FI20125629A - Micromechanically tunable Fabry-Perot interferometer system and method for producing this - Google Patents

Micromechanically tunable Fabry-Perot interferometer system and method for producing this Download PDF

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Publication number
FI20125629A
FI20125629A FI20125629A FI20125629A FI20125629A FI 20125629 A FI20125629 A FI 20125629A FI 20125629 A FI20125629 A FI 20125629A FI 20125629 A FI20125629 A FI 20125629A FI 20125629 A FI20125629 A FI 20125629A
Authority
FI
Finland
Prior art keywords
interferometer
producing
interferometer system
perot interferometer
tunable fabry
Prior art date
Application number
FI20125629A
Other languages
Finnish (fi)
Swedish (sv)
Other versions
FI125368B (en
Inventor
Jarkko Antila
Martti Blomberg
Original Assignee
Teknologian Tutkimuskeskus Vtt Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teknologian Tutkimuskeskus Vtt Oy filed Critical Teknologian Tutkimuskeskus Vtt Oy
Priority to FI20125629A priority Critical patent/FI125368B/en
Priority to EP13170194.8A priority patent/EP2672243B1/en
Priority to JP2013117205A priority patent/JP5512019B2/en
Priority to US13/911,319 priority patent/US8654347B2/en
Priority to CN201310229267.3A priority patent/CN103487931B/en
Publication of FI20125629A publication Critical patent/FI20125629A/en
Application granted granted Critical
Publication of FI125368B publication Critical patent/FI125368B/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Micromachines (AREA)

Abstract

The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. The prior art interferometers have a temperature drift which causes inaccuracy and requirement for complicated packaging. According to the invention the interferometer arrangement has both an electrically tuneable interferometer and a reference interferometer on the same substrate. The temperature drift is measured with the reference interferometer and this information is used for compensating the measurement with the tuneable interferometer. The measurement accuracy and stability can thus be improved and requirements for packaging are lighter.
FI20125629A 2012-06-08 2012-06-08 Micromechanically adjustable Fabry-Perot interferometer system and method for achieving this FI125368B (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FI20125629A FI125368B (en) 2012-06-08 2012-06-08 Micromechanically adjustable Fabry-Perot interferometer system and method for achieving this
EP13170194.8A EP2672243B1 (en) 2012-06-08 2013-06-03 Micromechanical tunable Fabry-Perot interferometer arrangement and a method for producing the same
JP2013117205A JP5512019B2 (en) 2012-06-08 2013-06-03 Micro-mechanically tunable Fabry-Perot interferometer array and method for manufacturing the same
US13/911,319 US8654347B2 (en) 2012-06-08 2013-06-06 Micromechanical tunable Fabry-Perot interferometer arrangement and a method for producing the same
CN201310229267.3A CN103487931B (en) 2012-06-08 2013-06-08 Micromechanics is adjustable fabry perot interferometer device and its production method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20125629 2012-06-08
FI20125629A FI125368B (en) 2012-06-08 2012-06-08 Micromechanically adjustable Fabry-Perot interferometer system and method for achieving this

Publications (2)

Publication Number Publication Date
FI20125629A true FI20125629A (en) 2013-12-09
FI125368B FI125368B (en) 2015-09-15

Family

ID=48534284

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20125629A FI125368B (en) 2012-06-08 2012-06-08 Micromechanically adjustable Fabry-Perot interferometer system and method for achieving this

Country Status (5)

Country Link
US (1) US8654347B2 (en)
EP (1) EP2672243B1 (en)
JP (1) JP5512019B2 (en)
CN (1) CN103487931B (en)
FI (1) FI125368B (en)

