FI20146152A - Optinen mittausjärjestelmä - Google Patents

Optinen mittausjärjestelmä

Info

Publication number
FI20146152A
FI20146152A FI20146152A FI20146152A FI20146152A FI 20146152 A FI20146152 A FI 20146152A FI 20146152 A FI20146152 A FI 20146152A FI 20146152 A FI20146152 A FI 20146152A FI 20146152 A FI20146152 A FI 20146152A
Authority
FI
Finland
Prior art keywords
measurement system
optical measurement
optical
measurement
Prior art date
Application number
FI20146152A
Other languages
English (en)
Swedish (sv)
Other versions
FI126498B (fi
Inventor
Petri Lehtonen
Christer Holmlund
Original Assignee
Helmee Imaging Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helmee Imaging Oy filed Critical Helmee Imaging Oy
Priority to FI20146152A priority Critical patent/FI126498B/fi
Priority to JP2017535701A priority patent/JP2018500576A/ja
Priority to US15/540,500 priority patent/US20180003486A1/en
Priority to EP15813474.2A priority patent/EP3240993B1/en
Priority to PCT/FI2015/050873 priority patent/WO2016107969A1/en
Priority to CN201580071630.0A priority patent/CN107407555A/zh
Publication of FI20146152A publication Critical patent/FI20146152A/fi
Application granted granted Critical
Publication of FI126498B publication Critical patent/FI126498B/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8829—Shadow projection or structured background, e.g. for deflectometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FI20146152A 2014-12-29 2014-12-29 Optinen mittausjärjestelmä FI126498B (fi)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FI20146152A FI126498B (fi) 2014-12-29 2014-12-29 Optinen mittausjärjestelmä
JP2017535701A JP2018500576A (ja) 2014-12-29 2015-12-11 光学測定の構成
US15/540,500 US20180003486A1 (en) 2014-12-29 2015-12-11 An arrangement of optical measurement
EP15813474.2A EP3240993B1 (en) 2014-12-29 2015-12-11 An arrangement of optical measurement
PCT/FI2015/050873 WO2016107969A1 (en) 2014-12-29 2015-12-11 An arrangement of optical measurement
CN201580071630.0A CN107407555A (zh) 2014-12-29 2015-12-11 光学测量布置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20146152A FI126498B (fi) 2014-12-29 2014-12-29 Optinen mittausjärjestelmä

Publications (2)

Publication Number Publication Date
FI20146152A true FI20146152A (fi) 2016-06-30
FI126498B FI126498B (fi) 2017-01-13

Family

ID=54937105

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20146152A FI126498B (fi) 2014-12-29 2014-12-29 Optinen mittausjärjestelmä

Country Status (6)

Country Link
US (1) US20180003486A1 (fi)
EP (1) EP3240993B1 (fi)
JP (1) JP2018500576A (fi)
CN (1) CN107407555A (fi)
FI (1) FI126498B (fi)
WO (1) WO2016107969A1 (fi)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7231432B2 (ja) * 2019-02-15 2023-03-01 株式会社キーエンス 画像処理装置
CN112213332A (zh) * 2019-07-12 2021-01-12 无锡先导智能装备股份有限公司 表面检测设备
FI130408B (fi) 2022-01-18 2023-08-17 Helmee Imaging Oy Järjestely ja vastaava menetelmä optisia mittauksia varten

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030067538A1 (en) * 2001-10-04 2003-04-10 Myers Kenneth J. System and method for three-dimensional data acquisition
US7830528B2 (en) * 2005-12-14 2010-11-09 Koh Young Technology, Inc. 3D image measuring apparatus and method thereof
JP5174684B2 (ja) * 2006-03-14 2013-04-03 プライムセンス リミテッド スペックル・パターンを用いた三次元検出
DE102006050379A1 (de) * 2006-10-25 2008-05-08 Norbert Prof. Dr. Link Verfahren und Vorrichtung zur Überwachung eines Raumvolumens sowie Kalibrierverfahren
DE102008006449A1 (de) * 2008-01-29 2009-07-30 Kaba Gallenschütz GmbH Verfahren und Vorrichtung zur Überwachung eines Raumvolumens
US20100259746A1 (en) * 2009-04-10 2010-10-14 Omron Corporation Profilometer
DE102009059794A1 (de) * 2009-12-21 2011-06-22 Siemens Aktiengesellschaft, 80333 Kamera-Projektor-System und ein Verfahren zum Auslösen einer Kamera
JP5170154B2 (ja) * 2010-04-26 2013-03-27 オムロン株式会社 形状計測装置およびキャリブレーション方法
JP5917116B2 (ja) * 2011-12-06 2016-05-11 キヤノン株式会社 情報処理装置、情報処理装置の制御方法、およびプログラム
FI125320B (fi) 2012-01-05 2015-08-31 Helmee Imaging Oy Järjestely ja vastaava menetelmä optisia mittauksia varten
CN104919272B (zh) * 2012-10-29 2018-08-03 7D外科有限公司 集成照明及光学表面拓扑检测系统及其使用方法
JP6088855B2 (ja) * 2013-02-28 2017-03-01 モレックス エルエルシー 外観検査装置及び外観検査方法
WO2016092451A1 (en) * 2014-12-09 2016-06-16 Basf Se Optical detector

Also Published As

Publication number Publication date
EP3240993B1 (en) 2018-12-05
JP2018500576A (ja) 2018-01-11
CN107407555A (zh) 2017-11-28
EP3240993A1 (en) 2017-11-08
FI126498B (fi) 2017-01-13
US20180003486A1 (en) 2018-01-04
WO2016107969A1 (en) 2016-07-07

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