WO2010006764A3 - Fibre-optic multiwavelength interferometer (mwli) for the absolute measurement of distances and topologies for surfaces at a large operating distance - Google Patents
Fibre-optic multiwavelength interferometer (mwli) for the absolute measurement of distances and topologies for surfaces at a large operating distance Download PDFInfo
- Publication number
- WO2010006764A3 WO2010006764A3 PCT/EP2009/005111 EP2009005111W WO2010006764A3 WO 2010006764 A3 WO2010006764 A3 WO 2010006764A3 EP 2009005111 W EP2009005111 W EP 2009005111W WO 2010006764 A3 WO2010006764 A3 WO 2010006764A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- fibre
- optic
- distances
- mwli
- topologies
- Prior art date
Links
- 238000005259 measurement Methods 0.000 title 1
- 230000003287 optical effect Effects 0.000 abstract 4
- 239000000835 fiber Substances 0.000 abstract 2
- 230000005855 radiation Effects 0.000 abstract 2
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
Abstract
The invention relates to a sensor device for measuring distances with at least two radiation sources (101) which are designed to produce optical signals (112) at different wavelengths and the optical signals of which can be supplied to a sensor head (104; 124) via a fibre-optic coupling (102, 103), wherein the optical signals (112) for the at least two radiation sources (101) can be brought together in a common fibre (110) by means of at least one optical multiplexer device (102) and can be supplied to the sensor head (104; 124) by means of said fibre (110).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008033942A DE102008033942B3 (en) | 2008-07-18 | 2008-07-18 | Fiber-optic multi-wavelength interferometer (MWLI) for the absolute measurement of distances and topologies of surfaces at a large working distance |
DE102008033942.3 | 2008-07-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2010006764A2 WO2010006764A2 (en) | 2010-01-21 |
WO2010006764A3 true WO2010006764A3 (en) | 2010-11-18 |
Family
ID=41395556
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2009/005111 WO2010006764A2 (en) | 2008-07-18 | 2009-07-14 | Fibre-optic multiwavelength interferometer (mwli) for the absolute measurement of distances and topologies for surfaces at a large operating distance |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102008033942B3 (en) |
WO (1) | WO2010006764A2 (en) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011011065B4 (en) | 2011-02-11 | 2013-04-04 | Luphos Gmbh | Method and device for the high-precision measurement of surfaces |
DE102012212663A1 (en) | 2012-07-19 | 2014-01-23 | Carl Zeiss Smt Gmbh | Microlithographic projection exposure apparatus with an optical distance measuring device |
DE102012017015B4 (en) | 2012-08-20 | 2015-03-19 | Luphos Gmbh | Method and device for the high-precision measurement of surfaces |
EP2806246B1 (en) | 2013-05-24 | 2019-11-20 | Attocube Systems AG | Dual laser interferometer |
DE102015201754A1 (en) | 2015-02-02 | 2016-08-04 | Picofine GmbH | Device and method for adjusting a laser interferometer |
DE102015209567B3 (en) * | 2015-05-26 | 2016-10-27 | Carl Zeiss Industrielle Messtechnik Gmbh | Optical multi-wavelength sensor for measuring distances to a surface and corresponding measuring device |
DE202016100211U1 (en) | 2016-01-18 | 2017-04-19 | Friedrich Vollmer Feinmessgerätebau Gmbh | distance measuring device |
DE102016100745B3 (en) * | 2016-01-18 | 2017-03-09 | Friedrich Vollmer Feinmessgerätebau Gmbh | Method for optical distance measurement and a distance measuring device |
EP3401634A1 (en) | 2017-05-12 | 2018-11-14 | Taylor Hobson Limited | Distance measuring assembly for determining the distance to an object |
EP3789727B1 (en) | 2019-09-04 | 2024-04-10 | Taylor Hobson Limited | Interferometric measuring device |
GB2622565A (en) | 2022-07-15 | 2024-03-27 | Taylor Hobson Ltd | A collision protection apparatus |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2848664A1 (en) * | 2002-12-11 | 2004-06-18 | Micro Module | Position and reflectivity meter for use in photometry and metrology has a light source with at least two different wavelengths that are processed separately by a measurement system |
WO2005001445A2 (en) * | 2001-12-18 | 2005-01-06 | Massachusetts Institute Of Technology | Systems and methods for phase measurements |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4552457A (en) * | 1983-02-01 | 1985-11-12 | Giallorenzi Thomas G | Fiber optic interferometer using two wavelengths or variable wavelength |
JPS62106306A (en) * | 1985-11-01 | 1987-05-16 | Olympus Optical Co Ltd | Multi-wavelength interferometer |
DE4139865C2 (en) * | 1991-12-03 | 1994-03-10 | Deutsche Aerospace | Tunable two-wavelength laser for super heterodyne interferometers |
TW367407B (en) * | 1997-12-22 | 1999-08-21 | Asml Netherlands Bv | Interferometer system with two wavelengths, and lithographic apparatus provided with such a system |
US6781699B2 (en) * | 2002-10-22 | 2004-08-24 | Corning-Tropel | Two-wavelength confocal interferometer for measuring multiple surfaces |
DE102005042733B3 (en) * | 2005-09-05 | 2007-01-25 | Universität Stuttgart | Interferometric method e.g. for recording of separation and form and optical coherence tomography (OCT), involves having multi-wavelength source or tunable source and imaging on receiver by focusing systems |
JP2007047043A (en) * | 2005-08-10 | 2007-02-22 | Pentax Corp | Multi-wavelength interferometer |
JP5558005B2 (en) * | 2006-01-23 | 2014-07-23 | ザイゴ コーポレーション | Interferometer system for monitoring objects |
-
2008
- 2008-07-18 DE DE102008033942A patent/DE102008033942B3/en active Active
-
2009
- 2009-07-14 WO PCT/EP2009/005111 patent/WO2010006764A2/en active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005001445A2 (en) * | 2001-12-18 | 2005-01-06 | Massachusetts Institute Of Technology | Systems and methods for phase measurements |
FR2848664A1 (en) * | 2002-12-11 | 2004-06-18 | Micro Module | Position and reflectivity meter for use in photometry and metrology has a light source with at least two different wavelengths that are processed separately by a measurement system |
Also Published As
Publication number | Publication date |
---|---|
DE102008033942B3 (en) | 2010-04-08 |
WO2010006764A2 (en) | 2010-01-21 |
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