FI20125629A - Mikromekaanisesti säädettävä Fabry-Perot interferometrijärjestelmä ja menetelmä tämän aikaansaamiseksi - Google Patents

Mikromekaanisesti säädettävä Fabry-Perot interferometrijärjestelmä ja menetelmä tämän aikaansaamiseksi Download PDF

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Publication number
FI20125629A
FI20125629A FI20125629A FI20125629A FI20125629A FI 20125629 A FI20125629 A FI 20125629A FI 20125629 A FI20125629 A FI 20125629A FI 20125629 A FI20125629 A FI 20125629A FI 20125629 A FI20125629 A FI 20125629A
Authority
FI
Finland
Prior art keywords
interferometer
producing
interferometer system
perot interferometer
tunable fabry
Prior art date
Application number
FI20125629A
Other languages
English (en)
Swedish (sv)
Other versions
FI125368B (fi
Inventor
Jarkko Antila
Martti Blomberg
Original Assignee
Teknologian Tutkimuskeskus Vtt Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teknologian Tutkimuskeskus Vtt Oy filed Critical Teknologian Tutkimuskeskus Vtt Oy
Priority to FI20125629A priority Critical patent/FI125368B/fi
Priority to EP13170194.8A priority patent/EP2672243B1/en
Priority to JP2013117205A priority patent/JP5512019B2/ja
Priority to US13/911,319 priority patent/US8654347B2/en
Priority to CN201310229267.3A priority patent/CN103487931B/zh
Publication of FI20125629A publication Critical patent/FI20125629A/fi
Application granted granted Critical
Publication of FI125368B publication Critical patent/FI125368B/fi

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Micromachines (AREA)
  • Spectrometry And Color Measurement (AREA)
FI20125629A 2012-06-08 2012-06-08 Mikromekaanisesti säädettävä Fabry-Perot interferometrijärjestelmä ja menetelmä tämän aikaansaamiseksi FI125368B (fi)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FI20125629A FI125368B (fi) 2012-06-08 2012-06-08 Mikromekaanisesti säädettävä Fabry-Perot interferometrijärjestelmä ja menetelmä tämän aikaansaamiseksi
EP13170194.8A EP2672243B1 (en) 2012-06-08 2013-06-03 Micromechanical tunable Fabry-Perot interferometer arrangement and a method for producing the same
JP2013117205A JP5512019B2 (ja) 2012-06-08 2013-06-03 微小機械的で整調可能なファブリ・ペロー干渉計配列物、および同一物を製造するための方法
US13/911,319 US8654347B2 (en) 2012-06-08 2013-06-06 Micromechanical tunable Fabry-Perot interferometer arrangement and a method for producing the same
CN201310229267.3A CN103487931B (zh) 2012-06-08 2013-06-08 微机械可调法布里‑珀罗干涉仪装置及其生产方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20125629 2012-06-08
FI20125629A FI125368B (fi) 2012-06-08 2012-06-08 Mikromekaanisesti säädettävä Fabry-Perot interferometrijärjestelmä ja menetelmä tämän aikaansaamiseksi

Publications (2)

Publication Number Publication Date
FI20125629A true FI20125629A (fi) 2013-12-09
FI125368B FI125368B (fi) 2015-09-15

Family

ID=48534284

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20125629A FI125368B (fi) 2012-06-08 2012-06-08 Mikromekaanisesti säädettävä Fabry-Perot interferometrijärjestelmä ja menetelmä tämän aikaansaamiseksi

Country Status (5)

Country Link
US (1) US8654347B2 (fi)
EP (1) EP2672243B1 (fi)
JP (1) JP5512019B2 (fi)
CN (1) CN103487931B (fi)
FI (1) FI125368B (fi)

