826A (ja) 2018-03-29
EP3241002B1 (en) 2019-05-22

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