FI20125757A - Parannettu resonaattori - Google Patents

Parannettu resonaattori

Info

Publication number
FI20125757A
FI20125757A FI20125757A FI20125757A FI20125757A FI 20125757 A FI20125757 A FI 20125757A FI 20125757 A FI20125757 A FI 20125757A FI 20125757 A FI20125757 A FI 20125757A FI 20125757 A FI20125757 A FI 20125757A
Authority
FI
Finland
Prior art keywords
improved resonator
resonator
improved
Prior art date
Application number
FI20125757A
Other languages
English (en)
Swedish (sv)
Other versions
FI124794B (fi
Inventor
Heikki Kuisma
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Priority to FI20125757A priority Critical patent/FI124794B/fi
Priority to PCT/FI2013/050696 priority patent/WO2014001634A1/en
Priority to EP13809714.2A priority patent/EP2867154B1/en
Priority to JP2015519262A priority patent/JP6011725B2/ja
Priority to CN201380034908.8A priority patent/CN104411618B/zh
Priority to US13/927,404 priority patent/US8988017B2/en
Priority to TW102123158A priority patent/TWI596885B/zh
Publication of FI20125757A publication Critical patent/FI20125757A/fi
Application granted granted Critical
Publication of FI124794B publication Critical patent/FI124794B/fi
Priority to US14/613,402 priority patent/US9611139B2/en

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
    • H02N11/006—Motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
FI20125757A 2012-06-29 2012-06-29 Parannettu resonaattori FI124794B (fi)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FI20125757A FI124794B (fi) 2012-06-29 2012-06-29 Parannettu resonaattori
PCT/FI2013/050696 WO2014001634A1 (en) 2012-06-29 2013-06-25 An improved resonator
EP13809714.2A EP2867154B1 (en) 2012-06-29 2013-06-25 An improved resonator
JP2015519262A JP6011725B2 (ja) 2012-06-29 2013-06-25 改良された共振器
CN201380034908.8A CN104411618B (zh) 2012-06-29 2013-06-25 改良的共振器
US13/927,404 US8988017B2 (en) 2012-06-29 2013-06-26 Resonator
TW102123158A TWI596885B (zh) 2012-06-29 2013-06-28 控制元件、共振器器件及用於控制機械共振器之操作的方法
US14/613,402 US9611139B2 (en) 2012-06-29 2015-02-04 Resonator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20125757A FI124794B (fi) 2012-06-29 2012-06-29 Parannettu resonaattori
FI20125757 2012-06-29

Publications (2)

Publication Number Publication Date
FI20125757A true FI20125757A (fi) 2014-03-04
FI124794B FI124794B (fi) 2015-01-30

Family

ID=49777410

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20125757A FI124794B (fi) 2012-06-29 2012-06-29 Parannettu resonaattori

Country Status (7)

Country Link
US (1) US8988017B2 (fi)
EP (1) EP2867154B1 (fi)
JP (1) JP6011725B2 (fi)
CN (1) CN104411618B (fi)
FI (1) FI124794B (fi)
TW (1) TWI596885B (fi)
WO (1) WO2014001634A1 (fi)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014001635A1 (en) 2012-06-29 2014-01-03 Murata Manufacturing Co., Ltd. Improved vibratory gyroscope

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9995715B2 (en) * 2014-04-13 2018-06-12 Rheonics Gmbh Electromagnetic transducer for exciting and sensing vibrations of resonant structures
GB2534562B (en) * 2015-01-26 2017-11-29 Atlantic Inertial Systems Ltd Gyroscope loop filter
US20170011418A1 (en) * 2015-05-29 2017-01-12 Claude Denton System and method for account ingestion
KR200484897Y1 (ko) * 2015-08-13 2017-11-20 주식회사 흥환기계 공작기계의 이동수단 제어장치
ITUA20162173A1 (it) 2016-03-31 2017-10-01 St Microelectronics Srl Sensore accelerometrico mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento
RU2652639C1 (ru) * 2017-02-27 2018-04-28 Арина Валерьевна Старцева Способ определения коэффициентов модели кельвина-фойгта для клеевого соединения микромеханического резонатора с основанием
GB2561889B (en) 2017-04-27 2022-10-12 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer with electrostatic control of proof mass
US10956768B2 (en) * 2019-04-22 2021-03-23 Honeywell International Inc. Feedback cooling and detection for optomechanical devices
US11287441B2 (en) * 2019-11-07 2022-03-29 Honeywell International Inc. Resonator including one or more mechanical beams with added mass
FR3108897B1 (fr) * 2020-04-03 2022-04-08 Commissariat Energie Atomique Procédé de commande d’un capteur
CN114859077A (zh) * 2022-05-12 2022-08-05 东南大学 一种基于奇异点的高灵敏度微加速度计及其使用方法

