WO2010006764A3 - Interféromètre multi-longueurs d'ondes à fibres optiques pour la mesure absolue de distances et topologies de surfaces pour de grandes distances de travail - Google Patents

Interféromètre multi-longueurs d'ondes à fibres optiques pour la mesure absolue de distances et topologies de surfaces pour de grandes distances de travail Download PDF

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Publication number
WO2010006764A3
WO2010006764A3 PCT/EP2009/005111 EP2009005111W WO2010006764A3 WO 2010006764 A3 WO2010006764 A3 WO 2010006764A3 EP 2009005111 W EP2009005111 W EP 2009005111W WO 2010006764 A3 WO2010006764 A3 WO 2010006764A3
Authority
WO
WIPO (PCT)
Prior art keywords
fibre
optic
distances
mwli
topologies
Prior art date
Application number
PCT/EP2009/005111
Other languages
German (de)
English (en)
Other versions
WO2010006764A2 (fr
Inventor
Ralf Nicolaus
Jürgen Petter
Theo Tschudi
André Noack
Original Assignee
Luphos Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Luphos Gmbh filed Critical Luphos Gmbh
Publication of WO2010006764A2 publication Critical patent/WO2010006764A2/fr
Publication of WO2010006764A3 publication Critical patent/WO2010006764A3/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un système de détection pour la mesure de distances comprenant au moins deux sources de rayonnement (101) de longueurs d'ondes différentes destinées à la génération de signaux optiques (112), lesdits signaux optiques pouvant être transmis à une tête d'analyse (104; 124) par un couplage par fibres optiques (102, 103), les signaux optiques (112) desdites au moins deux sources de rayonnement (101) étant aptes à être réunis dans une fibre commune (110) par au moins un dispositif multiplexeur optique (102) puis transmis à la tête d'analyse (104; 124) par cette fibre (110).
PCT/EP2009/005111 2008-07-18 2009-07-14 Interféromètre multi-longueurs d'ondes à fibres optiques pour la mesure absolue de distances et topologies de surfaces pour de grandes distances de travail WO2010006764A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008033942A DE102008033942B3 (de) 2008-07-18 2008-07-18 Faseroptisches Mehrwellenlängeninterferometer (MWLI) zur absoluten Vermessung von Abständen und Topologien von Oberflächen in großem Arbeitsabstand
DE102008033942.3 2008-07-18

Publications (2)

Publication Number Publication Date
WO2010006764A2 WO2010006764A2 (fr) 2010-01-21
WO2010006764A3 true WO2010006764A3 (fr) 2010-11-18

Family

ID=41395556

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2009/005111 WO2010006764A2 (fr) 2008-07-18 2009-07-14 Interféromètre multi-longueurs d'ondes à fibres optiques pour la mesure absolue de distances et topologies de surfaces pour de grandes distances de travail

Country Status (2)

Country Link
DE (1) DE102008033942B3 (fr)
WO (1) WO2010006764A2 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011011065B4 (de) 2011-02-11 2013-04-04 Luphos Gmbh Verfahren und Vorrichtung zur hochpräzisen Vermessung von Oberflächen
DE102012212663A1 (de) 2012-07-19 2014-01-23 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Mikrolithographie mit einer optischen Abstandsmessvorrichtung
DE102012017015B4 (de) 2012-08-20 2015-03-19 Luphos Gmbh Verfahren und Vorrichtung zur hochpräzisen Vermessung von Oberflächen
EP2806246B1 (fr) 2013-05-24 2019-11-20 Attocube Systems AG Interféromètre à deux sources laser
DE102015201754A1 (de) 2015-02-02 2016-08-04 Picofine GmbH Vorrichtung und Verfahren zur Justierung eines Laserinterferometers
DE102015209567B3 (de) * 2015-05-26 2016-10-27 Carl Zeiss Industrielle Messtechnik Gmbh Optischer Mehrwellenlängen-Sensor zur Messung von Abständen zu einer Oberfläche und entsprechendes Messgerät
DE202016100211U1 (de) 2016-01-18 2017-04-19 Friedrich Vollmer Feinmessgerätebau Gmbh Abstandsmessgerät
DE102016100745B3 (de) * 2016-01-18 2017-03-09 Friedrich Vollmer Feinmessgerätebau Gmbh Verfahren zur optischen Abstandsmessung sowie ein Abstandsmessgerät
EP3401634A1 (fr) 2017-05-12 2018-11-14 Taylor Hobson Limited Dispositif télémétrique destiné à déterminer une distance par rapport à un objet
EP3789727B1 (fr) 2019-09-04 2024-04-10 Taylor Hobson Limited Dispositif de mesure interférométrique
GB2622565A (en) 2022-07-15 2024-03-27 Taylor Hobson Ltd A collision protection apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2848664A1 (fr) * 2002-12-11 2004-06-18 Micro Module Detecteur de position, forme et reflectivite d'une surface
WO2005001445A2 (fr) * 2001-12-18 2005-01-06 Massachusetts Institute Of Technology Systemes et procedes de mesures de phases

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4552457A (en) * 1983-02-01 1985-11-12 Giallorenzi Thomas G Fiber optic interferometer using two wavelengths or variable wavelength
JPS62106306A (ja) * 1985-11-01 1987-05-16 Olympus Optical Co Ltd 多波長干渉計
DE4139865C2 (de) * 1991-12-03 1994-03-10 Deutsche Aerospace Abstimmbarer Zwei-Wellenlängen-Laser für Superheterodyn-Interferometer
TW367407B (en) * 1997-12-22 1999-08-21 Asml Netherlands Bv Interferometer system with two wavelengths, and lithographic apparatus provided with such a system
US6781699B2 (en) * 2002-10-22 2004-08-24 Corning-Tropel Two-wavelength confocal interferometer for measuring multiple surfaces
DE102005042733B3 (de) * 2005-09-05 2007-01-25 Universität Stuttgart Verfahren und Anordnung zur Spektral-Interferometrie mit chromatischer Tiefenaufspaltung, insbesondere auch Mirau-Interferometer
JP2007047043A (ja) * 2005-08-10 2007-02-22 Pentax Corp 多波長干渉計
JP5558005B2 (ja) * 2006-01-23 2014-07-23 ザイゴ コーポレーション 物体をモニタする干渉計システム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005001445A2 (fr) * 2001-12-18 2005-01-06 Massachusetts Institute Of Technology Systemes et procedes de mesures de phases
FR2848664A1 (fr) * 2002-12-11 2004-06-18 Micro Module Detecteur de position, forme et reflectivite d'une surface

Also Published As

Publication number Publication date
DE102008033942B3 (de) 2010-04-08
WO2010006764A2 (fr) 2010-01-21

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