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Publication number Priority date Publication date Assignee Title
CN103969822B (zh) * 2014-05-16 2016-02-10 武汉理工光科股份有限公司 电磁驱动型波长可调法布里-珀罗光滤波器
WO2015197920A1 (en) * 2014-06-27 2015-12-30 Spectral Engines Oy A method for determining the spectral scale of a spectrometer and apparatus
US20170350760A1 (en) 2014-11-06 2017-12-07 Spectral Engines Oy Optical measurement system
TWI581004B (zh) 2015-11-18 2017-05-01 財團法人工業技術研究院 可調式光學裝置
JP2017173687A (ja) * 2016-03-25 2017-09-28 パイオニア株式会社 波長選択装置
WO2017180128A1 (en) * 2016-04-14 2017-10-19 Halliburton Energy Services, Inc. Fabry-perot based optical computing
WO2017204326A1 (ja) 2016-05-27 2017-11-30 浜松ホトニクス株式会社 ファブリペロー干渉フィルタの製造方法
JP6341959B2 (ja) 2016-05-27 2018-06-13 浜松ホトニクス株式会社 ファブリペロー干渉フィルタの製造方法
US11054560B2 (en) * 2016-07-11 2021-07-06 Hamamatsu Photonics K.K Fabry-Perot interference filter and light-detecting device
FI3505987T3 (fi) 2016-08-24 2023-12-19 Hamamatsu Photonics Kk Fabry-perot-häiriösuodatin
TWI612281B (zh) 2016-09-26 2018-01-21 財團法人工業技術研究院 干涉分光元件封裝裝置
EP3444578B1 (en) 2017-08-16 2023-08-02 Spectral Engines OY Method and system for analysing a chemical composition of a target
US11125636B2 (en) * 2018-06-07 2021-09-21 Baker Hughes, A Ge Company, Llc Quadrature detection for optical MEMS pressure gauge
US10830641B2 (en) 2018-07-17 2020-11-10 Hong Kong Applied Science And Technology Research Institute Co., Ltd. Compact spectrometer having reflective wedge structure
DE102018217996A1 (de) 2018-10-22 2020-04-23 Robert Bosch Gmbh Interferometerelement, Spektrometer und Verfahren zum Betreiben eines Interferometers
US11698303B2 (en) 2018-12-28 2023-07-11 Spectral Engines Oy Method and system for analysing a chemical composition of a target using a Fabry-Perot interferometer
DE102019212986A1 (de) * 2019-08-29 2021-03-04 Robert Bosch Gmbh Fabry-Pérot-Interferometer und entsprechendes Herstellungsverfahren
DE102019217262A1 (de) 2019-11-08 2021-05-12 Robert Bosch Gmbh Sensorvorrichtung und Verfahren zum Sensieren von Proben
US11215504B2 (en) 2020-04-01 2022-01-04 Hong Kong Applied Science And Technology Research Institute Co., Ltd. High-throughput compact static-Fourier-transform spectrometer
WO2024134264A1 (en) 2022-12-21 2024-06-27 Bosch Car Multimedia Portugal, S.A. Microfabricated top-hat tunable filter

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI95838C (fi) 1994-02-17 1996-03-25 Valtion Teknillinen Sähköisesti säädettävä pintamikromekaaninen Fabry-Perot interferometri käytettäväksi optisen anturin, esimerkiksi Fabry-Perot interferometrin kanssa
US20020191268A1 (en) 2001-05-17 2002-12-19 Optical Coating Laboratory, Inc, A Delaware Corporation Variable multi-cavity optical device
US6765679B2 (en) * 2001-05-30 2004-07-20 Jds Uniphase Corporation Multi-cavity interferometer with dispersion compensating resonators
AU2002219261A1 (en) * 2001-12-18 2003-06-30 Nokia Corporation Electrically tunable interferometric filter
AU2002950739A0 (en) * 2002-08-13 2002-09-12 The University Of Western Australia A resonant cavity enhanced device and a method for fabricating same
JP2005031326A (ja) * 2003-07-11 2005-02-03 Nippon Telegr & Teleph Corp <Ntt> 光フィルター
US7844145B1 (en) 2008-04-14 2010-11-30 The United States Of America As Represented By The Secretary Of The Navy MEMS-based multi-channel Fabry-Perot interferometer system with increased tuning range and resolution
FI124072B (fi) * 2009-05-29 2014-03-14 Valtion Teknillinen Mikromekaaninen säädettävä Fabry-Perot -interferometri, välituote ja menetelmä niiden valmistamiseksi
FI20095976A0 (fi) * 2009-09-24 2009-09-24 Valtion Teknillinen Mikromekaanisesti säädettävä Fabry-Perot -interferometri ja menetelmä sen tuottamiseksi
JP2013113900A (ja) * 2011-11-25 2013-06-10 Seiko Epson Corp 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
US9103727B2 (en) * 2012-01-03 2015-08-11 The Regents Of The University Of Michigan Composite Fabry-Pérot sensor

Also Published As

Publication number Publication date
FI125368B (fi) 2015-09-15
CN103487931B (zh) 2017-11-14
EP2672243A1 (en) 2013-12-11
US8654347B2 (en) 2014-02-18
JP5512019B2 (ja) 2014-06-04
US20130329232A1 (en) 2013-12-12
EP2672243B1 (en) 2019-08-07
CN103487931A (zh) 2014-01-01
JP2013257561A (ja) 2013-12-26

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