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US4197478A (en) * 1979-01-25 1980-04-08 Southwest Research Institute Electronically tunable resonant accelerometer
US6301965B1 (en) * 1999-12-14 2001-10-16 Sandia Corporation Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state
GB0000619D0 (en) * 2000-01-13 2000-03-01 British Aerospace Accelerometer
JP3603746B2 (ja) * 2000-05-02 2004-12-22 株式会社村田製作所 振動子
US6532096B2 (en) * 2001-05-07 2003-03-11 Bandwidth 9, Inc. System and method for canceling ringing in a MEMS device
US7047097B2 (en) * 2001-12-12 2006-05-16 Texas Instruments Incorporated High performance controller for shifting resonance in micro-electro-mechanical systems (MEMS) devices
GB0206510D0 (en) * 2002-03-20 2002-05-01 Qinetiq Ltd Micro-Electromechanical systems
US6861914B2 (en) * 2002-09-30 2005-03-01 The United States Of America As Represented By The Secretary Of The Navy Monolithic vibration isolation and an ultra-high Q mechanical resonator
DE112004000934B4 (de) * 2003-07-30 2008-06-05 Murata Mfg. Co., Ltd., Nagaokakyo Sensor für eine mechanische Grösse
FR2858854B1 (fr) * 2003-08-13 2005-12-16 Sercel Rech Const Elect Accelerometre a vibrations parasites reduites par rappel ameliore
CN2657007Y (zh) * 2003-10-17 2004-11-17 沈阳工业学院 电容式硅微加速度计装置及电路
US7669475B2 (en) * 2006-09-28 2010-03-02 Rosemount Aerospace Inc. System and method for measuring rotational movement about an axis
JP4882813B2 (ja) * 2007-03-19 2012-02-22 セイコーエプソン株式会社 駆動装置、物理量測定装置及び電子機器
US8026771B2 (en) * 2006-11-27 2011-09-27 Seiko Epson Corporation Driver device, physical quantity measuring device, and electronic instrument
JP4576441B2 (ja) * 2008-03-21 2010-11-10 日立オートモティブシステムズ株式会社 角速度センサ
JP5267023B2 (ja) * 2008-10-01 2013-08-21 株式会社村田製作所 複合センサ
TWI414478B (zh) * 2010-09-09 2013-11-11 Domintech Co Ltd 可同時量測加速度及壓力之微機電感測器
FI124624B (fi) * 2012-06-29 2014-11-14 Murata Manufacturing Co Parannettu värähtelygyroskooppi
FI125238B (fi) * 2012-06-29 2015-07-31 Murata Manufacturing Co Parannettu värähtelygyroskooppi

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014001635A1 (en) 2012-06-29 2014-01-03 Murata Manufacturing Co., Ltd. Improved vibratory gyroscope

Also Published As

Publication number Publication date
CN104411618B (zh) 2017-06-06
JP2015528108A (ja) 2015-09-24
EP2867154A4 (en) 2016-03-16
JP6011725B2 (ja) 2016-10-19
EP2867154A1 (en) 2015-05-06
US8988017B2 (en) 2015-03-24
TWI596885B (zh) 2017-08-21
WO2014001634A1 (en) 2014-01-03
EP2867154B1 (en) 2017-04-05
FI124794B (fi) 2015-01-30
TW201414174A (zh) 2014-04-01
US20140001984A1 (en) 2014-01-02
CN104411618A (zh) 2015-03-11

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Owner name: MURATA MANUFACTURING CO., LTD.

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