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CN103969822B (en) * 2014-05-16 2016-02-10 武汉理工光科股份有限公司 electromagnetic drive type wavelength tunable Fabry-Perot optical filter
EP3161436B1 (en) * 2014-06-27 2024-03-20 Spectral Engines OY A method for determining the spectral scale of a spectrometer and apparatus
CN107250740A (en) 2014-11-06 2017-10-13 光谱引擎股份公司 optical measuring system
TWI581004B (en) 2015-11-18 2017-05-01 財團法人工業技術研究院 Tunable optical device
JP2017173687A (en) * 2016-03-25 2017-09-28 パイオニア株式会社 Wavelength selection device
WO2017180128A1 (en) * 2016-04-14 2017-10-19 Halliburton Energy Services, Inc. Fabry-perot based optical computing
JP6341959B2 (en) 2016-05-27 2018-06-13 浜松ホトニクス株式会社 Manufacturing method of Fabry-Perot interference filter
EP3467567B1 (en) * 2016-05-27 2024-02-07 Hamamatsu Photonics K.K. Production method for fabry-perot interference filter
US11054560B2 (en) * 2016-07-11 2021-07-06 Hamamatsu Photonics K.K Fabry-Perot interference filter and light-detecting device
US10724902B2 (en) 2016-08-24 2020-07-28 Hamamatsu Photonics K.K. Fabry-Perot interference filter
TWI612281B (en) 2016-09-26 2018-01-21 財團法人工業技術研究院 Interference splitter package device
EP3444578B1 (en) 2017-08-16 2023-08-02 Spectral Engines OY Method and system for analysing a chemical composition of a target
US11125636B2 (en) * 2018-06-07 2021-09-21 Baker Hughes, A Ge Company, Llc Quadrature detection for optical MEMS pressure gauge
US10830641B2 (en) 2018-07-17 2020-11-10 Hong Kong Applied Science And Technology Research Institute Co., Ltd. Compact spectrometer having reflective wedge structure
DE102018217996A1 (en) * 2018-10-22 2020-04-23 Robert Bosch Gmbh Interferometer element, spectrometer and method for operating an interferometer
US11698303B2 (en) 2018-12-28 2023-07-11 Spectral Engines Oy Method and system for analysing a chemical composition of a target using a Fabry-Perot interferometer
DE102019212986A1 (en) * 2019-08-29 2021-03-04 Robert Bosch Gmbh Fabry-Pérot interferometer and related manufacturing process
DE102019217262A1 (en) 2019-11-08 2021-05-12 Robert Bosch Gmbh Sensor device and method for sensing samples
US11215504B2 (en) 2020-04-01 2022-01-04 Hong Kong Applied Science And Technology Research Institute Co., Ltd. High-throughput compact static-Fourier-transform spectrometer

Family Cites Families (11)

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Publication number Priority date Publication date Assignee Title
FI95838C (en) 1994-02-17 1996-03-25 Valtion Teknillinen Electrically controllable surface micromechanical Fabry-Perot interferometer for use with an optical sensor, for example a Fabry-Perot interferometer
US20020191268A1 (en) 2001-05-17 2002-12-19 Optical Coating Laboratory, Inc, A Delaware Corporation Variable multi-cavity optical device
US6765679B2 (en) * 2001-05-30 2004-07-20 Jds Uniphase Corporation Multi-cavity interferometer with dispersion compensating resonators
AU2002219261A1 (en) * 2001-12-18 2003-06-30 Nokia Corporation Electrically tunable interferometric filter
AU2002950739A0 (en) * 2002-08-13 2002-09-12 The University Of Western Australia A resonant cavity enhanced device and a method for fabricating same
JP2005031326A (en) * 2003-07-11 2005-02-03 Nippon Telegr & Teleph Corp <Ntt> Optical filter
US7844145B1 (en) 2008-04-14 2010-11-30 The United States Of America As Represented By The Secretary Of The Navy MEMS-based multi-channel Fabry-Perot interferometer system with increased tuning range and resolution
FI124072B (en) * 2009-05-29 2014-03-14 Valtion Teknillinen Micromechanical Fabry-Perot Adjustable Interferometer, Intermediate, and Method of Manufacture
FI20095976A0 (en) * 2009-09-24 2009-09-24 Valtion Teknillinen Micromechanically adjustable Fabry-Perot interferometer and method for its production
JP2013113900A (en) * 2011-11-25 2013-06-10 Seiko Epson Corp Wavelength variable interference filter, optical filter device, optical module, and electronic equipment
US9103727B2 (en) * 2012-01-03 2015-08-11 The Regents Of The University Of Michigan Composite Fabry-Pérot sensor

Also Published As

Publication number Publication date
EP2672243B1 (en) 2019-08-07
FI125368B (en) 2015-09-15
CN103487931A (en) 2014-01-01
CN103487931B (en) 2017-11-14
US8654347B2 (en) 2014-02-18
EP2672243A1 (en) 2013-12-11
JP2013257561A (en) 2013-12-26
US20130329232A1 (en) 2013-12-12
JP5512019B2 (en) 2014-06-04

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